Patents by Inventor Yoichi Ose
Yoichi Ose has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12165828Abstract: An electron beam emitted from a photoexcited electron gun is increased in luminance. An electron gun 15 includes: a photocathode 1 including a substrate 11 and a photoelectric film 10; a light source 7 that emits pulsed excitation light; a condenser lens 2 that focuses the pulsed excitation light toward the photocathode; and an extractor electrode 3 that faces the photocathode and that accelerates an electron beam generated from the photoelectric film by focusing the pulsed excitation light by the condenser lens, transmitting the pulsed excitation light through the substrate of the photocathode, and causing the pulsed excitation light to be incident on the photocathode. The pulsed excitation light is condensed at different timings at different positions on the photoelectric film of the photocathode.Type: GrantFiled: October 31, 2019Date of Patent: December 10, 2024Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takashi Ohshima, Hideo Morishita, Tatsuro Ide, Naohiro Kohmu, Momoyo Enyama, Yoichi Ose, Toshihide Agemura, Junichi Katane
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Publication number: 20240161997Abstract: A light source that emits pulse excitation light includes a laser light source, an optical splitter that splits a pulse laser beam into a plurality of pulse laser beams, phase adjusters and optical amplifiers provided for the pulse laser beams, and an optical combiner that combines the plurality of pulse laser beams whose phases are adjusted and that are amplified, and outputs combined light as the pulse excitation light. An optical phase controller controls phase delay amounts of the phase adjusters, and an optical monitor detects an inclination of the pulse excitation light relative to an optical axis of a focusing lens. The optical phase controller stores phase delay amount data indicating phase delay amounts of the plurality of phase adjusters in which the inclination is a predetermined value, and sets the phase delay amounts of the plurality of phase adjusters based on the phase delay amount data.Type: ApplicationFiled: April 16, 2021Publication date: May 16, 2024Inventors: Takashi OHSHIMA, Naohiro KOHMU, Hideo MORISHITA, Tatsuro IDE, Yoichi OSE, Junichi KATANE, Toshihide AGEMURA
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Publication number: 20240128049Abstract: An object of the invention is to provide an electron microscope capable of obtaining a sufficient energy resolution without forming a long drift space and capable of attaining high energy discrimination detection performance with approximately the same device size as in the related art. The electron microscope according to the invention includes a pulsed electron emission mechanism configured to emit an electron beam in a pulsed manner, and discriminates energy of signal electrons by discriminating the signal electrons, which are emitted from a sample by irradiating the sample with the electron beam, according to a time of flight (see FIG. 2).Type: ApplicationFiled: August 31, 2021Publication date: April 18, 2024Inventors: Katsura TAKAGUCHI, Takashi OHSHIMA, Hideo MORISHITA, Yoichi OSE, Junichi KATANE, Toshihide AGEMURA, Michio HATANO
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Publication number: 20240120168Abstract: An electron beam emitted from a photoexcited electron gun is increased in luminance. An electron gun 15 includes: a photocathode 1 including a substrate 11 and a photoelectric film 10; a light source 7 that emits pulsed excitation light; a condenser lens 2 that focuses the pulsed excitation light toward the photocathode; and an extractor electrode 3 that faces the photocathode and that accelerates an electron beam generated from the photoelectric film by focusing the pulsed excitation light by the condenser lens, transmitting the pulsed excitation light through the substrate of the photocathode, and causing the pulsed excitation light to be incident on the photocathode. The pulsed excitation light is condensed at different timings at different positions on the photoelectric film of the photocathode.Type: ApplicationFiled: October 31, 2019Publication date: April 11, 2024Applicants: Hitachi High-Tech Corporation, Hitachi High-Tech CorporationInventors: Takashi Ohshima, Hideo Morishita, Tatsuro Ide, Naohiro Kohmu, Momoyo Enyama, Yoichi Ose, Toshihide Agemura, Junichi Katane
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Publication number: 20230402246Abstract: The apparatus includes: a photocathode including a substrate and a photoelectric film formed on the substrate; a light source configured to emit a pulsed excitation light; a condenser lens facing the substrate of the photocathode and configured to condense the pulsed excitation light toward the photocathode; a first anode electrode and a second anode electrode facing the photoelectric film of the photocathode; a first power supply configured to apply a first control voltage between the first anode electrode and the second anode electrode; and a second power supply configured to apply an acceleration voltage between the photocathode and the second anode electrode. The first anode electrode is disposed between the photocathode and the second anode electrode. A surface of the first anode electrode facing the second anode electrode has a recessed shape, and a surface of the second anode electrode facing the first anode electrode has a protruding shape.Type: ApplicationFiled: December 22, 2020Publication date: December 14, 2023Inventors: Hideo MORISHITA, Takashi OHSHIMA, Yoichi OSE, Toshihide AGEMURA, Makoto KUWAHARA
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Publication number: 20230335367Abstract: An activation mechanism is provided in an activation region of an electron gun, and includes a light source device 3 configured to irradiate a photocathode with excitation light, a heat generating element, an oxygen generation unit configured to generate oxygen by heating the heat generating element, and an emission current meter configured to monitor an emission current generated by electron emission when the photocathode 1 is irradiated with the excitation light from the light source device. In a surface activation process, the photocathode is irradiated with the excitation light from the light source device, an emission current amount of the photocathode is monitored by the emission current meter, the heat generating element is heated to generate oxygen by the oxygen generation unit, and the heating of the heat generating element is stopped when the emission current amount of the photocathode satisfies a predetermined stop criterion.Type: ApplicationFiled: November 10, 2020Publication date: October 19, 2023Inventors: Takashi OHSHIMA, Hideo MORISHITA, Tatsuro IDE, Hiroyasu SHICHI, Yoichi OSE, Junichi KATANE
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Patent number: 11784022Abstract: A scanning electron beam apparatus which two-dimensionally scans a sample by an electron beam to achieve high resolution even with a photoexcited electron source. The electron beam apparatus includes a photocathode including a substrate having a refractive index of more than 1.7 and a photoemissive film, a focusing lens configured to focus an excitation light toward the photocathode, an extractor electrode disposed facing the photocathode and configured to accelerate an electron beam generated from the photoemissive film by focusing the excitation light by the focusing lens and emitting the excitation light through the substrate, and an electron optics including a deflector configured to two-dimensionally scan a sample by the electron beam accelerated by the extractor electrode. For a spherical aberration of the focusing lens, a root mean square of the spherical aberration on the photoemissive film is equal to or less than 1/14 of a wavelength of the excitation light.Type: GrantFiled: January 28, 2019Date of Patent: October 10, 2023Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takashi Ohshima, Tatsuro Ide, Hideo Morishita, Yoichi Ose, Tsunenori Nomaguchi, Toshihide Agemura
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Publication number: 20220406558Abstract: The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric film without being blocked by a differential exhaust diaphragm. A wide range of electron beams off-optical axis can be used even in a high-brightness photocathode that requires high vacuum. As a result, the photoelectric film and the electron gun can be extended in life, can be stabilized, and can be increased in brightness. Further, it is possible to facilitate a control of emitting electron beams from a plurality of positions on the photoelectric film, a timing control of emitting electron beams from a plurality of positions, a condition control of an electron beam in an electron microscope using electron beams.Type: ApplicationFiled: March 25, 2020Publication date: December 22, 2022Inventors: Hideo MORISHITA, Takashi OHSHIMA, Tatsuro IDE, Naohiro KOHMU, Toshihide AGEMURA, Yoichi OSE, Junichi KATANE
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Publication number: 20220165536Abstract: A scanning electron beam apparatus which two-dimensionally scans a sample by an electron beam, to achieve high resolution even with a photoexcited electron source. The electron beam apparatus includes a photocathode including a substrate having a refractive index of more than 1.7 and a photoemissive film, a focusing lens configured to focus an excitation light toward the photocathode, an extractor electrode disposed facing the photocathode and configured to accelerate an electron beam generated from the photoemissive film by focusing the excitation light by the focusing lens and emitting the excitation light through the substrate, and an electron optics including a deflector configured to two-dimensionally scan a sample by the electron beam accelerated by the extractor electrode. For a spherical aberration of the focusing lens, a root mean square of the spherical aberration on the photoemissive film is equal to or less than 1/14 of a wavelength of the excitation light.Type: ApplicationFiled: January 28, 2019Publication date: May 26, 2022Inventors: Takashi Ohshima, Tatsuro Ide, Hideo Morishita, Yoichi Ose, Tsunenori Nomaguchi, Toshihide Agemura
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Patent number: 11251011Abstract: To provide an electron microscope capable of performing the switching-over between normal illumination and annular illumination, wide-area irradiation, an interference pattern as desired or normal illumination in an expeditious and readily manner or achieving a better S/N ratio, the electron microscope comprises a photocathode 101 with negative electron affinity in use; an excitation optical system to excite the photocathode; and an electron optics system to irradiate an electron beam 13 generated from the photocathode by excitation light 12 irradiated through the excitation optical system onto a sample, the excitation optical system including a light source device 107 for the excitation light; and an optical modulation means 108 which is disposed in an optical path of the excitation light to perform spatial phase modulation to the excitation light.Type: GrantFiled: March 29, 2016Date of Patent: February 15, 2022Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takashi Ohshima, Hiroyuki Minemura, Yumiko Anzai, Momoyo Enyama, Yoichi Ose, Toshihide Agemura
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Patent number: 11087947Abstract: To provide an electron microscope capable of performing the switching-over between normal illumination and annular illumination, wide-area irradiation, an interference pattern as desired or normal illumination in an expeditious and readily manner or achieving a better S/N ratio, the electron microscope comprises a photocathode 101 with negative electron affinity in use; an excitation optical system to excite the photocathode; and an electron optics system to irradiate an electron beam 13 generated from the photocathode by excitation light 12 irradiated through the excitation optical system onto a sample, the excitation optical system including a light source device 107 for the excitation light; and an optical modulation means 108 which is disposed in an optical path of the excitation light to perform spatial phase modulation to the excitation light.Type: GrantFiled: March 29, 2016Date of Patent: August 10, 2021Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takashi Ohshima, Hiroyuki Minemura, Yumiko Anzai, Momoyo Enyama, Yoichi Ose, Toshihide Agemura
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Publication number: 20200303152Abstract: To provide an electron microscope capable of performing the switching-over between normal illumination and annular illumination, wide-area irradiation, an interference pattern as desired or normal illumination in an expeditious and readily manner or achieving a better S/N ratio, the electron microscope comprises a photocathode 101 with negative electron affinity in use; an excitation optical system to excite the photocathode; and an electron optics system to irradiate an electron beam 13 generated from the photocathode by excitation light 12 irradiated through the excitation optical system onto a sample, the excitation optical system including a light source device 107 for the excitation light; and an optical modulation means 108 which is disposed in an optical path of the excitation light to perform spatial phase modulation to the excitation light.Type: ApplicationFiled: March 29, 2016Publication date: September 24, 2020Inventors: Takashi OHSHIMA, Hiroyuki MINEMURA, Yumiko ANZAI, Momoyo ENYAMA, Yoichi OSE, Toshihide AGEMURA
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Patent number: 10707046Abstract: An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.Type: GrantFiled: December 8, 2017Date of Patent: July 7, 2020Assignee: Hitachi High-Tech CorporationInventors: Toshiaki Kusunoki, Keigo Kasuya, Takashi Ohshima, Tomihiro Hashizume, Noriaki Arai, Yoichi Ose
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Patent number: 10586674Abstract: In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.Type: GrantFiled: November 24, 2016Date of Patent: March 10, 2020Assignee: Hitachi High-Technologies CorporationInventors: Toshiaki Kusunoki, Tomihiro Hashizume, Keigo Kasuya, Takashi Ohshima, Yusuke Sakai, Yoichi Ose, Noriaki Arai
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Publication number: 20190385809Abstract: An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.Type: ApplicationFiled: December 8, 2017Publication date: December 19, 2019Inventors: Toshiaki KUSUNOKI, Keigo KASUYA, Takashi OHSHIMA, Tomihiro HASHIZUME, Noriaki ARAI, Yoichi OSE
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Publication number: 20190066966Abstract: In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.Type: ApplicationFiled: November 24, 2016Publication date: February 28, 2019Inventors: Toshiaki KUSUNOKI, Tomihiro HASHIZUME, Keigo KASUYA, Takashi OHSHIMA, Yusuke SAKAI, Yoichi OSE, Noriaki ARAI
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Patent number: 9653256Abstract: Provided is a charged-particle-beam device capable of simultaneously cancelling out a plurality of aberrations caused by non-uniform distribution of the opening angle and energy of a charged particle beam. The charged-particle-beam device is provided with an aberration generation lens for generating an aberration due to the charged particle beam passing off-axis, and a corrective lens for causing the trajectory of the charged particle beam to converge on the main surface of an objective lens irrespective of the energy of the charged particle beam. The main surface of the corrective lens is disposed at a crossover position at which a plurality of charged particle beams having differing opening angles converge after passing through the aberration generation lens.Type: GrantFiled: November 5, 2014Date of Patent: May 16, 2017Assignee: Hitachi High-Technologies CorporationInventors: Akira Ikegami, Hideto Dohi, Hideyuki Kazumi, Yoichi Ose, Naomasa Suzuki, Momoyo Enyama, Ryuji Nishi, Akio Takaoka
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Patent number: 9640360Abstract: Provided is a charged particle beam microscope which has a small mechanical vibration amplitude of a distal end of an emitter tip, is capable of obtaining an ultra-high resolution sample observation image and removing shaking or the like of the sample observation image. A gas field ion source includes: an emitter tip configured to generate ions; an emitter-base mount configured to support the emitter tip; a mechanism configured to heat the emitter tip; an extraction electrode installed to face the emitter tip; and a mechanism configured to supply a gas to the vicinity of the emitter tip, wherein the emitter tip heating mechanism is a mechanism of heating the emitter tip by electrically conducting a filament connecting at least two terminals, the terminals are connected by a V-shaped filament, an angle of the V shape is an obtuse angle, and the emitter tip is connected to a substantial center of the filament.Type: GrantFiled: October 10, 2012Date of Patent: May 2, 2017Assignee: Hitachi High-Technologies CorporationInventors: Hiroyasu Shichi, Shinichi Matsubara, Yoichi Ose, Yoshimi Kawanami, Noriaki Arai
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Patent number: 9530614Abstract: It is possible to determine an optimal parasitic aberration adjustment amount even when the relationship of the parasitic aberration adjustment amount with respect to the field intensity of multiple poles changes nonlinearly. To this end, in the present invention, an aberration correction amount is computed by measuring an aberration coefficient of an optical unit of a charged particle beam device, and at the same time, the present value of a power supply control value applied to an aberration corrector is measured. Then, the parasitic aberration adjustment amount for suppressing the amount of a parasitic aberration generated in the aberration corrector is computed on the basis of the aberration correction amount and the present value of the power supply control value.Type: GrantFiled: December 17, 2012Date of Patent: December 27, 2016Assignee: Hitachi High-Technologies CorporationInventors: Kotoko Urano, Tomonori Nakano, Yoichi Ose
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Publication number: 20160300690Abstract: Provided is a charged-particle-beam device capable of simultaneously cancelling out a plurality of aberrations caused by non-uniform distribution of the opening angle and energy of a charged particle beam. The charged-particle-beam device is provided with an aberration generation lens for generating an aberration due to the charged particle beam passing off-axis, and a corrective lens for causing the trajectory of the charged particle beam to converge on the main surface of an objective lens irrespective of the energy of the charged particle beam. The main surface of the corrective lens is disposed at a crossover position at which a plurality of charged particle beams having differing opening angles converge after passing through the aberration generation lens.Type: ApplicationFiled: November 5, 2014Publication date: October 13, 2016Inventors: Akira IKEGAMI, Hideto DOHI, Hideyuki KAZUMI, Yoichi OSE, Naomasa SUZUKI, Momoyo ENYAMA, Ryuji NISHI, Akio TAKAOKA