Patents by Inventor Yoichiro Maruko

Yoichiro Maruko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silica glass jig for semiconductor industry and method for producing the same
    Publication number: 20040050102
    Abstract: A silica glass jig for semiconductor industry, characterized by having, on the surface of the jig, pyramidal projected structures with their cut-off apices and concave portions provided therebetween, and small projections are uniformly distributed thereon; the silica glass jig has a surface with many dimple-form concave portions each having a width of from 20 to 300 &mgr;m exist and there are grooves each having a width of from 0.5 to 50 &mgr;m at an interval of from 20 to 300 &mgr;m, and small projections each having a width of from 1 to 50 &mgr;m and having a height of from 0.1 to 10 &mgr;m are uniformly distributed between the grooves and in the grooves.
    Type: Application
    Filed: September 15, 2003
    Publication date: March 18, 2004
    Inventors: Tohru Segawa, Tatsuhiro Sato, Yoichiro Maruko, Kyoichi Inaki
  • Silica glass jig for semiconductor industry and method for producing the same
    Publication number: 20020078886
    Abstract: A silica glass jig for semiconductor industry, which is does not contaminate semiconductor elements, and generates less cracks and a production method thereof are provided.
    Type: Application
    Filed: September 25, 2001
    Publication date: June 27, 2002
    Inventors: Tohru Segawa, Tatsuhiro Sato, Yoichiro Maruko, Kyoichi Inaki