Abstract: The invention provides a pulsation damping device in which an offset load on a pulsation suppression diaphragm is eliminated while an air supply valve and an air discharge valve are separately and independently juxtaposed, and an extendable and contractible portion of the pulsation suppression diaphragm is always caused to be straightly extendingly and contractingly deformed in the axial direction of a device body casing, whereby the response property of the opening and closing operations of the air supply and discharge valves can be improved and the pulsation suppressing performance can be ensured.

Abstract: The invention provides a pump with a pulsation suppression device which can further enhance the effect of suppressing pulsation. According to the invention, in one side portion of a pump head wall 1 having inflow and outflow passages 2 and 3, a first bellows 7 which is driven so as to extend and contract by an air cylinder portion 14, and check valves 16a and 16b which alternately open and close a pump working chamber 9a formed in the first bellows 7 are disposed to constitute a reciprocal pump portion 4. In the other side portion of the pump head wall 1, a pulsation suppressing portion 5 is configured so as to have a second bellows 18 that is extendable and contractible, and that forms: a liquid chamber 20a which can temporarily store liquid that is to be discharged from the pump portion 4; and an air chamber 20b which is isolated from the liquid chamber 20a.

Abstract: The invention provides a pulsation damping device in which an offset load on a pulsation suppression diaphragm is eliminated while an air supply valve and an air discharge valve are separately and independently juxtaposed, and an extendable and contractible portion of the pulsation suppression diaphragm is always caused to be straightly extendingly and contractingly deformed in the axial direction of a device body casing, whereby the response property of the opening and closing operations of the air supply and discharge valves can be improved and the pulsation suppressing performance can be ensured. In the pulsation damping device, a valve casing 23 in which an air supply valve 36 and an air discharge valve 43 are disposed in parallel is attached into an air chamber 20b of a device body casing 17. An air supply/discharge valve control plate 28 is placed so as to abut against a center portion of a closed end face 18b of a pulsation suppression diaphragm 18.

Abstract: The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the present invention has: a bellows which partitions the interior of the device body having a sealed container-like shape, into a liquid chamber and an gas chamber; an operating rod which is reciprocated in interlock relationship with the bellows; and an extension and contraction restricting mechanism which, when the bellows extends to a predetermined value, is contacted in parallel with a closed end face of the bellows, thereby restricting further extension of the bellows. Furthermore, the pulsation suppression device of the present invention has a guide for making the reciprocal operation of the operating rod coincident with the extension and contraction directions of the bellows. The guide is made of a low-friction resin material.