Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

Abstract: An object of the present invention is to provide a chemically strengthened glass that can effectively suppress strength of a glass from being deteriorated even though performing chemical strengthening and has high transmittance (that is, low reflectivity). The present invention relates to a chemically strengthened glass having a compressive stress layer formed on a surface layer thereof by an ion exchange method, in which the glass contains sodium and boron, and has a delta transmittance being +0.1% or more, and in which a straight line obtained by a linear approximation of a hydrogen concentration Y in a region of a depth X from an outermost surface of the glass satisfies a specific relational equation in X=0.1 to 0.4 (?m).

Abstract: The present invention relates to a film-attached glass substrate, characterized by: being provided with a glass substrate having two primary surfaces each having a compressive stress layer, and a film containing 1 at % or more of K disposed on one of the primary surfaces of the glass substrate; and the ratio of the difference in the amount of K in the compressive stress layer between the primary surfaces, the ratio being represented by formula (1), being ?0.027 to 0.027.

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (?m), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F?1500×t2) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw: Y=aX+b??(I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L); X: depth from the outermost surface of the glass (?m); a: ?0.270 to ?0.005; and b: 0.020 to 0.220.

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which a surface of the glass has polishing flaws, the glass has a texture direction index (Stdi) of 0.30 or more, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (?m), and a surface strength F (N) measured by a ball-on-ring test is (F?1400×t2) relative to a sheet thickness t (mm) of the glass: Y=aX+b??(I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L), X: depth from the outermost surface of the glass (?m), a: ?0.300 or more, and b: 0.220 or less.

Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (?m), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F?1500×t2) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw: Y=aX+b??(I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L); X: depth from the outermost surface of the glass (?m); a: ?0.270 to ?0.005; and b: 0.020 to 0.220.

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (?m), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F?1500×t2) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw: Y=aX+b??(I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L); X: depth from the outermost surface of the glass (?m); a: ?0.270 to ?0.005; and b: 0.020 to 0.220.

Abstract: A method for producing a chemically strengthened glass, including a step of bringing a glass containing sodium into contact with an inorganic salt containing potassium nitrate, thereby performing ion exchange of a Na ion in the glass with a K ion in the inorganic salt, in which the inorganic salt contains at least one salt selected from the group consisting of K2CO3, Na2CO3, KHCO3, NaHCO3, K3PO4, Na3PO4, K2SO4, Na2SO4, KOH and NaOH, and the method includes: a step of washing the glass after the ion exchange; a step of subjecting the glass to an acid treatment after the washing; and a step of subjecting the glass to an alkali treatment after the acid treatment.

Abstract: An object of the present invention is to provide a chemically strengthened glass that can effectively suppress strength of a glass from being deteriorated even though performing chemical strengthening and has high transmittance (that is, low reflectivity). The present invention relates to a chemically strengthened glass having a compressive stress layer formed on a surface layer thereof by an ion exchange method, in which the glass contains sodium and boron, and has a delta transmittance being +0.1% or more, and in which a straight line obtained by a linear approximation of a hydrogen concentration Y in a region of a depth X from an outermost surface of the glass satisfies a specific relational equation in X=0.1 to 0.4 (?m).

Abstract: The glass plate according to the present invention has a buffer layer containing a plurality of sulfate crystals on a bottom surface which is brought into contact with a molten metal during formation in accordance with a float method, and the plurality of sulfate crystals have a median value of equivalent circle diameters of 350 nm or smaller as observed from a thickness direction.

Abstract: A layered product includes a substrate including a first surface and second surface that face each other, wherein the layered product includes a metal film on the first surface of the substrate, wherein gaps are dispersed between the substrate and the metal film, the gaps optically affecting light in a visible light region, wherein, when the layered product is measured from the second surface of the substrate, an absorption ratio with respect to visible light, the absorption ratio being an average value in a range of wavelength from 400 nm to 700 nm, is greater than or equal to 50%, reflectance, the reflectance being an average value in a range of wavelength from 400 nm to 700 nm, is less than or equal to 40%, and brightness L* of a D65 light source in a visual field of 10 degrees is less than or equal to 70.

Abstract: A method for producing a chemically strengthened glass, including a step of bringing a glass containing sodium into contact with an inorganic salt containing potassium nitrate, thereby performing ion exchange of a Na ion in the glass with a K ion in the inorganic salt, in which the inorganic salt contains at least one salt selected from the group consisting of K2CO3, Na2CO3, KHCO3, NaHCO3, K3PO4, Na3PO4, K2SO4, Na2SO4, KOH and NaOH, and the method includes: a step of washing the glass after the ion exchange; a step of subjecting the glass to an acid treatment after the washing; and a step of subjecting the glass to an alkali treatment after the acid treatment.

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which the glass has a surface roughness (Ra) of 0.20 nm or higher, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (?m), a surface strength F (N) measured by a ball-on-ring test under the following conditions is (F?1500×t2) relative to a sheet thickness t (mm) of the glass, and a surface of the glass has no polishing flaw: Y=aX+b??(I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L); X: depth from the outermost surface of the glass (?m); a: ?0.270 to ?0.005; and b: 0.020 to 0.220.

Abstract: A chemically strengthened glass having a compressive stress layer formed in a surface layer thereof according to an ion exchange method, in which a surface of the glass has polishing flaws, the glass has a texture direction index (Stdi) of 0.30 or more, a hydrogen concentration Y in a region to a depth X from an outermost surface of the glass satisfies the following relational equation (I) at X=from 0.1 to 0.4 (?m), and a surface strength F (N) measured by a ball-on-ring test is (F?1400×t2) relative to a sheet thickness t (mm) of the glass: Y=aX+b??(I) in which meanings of respective symbols in the equation (I) are as follows: Y: hydrogen concentration (as H2O, mol/L), X: depth from the outermost surface of the glass (?m), a: ?0.300 or more, and b: 0.220 or less.

Abstract: A glass sheet includes 4 mol % or more of Al2O3. In the glass sheet, a surface Na2O amount in one surface of the glass sheet is lower than the surface Na2O amount in the other surface of the glass sheet by 0.2 mass % to 1.2 mass %.

Abstract: It is an object to provide a member with a sealing material layer having good sealability when low-power sealing laser light is used. A member with a sealing material layer includes a substrate having a sealing region on a surface; and a sealing material layer on the sealing region and containing sealing glass and a low-expansion filler, wherein the sealing material layer has a first region on the substrate side with respect to a center of the layer and a second region opposite the substrate with respect to the center, and has, in a cross section taken along the thickness direction of the sealing material layer, a part where a ratio A/B between a proportion “A” of an area of the low-expansion filler in the first region and a proportion “B” of an area of the low-expansion filler in the second region is less than 1.0.