Abstract: A transport system includes a first track in a first building, a second track in a second building, overhead transport vehicles, and a relay to pass a FOUP between the overhead transport vehicles. The overhead transport vehicle traveling on a first outward path portion and the overhead transport vehicle traveling on a second return path portion can transfer the FOUP to a same storage shelf, and the overhead transport vehicle traveling on a first return path portion and the overhead transport vehicle traveling on a second outward path portion can transfer the FOUP to the same storage shelf.

Abstract: A conveyance system includes ceiling conveyance vehicles, a first track, a second track, and a control device configured to control the operation of the ceiling conveyance vehicle. Each of the ceiling conveyance vehicle traveling on the first track and the ceiling conveyance vehicle traveling on the second track is able to transfer a FOUP to the same transfer destination. The control device has a first control unit configured to control the operation of the ceiling conveyance vehicle traveling on the first track and a second control unit configured to control the operation of the ceiling conveyance vehicle traveling on the second track, and when one of the first control unit and the second control unit is inoperable, the other of the first control unit and the second control unit is operable.

Abstract: An overhead transport vehicle system includes a travel rail, an overhead transport vehicle, and a gas supplier. The overhead transport vehicle travels on the travel rail to transport a FOUP, includes a tank to store inactive gas, and supplies the inactive gas into the FOUP from the tank during transport of the FOUP. The gas supplier is provided along the travel rail to supply inactive gas into the tank of the overhead transport vehicle.

Abstract: A transport system includes a stocker including a crane overhead track and a suspension crane that transports an article between storages and a delivery port, an overhead-transport-vehicle overhead track outside of a stocker area and alongside the delivery port and a load port of a processing tool and extending to a stocker area, an overhead transport vehicle to transport the article between the delivery port and the load port, and a joint track. A crane runner can enter the overhead-transport-vehicle overhead track from the crane overhead track via the joint track to the stocker area.

Abstract: A transport system includes first and second intrabay overhead tracks, first and second interbay overhead tracks, first and second storages, first and second delivery ports, first and second cranes including first and second runners that run along the first and second intrabay overhead tracks, respectively, first and second masts, and first and second transferors, and an overhead transport vehicle including a runner that runs along the first and second intrabay overhead tracks, a holder, a lifting driver, and a lateral extender.

Abstract: A conveyance system includes: a first track and a second track arranged parallel in a vertical direction such that device ports are positioned therebelow and on one side thereof; a plurality of overhead conveyance vehicles configured to travel along each of the first track and the second track and each convey a FOUP, and storage shelves provided below and on the other side of the first track and the second track and each configured to have the FOUP placed thereon. Each of the overhead conveyance vehicles includes: a gripping unit capable of gripping the FOUP; a movement mechanism capable of moving the gripping unit to a position above the device ports or above the storage shelves; and a hoisting mechanism capable of raising and lowering the gripping unit, which has been moved to the position above each thereof by the movement mechanism.

Abstract: A transport system includes an overhead transport vehicle that travels on a first track and is capable of delivering and receiving an article to and from a load port of a processing tool; a storage rack having a plurality of shelves that store the articles arranged in a vertical direction; a crane that travels on a second track parallel with the first track and is capable of delivering and receiving the article to and from the load port and the storage rack, respectively; and a first buffer arranged at a position where the crane that has stopped traveling at a position to deliver or receive the article to or from the load port is able to deliver or receive the article.

Abstract: A transport system includes first and second intrabay overhead tracks, first and second interbay overhead tracks, first and second storages, first and second delivery ports, first and second cranes including first and second runners that run along the first and second intrabay overhead tracks, respectively, first and second masts, and first and second transferors, and an overhead transport vehicle including a runner that runs along the first and second intrabay overhead tracks, a holder, a lifting driver, and a lateral extender.

Abstract: A transport system includes a stocker including a crane overhead track and a suspension crane that transports an article between storages and a delivery port, an overhead-transport-vehicle overhead track outside of a stocker area and alongside the delivery port and a load port of a processing tool and extending to a stocker area, an overhead transport vehicle to transport the article between the delivery port and the load port, and a joint track. A crane runner can enter the overhead-transport-vehicle overhead track from the crane overhead track via the joint track to the stocker area.

Abstract: A transport system includes an overhead transport vehicle that travels on a first track and is capable of delivering and receiving an article to and from a load port of a processing tool; a storage rack having a plurality of shelves that store the articles arranged in a vertical direction; a crane that travels on a second track parallel with the first track and is capable of delivering and receiving the article to and from the load port and the storage rack, respectively; and a first buffer arranged at a position where the crane that has stopped traveling at a position to deliver or receive the article to or from the load port is able to deliver or receive the article.

Abstract: A transport vehicle system includes: a first transport vehicle configured to travel on a lower track in one direction; a second transport vehicle configured to travel on an upper track in one direction; a first transfer section onto which a conveyed object is delivered from the second transport vehicle and from which the conveyed object is received by the first transport vehicle; and a second transfer section onto which the conveyed object is delivered from the first transport vehicle and from which the conveyed object is received by the second transport vehicle.

Abstract: A conveyance system includes: a first track and a second track arranged parallel in a vertical direction such that device ports are positioned therebelow and on one side thereof; a plurality of overhead conveyance vehicles configured to travel along each of the first track and the second track and each convey a FOUP, and storage shelves provided below and on the other side of the first track and the second track and each configured to have the FOUP placed thereon. Each of the overhead conveyance vehicles includes: a gripping unit capable of gripping the FOUP; a movement mechanism capable of moving the gripping unit to a position above the device ports or above the storage shelves; and a hoisting mechanism capable of raising and lowering the gripping unit, which has been moved to the position above each thereof by the movement mechanism.

Abstract: A transport vehicle system includes: a first transport vehicle configured to travel on a lower track in one direction; a second transport vehicle configured to travel on an upper track in one direction; a first transfer section onto which a conveyed object is delivered from the second transport vehicle and from which the conveyed object is received by the first transport vehicle; and a second transfer section onto which the conveyed object is delivered from the first transport vehicle and from which the conveyed object is received by the second transport vehicle.

Abstract: The present invention provides an overhead travelling carriage system in which an overhead travelling carriage 110 is run along a running rail to convey a cassette 14 between processing devices 111. The overhead travelling carriage system is provided with an elevating space 8 for a platform 12 on which transfer means 51 is provided to transfer the cassette 14 and a storage space 10 in which a plurality of shelves are provided in a vertical direction to store cassettes 14. The elevating space and the storage space are arranged in a direction orthogonal to the running rail, as viewed from above. According to the present invention, the stocker requires a reduced space.

Abstract: The present invention provides an overhead travelling carriage system in which an overhead travelling carriage 110 is run along a running rail to convey a cassette 14 between processing devices 111. The overhead travelling carriage system is provided with an elevating space 8 for a platform 12 on which transfer means 51 is provided to transfer the cassette 14 and a storage space 10 in which a plurality of shelves are provided in a vertical direction to store cassettes 14. The elevating space and the storage space are arranged in a direction orthogonal to the running rail, as viewed from above. According to the present invention, the stocker requires a reduced space.