Abstract: A nonaqueous electrolyte rechargeable battery including a positive electrode comprising a molybdenum metal oxide deposited, in the form of a thin film, on an aluminum-containing substrate and represented by the formula Mo1−xMxO2−y (where M is at least one element selected from the group consisting of Ni, Co, Mn, Fe, Cu, Al, Mg, W, Sc, Ti, Zn, Ga, Ge, Nb, Rh, Pd and Sn, x satisfies the relationship 0.005≦x≦0.5, and y satisfies the relationship 0.6≦y≦1.2).

Abstract: A member is disclosed which includes a hard carbon film provided through an interlayer or directly on a main body such as a vane. A mixed layer is formed within the main body or interlayer adjacent to an outer surface of the main body or interlayer. The mixed layer contains carbon and a constituent element of either the main body or the interlayer. The mixed layer has a carbon content gradient in its thickness direction so that a carbon content in a thickness portion thereof closer to an outer surface of the mixed layer is higher than in a thickness portion thereof remoter from the outer surface of the mixed layer.

Abstract: A member is disclosed which includes a hard carbon film provided through an interlayer or directly on a main body such as a vane. A mixed layer is formed within the main body or interlayer adjacent to an outer surface of the main body or interlayer. The mixed layer contains carbon and a constituent element of either the main body or the interlayer. The mixed layer has a carbon content gradient in its thickness direction so that a carbon content in a thickness portion thereof closer to an outer surface of the mixed layer is higher than in a thickness portion thereof remoter from the outer surface of the mixed layer.

Abstract: A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp.sup.2 to sp.sup.3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of the thin film.

Abstract: A hard carbon film-coated substrate is disclosed which has between a substrate and a hard carbon film an interlayer principally comprised of at least one selected from the group consisting of Al, Cr, Sn, Co and B, oxides, nitrides and carbides thereof.

Abstract: A thin film magnetic head includes a magnetoresistive element portion movable over and relative to a magnetic recording medium for reading information stored therein, upper and lower shielding layers disposed with the magnetoresistive element portion therebetween for magnetically shielding the magnetoresistive element portion, and upper and lower gap insulative layers respectively interposed between the upper shielding layer and the magnetoresistive element portion and between the lower shielding layer and the magnetoresistive element portion. Each of the upper and lower gap insulative layers includes a hydrogen-incorporated film. The upper gap insulative layer has an increased hydrogen content and a reduced internal stress relative to the lower gap insulative layer.

Abstract: A surface acoustic wave device is disclosed which includes a piezoelectric substrate upon which a surface wave propagation film, which is comprised of a diamond-like carbon or aluminum nitride film, is provided.

Abstract: A thin-film magnetic head includes an upper protective layer, a lower protective layer, and a head forming layer which is provided between the upper and lower protective layers, and the head forming layer further includes a recording head forming layer, a reproducing head forming layer, and a separation layer which is provided between the recording and reproducing head forming layers, while any one of the upper protective layer, the lower protective layer and the separation layer is formed by a diamond-like carbon coating.

Abstract: A thin-film magnetic head which is adapted to be relatively moved on a magnetic recording medium for writing and/or reading information to and/or from the magnetic recording medium includes a carbon film of not more than 200 .ANG. in thickness covering a slider surface of the thin-film magnetic head adapted to face the magnetic recording medium, and an intermediate layer formed in the form of island between the carbon film and the slider surface of the thin-film magnetic head.

Abstract: A method for forming the coated substrate includes a first step of forming the intermediate layer on the substrate in a vacuum chamber, and a second step of forming the hard carbon film on the intermediate layer within the same vacuum chamber. The first step may involve evaporation or sputtering of material atoms for the intermediate layer, either with or without plasma generation, or directly forming a plasma from a gas containing the material atoms. The second step may involve forming a plasma from a gas that contains carbon. Another method involves generating a plasma, applying a high frequency voltage to the substrate so as to generate a self-bias of not more than -20 V, and supplying a reaction gas that contains carbon.

Abstract: A method of forming a diamond-like carbon film on a substrate arranged in a vacuum chamber includes the steps of generating an arc-discharge plasma current in the vacuum chamber, supplying a reaction gas containing carbon atoms, such as CH.sub.4 gas for example, into the arc-discharge plasma current, applying a high-frequency voltage to the substrate so that a self-bias developed in the substrate is not more than -200 V, and forming a diamond-like carbon film from the reaction gas on the substrate that is supplied with the high-frequency voltage.

Abstract: A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.

Abstract: A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.

Abstract: The disclosed method of forming a high-function material film such as a ZrN thin film on a substrate in a vacuum chamber allows the color tone and uniformity of the film to be controlled. Gaseous nitrogen and gaseous oxygen, or nitrogen ions and oxygen ions, are supplied to the substrate while hard material atoms such as Zr atoms are emitted from an evaporation source toward the substrate. A supply partial pressure of the gaseous oxygen is set at a value within a range from about 10.sup.-5 Torr to about 10.sup.-4 Torr.

Abstract: The body of a micromachine has a plurality of energy-power converting means for receiving different forms of energy including rays, microwaves and sound waves and converting the different forms of energy to electric power, i.e., photoelectromotive devices, a microwave-power converter and an acousto-electromotive device. The electric power obtained by these means is supplied to a drive system and an operation system incorporated in the machine body.