Abstract: The object of the present invention is to identify a molecule that is specifically recognized by antibody RM2 in tissue or serum of a cancer patient, and provide a method for diagnosing cancer in a simple manner with high specificity using the molecule as an indicator. The present method comprises evaluating a risk or grade of malignancy of genitourinary cancer in a subject using the level of the haptoglobin ? chain to which antibody RM2 specifically binds or a fragment thereof in tissue or body fluid isolated from the subject as an indicator.

Abstract: A reaction assembly (20) for supporting a mover (18) includes a countermass assembly (26) and a fluid distribution network (28). The fluid distribution network (28) allows for circulating a fluid (30) to provide cooling for the portion of the mover (18). The fluid distribution network (28) is positioned substantially adjacent to the countermass assembly (26), and the fluid distribution network (28) being substantially thermally decoupled from the structure of the countermass assembly (26) to inhibit thermal deformation of the countermass assembly (26).

Abstract: Provided is an oil or fat composition including the following components (A) and (B): (A) a tetracyclic triterpene alcohol selected from the group consisting of 24-methylene cycloartanol and cyclobranol; and (B) an oil or fat containing diacylglycerol at 5 weight % or more.

Abstract: Provided is an oil or fat composition including the following components (A) and (B): (A) a tetracyclic triterpene alcohol selected from the group consisting of 24-methylene cycloartanol and cyclobranol; and (B) an oil or fat containing diacylglycerol at 5 weight % or more.

Abstract: A stage assembly (220) that moves a work piece (200) along a first axis, along a second axis and along a third axis includes a first stage (238), a first mover assembly (242) that moves the first stage (238) along the first axis, a second stage (240) that retains the work piece (200), a second mover assembly (244), and a non-contact bearing (257). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) along the first axis, along the second axis, and along the third axis. The non-contact bearing (257) supports the mass of the second stage (240). Further, the non-contact bearing (257) allows the second stage (240) to move relative to the first stage (238) along the first axis and along the second axis. The second mover assembly (244) can move the second stage (240) with at least four degrees of movement.

Abstract: The object of the present invention is to identify a molecule that is specifically recognized by antibody RM2 in tissue or serum of a cancer patient, and provide a method for diagnosing cancer in a simple manner with high specificity using the molecule as an indicator. The present method comprises evaluating a risk or grade of malignancy of genitourinary cancer in a subject using the level of the haptoglobin ? chain to which antibody RM2 specifically binds or a fragment thereof in tissue or body fluid isolated from the subject as an indicator.

Abstract: An exposure apparatus includes an illumination optical system that guides illumination light to a mask; a projection optical system that projects the pattern irradiated with the illumination light, onto a substrate; and a supporting device that integrally suspendingly supports at least part of the illumination optical system and the projection optical system, with a supporting member having a flexible structure.

Abstract: A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.

Abstract: An environment control apparatus comprises a first member, which has a first opening, which forms a first space and is formed at least a part and a first surface provided in the vicinity of the first opening, and a movable member, which has a second surface, which is arranged so as to cover the first opening and opposes the first surface, and is capable of relative movement with respect to the first opening while being guided by the first surface, and a gas seal mechanism is formed between the first surface and the second surface, and it is capable of setting the first space to a prescribed status.

Abstract: A permanent magnet fixed to a peripheral portion of a lens cell includes two magnets that are joined together so that the north poles face each other and the south poles are exposed. A first driving coil is arranged to face toward exits for lines of magnetic force from the joining surfaces of the north poles of the permanent magnet, and a second driving coil is arranged to face toward entrances for lines of magnetic force in the permanent magnet. The orientation of the lens is adjusted by adjusting the currents supplied to the first driving coil and second driving coil to drive the lens cell in an optical axis direction and horizontal direction in a state in which the lens cell is levitated relative to the cover.

Abstract: Methods and apparatus for controlling a stage assembly in up to six degrees of freedom using actuators which each allow for forces to be generated in a horizontal direction and a vertical direction are disclosed. According to one aspect of the present invention, a stage apparatus includes a stage assembly and a first stator arrangement. The stage assembly includes a first magnet arrangement of an actuator assembly, and the first stator arrangement is part of the actuator assembly. The first magnet arrangement cooperates with the first stator arrangement to allow the stage assembly to move relative to a first horizontal axis as well as a vertical axis.

Abstract: A reticle blind which is capable of being opened and closed at a relatively high speed and which does not cause mechanical disturbances or reaction forces. The reticle blind includes two reticle blind assemblies designed to cooperate with one another to control the passing of a laser beam of an exposure system onto a work piece, such as a semiconductor wafer or flat panel display. Each reticle blind assembly includes a linear motor having a mover and a blind configured to be positioned between a first position and a second position by the mover. Each reticle blind assembly also includes a counter mass assembly including a portion of a guide mechanism having at least one guide bar and a stator of the linear motor. The stator of the linear motor and the guide bar are integrated to form the counter mass which is configured to absorb reaction forces that are created when the blind is moved. In various embodiments, the blinds can be configured to operate in the vertical or horizontal orientation.

Abstract: An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.

Abstract: Methods and apparatus for providing a fine stage with up to six degrees of freedom are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage assembly, a second stage assembly, and a countermass arrangement. The first stage assembly including a first component of a first actuator, and supports a second actuator arrangement. The second stage assembly is supported over the first stage assembly such that the second actuator arrangement drives the second stage assembly along a vertical axis. The countermass arrangement includes a second component of the first actuator. The first component cooperates with the second component to allow the first stage assembly to move relative to a first horizontal axis. The countermass arrangement absorbs reaction forces associated with the first and second stage assemblies.

Abstract: A system for cooling motors of a lithographic tool. The system includes a core plate having a plurality of outward extending cores. A cover is joined to the core plate or the plurality of outward extending cores, which forms at least one flow path for coolant to remove heat from coils of the motor.

Abstract: A stage assembly (220) that moves a work piece (200) along a first axis, along a second axis and along a third axis includes a first stage (238), a first mover assembly (242) that moves the first stage (238) along the first axis, a second stage (240) that retains the work piece (200), a second mover assembly (244), and a non-contact bearing (257). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) along the first axis, along the second axis, and along the third axis. The non-contact bearing (257) supports the mass of the second stage (240). Further, the non-contact bearing (257) allows the second stage (240) to move relative to the first stage (238) along the first axis and along the second axis. The second mover assembly (244) can move the second stage (240) with at least four degrees of movement.

Abstract: A table with six degrees of freedom, such as a wafer table for a lithography system, has an upper table stacked on top of a lower table. Each of these two stacked tables has three degrees of freedom and is provided with actuators for controlling its motions in these three degrees of freedom. The vertical motion, the pitching and the rolling of the lower table may be controlled by actuators that may be voice coil motors. The upper table is supported on the flat top surface of the lower table so as to be slidable laterally, or two dimensionally. This two dimensional motion of the upper table and its yaw may be controlled by another set of actuators which may be smaller voice coil motors. A wafer holder supporting a workpiece such as a wafer for the lithography system may be secured onto the upper table by a vacuum suction mechanism.

Abstract: A coolant cools an object (such as, for example, a coil of a linear motor that drives a stage of an exposure apparatus) while suppressing the generation of a temperature distribution in various parts of the object being cooled by using a coolant that includes a first component and a second component dispersed in the first component, the second component increases in temperature by a lesser amount than the first component when a predetermined amount of heat is absorbed by the first and second components, respectively. The second component may be a substance that changes phase (for example, from a solid to a liquid or from a liquid to a gas) in order to absorb the predetermined amount of heat. The second component may have a higher heat capacity than the first component, and may not change phase when it absorbs heat to cool the object.

Abstract: A temperature/voltage detecting unit has a temperature detector and a voltage detector. The temperature detector has a light electric system stabilized power supply for stabilizing a light electric system power supply voltage, a temperature resistance element provided close to a corresponding battery element, for changing its resistance value based on a change in temperature, and a voltage-to-frequency converter operating based on a voltage from the light electric system stabilized power supply, for detecting a terminal voltage of the temperature resistance element to which a constant current flows from the light electric system stabilized power supply, converting this value into frequency information and outputting the frequency information.

Abstract: A hydrogen detector detects a concentration of hydrogen gas in an enclosed space communicating with an accommodation space for accommodating a battery, a hydrogen gas expeller is operative for expelling hydrogen gas from the enclosed space, a controller responds to a concentration of hydrogen gas detected by the detector, as the detected concentration exceeds a lower significant concentration, to provide a control signal for driving the expeller, an alarm system is operative for providing an alarm on an abnormal concentration of hydrogen gas, and another controller responds to the concentration of hydrogen gas detected by the detector, as the detected concentration exceeds a higher significant concentration, to provide a control signal for driving the alarm system.