Abstract: An Angular-rate detecting apparatus includes four mass portions connected by at least one support beam, and the mass portions have respective individual vibration generators disposed thereon. The individual vibration generators excite the normal vibration mode by vibrating pairs of the mass portions adjacent to each other in opposite phases. Thus, the mass portions are forcibly vibrated in the normal vibration mode. Angular rate detectors detect displacements of inner frames of central mass portions as an angular rate about an axis perpendicular to a detection direction and also to a vibration direction when the inner frames are displaced in the detection direction while vibrating in the vibration direction.

Abstract: An angular velocity sensor includes a substrate; an impact damping mechanism disposed on the substrate for damping an impact applied to the substrate; an oscillator supported to the inside of the impact damping mechanism displaceable in two directions parallel to the substrate and orthogonal to each other by using an oscillator support beam; oscillation-generating means for oscillating the oscillator in an oscillating direction; and angular-velocity detecting means for detecting a displacement of the oscillator as an angular velocity when the oscillator is displaced in a detecting direction orthogonal to the oscillating direction. The impact damping mechanism damps an impact along at least one direction of the oscillating direction and the detecting direction so as to prevent the impact from being transferred to the oscillator from the substrate.

Abstract: An angular velocity sensor includes four mass members which are connected by retaining beams, and the retaining beams are fixed to a substrate at node portions which correspond to nodes of the retaining beams when the mass members vibrate such that two adjacent mass members are in opposite phases. The mass members vibrate in an X-axis direction while the overall center of gravity is maintained at an approximately constant position. Two mass members disposed at the central region move in a Y-axis direction in accordance with an angular velocity about a Z axis, and the angular velocity is detected on the basis of the displacements thereof. The mass members vibrate in a stable vibrational state and dimensional errors or other problems, are compensated for by their shapes that are symmetric to each other in the Y-axis direction. Accordingly, the detection accuracy and reliability of the sensor are improved.

Abstract: An angular velocity sensor includes a substrate; a first vibrator supported on the substrate by a first support beam, such as to be vibratable in a direction parallel to the substrate; a second vibrator supported by a second support beam parallel to the first vibrator, such as to be vibratable in a direction orthogonal to the vibrating direction of the first vibrator; a vibration generator for vibrating the first vibrator parallel to the substrate; an angular velocity detector for detecting the amount of displacement of the second vibrator due to an angular velocity; and a vibration-state monitor provided between the substrate and the first vibrator for monitoring the amount of displacement of the first vibrator when it is vibrated by the vibration detector.

Abstract: An angular velocity sensor includes four mass members which are connected by retaining beams, and the retaining beams are fixed to a substrate at node portions which correspond to nodes of the retaining beams when the mass members vibrate such that two adjacent mass members are in opposite phases. The mass members vibrate in an X-axis direction while the overall center of gravity is maintained at an approximately constant position. Two mass members disposed at the central region move in a Y-axis direction in accordance with an angular velocity about a Z axis, and the angular velocity is detected on the basis of the displacements thereof. The mass members vibrate in a stable vibrational state and dimensional errors or other problems, are compensated for by their shapes that are symmetric to each other in the Y-axis direction. Accordingly, the detection accuracy and reliability of the sensor are improved.

Abstract: A center mass and a pair of outer masses are connected to each other via supporting beams displaceable in the X-axial direction. When an angular velocity sensor is operated, a vibration generator causes masses to vibrate substantially at opposite phases to each other with respect to the X-axial direction. In this state, if an angular velocity on the Y-axis is added, the displacements of the masses, caused when the masses are displaced in the Z-axial direction, are detected as the angular velocity. Moreover, fixing portions, formed on a substrate, support the nodes of the supporting beams corresponding to the nodes to suppress vibration of the masses from being transmitted to the substrate.

Abstract: A capacitance-type external-force detecting device includes a substrate, a moveable unit which is supported by the substrate via a supporting beam and which can be displaced in the detecting direction, a comb-shaped fixed electrode provided on the substrate and including a plurality of fixed electrode units spaced in the detecting direction, a comb-shaped moveable electrode provided on the moveable unit and including a plurality of moveable-side electrode units provided between the corresponding fixed electrode units so that the moveable-side electrode units are meshed with the corresponding fixed electrode units, and a capacitance-detecting unit for detecting the displacement amount of the moveable part, at the time when the external force causes the moveable unit to be displaced in the detecting direction, as the variation in the ratio of the overall capacitance between the fixed electrode units and the moveable electrode units and for outputting a voltage signal substantially in proportion thereto.

Abstract: An angular velocity sensor according to an embodiment of the present invention includes: a supporting substrate; a support-fixing portion disposed in the supporting substrate; a first supporting beam connected to the support-fixing portion; a first oscillator supported with the first supporting beam; a second supporting beam connected to the first oscillator; a second oscillator supported with the second supporting beam oscillating in the direction that a Coriolis force is generated; driving electrodes for driving the first oscillator and the second oscillator in a predetermined direction; and detecting electrodes for detecting the displacement of the second oscillator caused by the Coriolis force applied to the second oscillator, wherein the first supporting beam extends at least in the direction orthogonal to the oscillating direction of the first oscillator, both ends of the first supporting beam being connected to the first oscillator, and a longitudinally intermediate portion of the first supporting beam

Abstract: A capacitance-type external-force detecting device includes a substrate, a moveable unit which is supported by the substrate via a supporting beam and which can be displaced in the detecting direction, a comb-shaped fixed electrode provided on the substrate and including a plurality of fixed electrode units spaced in the detecting direction, a comb-shaped moveable electrode provided on the moveable unit and including a plurality of moveable-side electrode units provided between the corresponding fixed electrode units so that the moveable-side electrode units are meshed with the corresponding fixed electrode units, and a capacitance-detecting unit for detecting the displacement amount of the moveable part, at the time when the external force causes the moveable unit to be displaced in the detecting direction, as the variation in the ratio of the overall capacitance between the fixed electrode units and the moveable electrode units and for outputting a voltage signal substantially in proportion thereto.

Abstract: A center mass and a pair of outer masses are connected to each other via supporting beams displaceable in the X-axial direction. When an angular velocity sensor is operated, a vibration generator causes masses to vibrate substantially at opposite phases to each other with respect to the X-axial direction. In this state, if an angular velocity on the Y-axis is added, the displacements of the masses, caused when the masses are displaced in the Z-axial direction, are detected as the angular velocity. Moreover, fixing portions, formed on a substrate, support the nodes of the supporting beams corresponding to the nodes to suppress vibration of the masses from being transmitted to the substrate.

Abstract: An angular velocity sensor includes a substrate; an impact damping mechanism disposed on the substrate for damping an impact applied to the substrate; an oscillator supported to the inside of the impact damping mechanism displaceable in two directions parallel to the substrate and orthogonal to each other by using an oscillator support beam; oscillation-generating means for oscillating the oscillator in an oscillating direction; and angular-velocity detecting means for detecting a displacement of the oscillator as an angular velocity when the oscillator is displaced in a detecting direction orthogonal to the oscillating direction. The impact damping mechanism damps an impact along at least one direction of the oscillating direction and the detecting direction so as to prevent the impact from being transferred to the oscillator from the substrate.

Abstract: An angular velocity sensor includes a substrate; a first vibrator supported on said substrate by a first support beam, such as to be vibratable in a direction parallel to said substrate; a second vibrator supported by a second support beam parallel to said first vibrator, such as to be vibratable in a direction orthogonal to the vibrating direction of the first vibrator; vibration generating means for vibrating the first vibrator parallel to said substrate; angular velocity detecting means for detecting the amount of displacement of the second vibrator due to an angular velocity; and vibration-state monitor means provided between the substrate and the first vibrator for monitoring the amount of displacement of the first vibrator when it is vibrated by the vibration generating means.

Abstract: The present invention relates to an angular velocity sensor comprising a tuning fork vibrator which exerts a tuning fork vibration by receiving a driving input and which generates a torque around the axis of a tuning fork owing to Coriolis force by undergoing a rotational action around the center of the tuning fork. The sensor has a detection torsional vibrator which exerts torsional vibration owing to the torque generated by the tuning fork vibrator, whereby the angular velocity sensor detects a rotational angular velocity around the axis of the tuning fork based upon the magnitude of the vibration of the detection torsional vibrator. At least one buffer torsional vibrator is positioned around the detection torsional vibrator for moderating external transmission energy loss of the torsional vibration of the detection torsional vibrator.

Abstract: A flat-shaped fine Fe-Ni alloy powder suitable for use as a magnetic shield coating material for cards or the like. The powder has a mean particle size of 0.1 to 30 .mu.m, a mean thickness not greater than 2 .mu.m and a coercive force not greater than 400 A/m. The flat-shaped fine powder is produced by preparing an Fe-Ni alloy powder of a composition which exhibits, in a bulk state, a saturated magnetostriction constant value falling within the range of .+-.15.times.10.sup.-6 and which contains, by weight, 70 to 83% Ni, 2 to 6% Mo, 3 to 6% Cu, 1 to 2% Mn, not more than 0.05% C and the balance Fe and incidental impurities, pulverizing the alloy powder by an attrition mill, and annealing the pulverized powder in a fluidized or moving state in a substantially non-oxidizing atmosphere.

Abstract: A flat-shaped fine Fe-Ni alloy powder suitable for use as a magnetic shield coating material for cards or the like. The power has a mean particle size of 0.1 to 30 .mu.m, a mean thickness not greater than 2 .mu.m and a coercive force not greater than 400 A/m. The flat-shaped fine powder is produced by preparing an Fe-Ni alloy powder of a composition which exhibits, in a bulk state, a saturated magnetostriction constant value falling within the range of .+-.15.times.10.sup.-6 and which contains, by weight, 70 to 83% Ni, 2 to 6% Mo, 3 to 6% Cu, 1 to 2% Mn, not more than 0.05% C and the balance Fe and incidental impurities, pulverizing the alloy powder by an attrition mill, and annealing the pulverized powder in a fluidized or moving state in a substantially non-oxidizing atmosphere.