Abstract: A resonator device includes a quartz crystal vibrating plate having a vibrating part and a frame part configured to surround the vibrating part in a plan view, a first sealing member bonded to one surface side of the quartz crystal vibrating plate, a second sealing member bonded to another surface side of the quartz crystal vibrating plate, and a bonding layer, wherein at least one of the first sealing member and the second sealing member is a film, and the film is bonded to the frame part via the bonding layer, and has an area where the bonding layer does not exist on a surface at the vibrating part side.

Abstract: Provided is a method including: preparing a substrate having a first surface; preparing a wavelength conversion layer that converts a light of a first wavelength band into a light of a second wavelength band different from the light of the first wavelength band; preparing a bonding material including a metal fine particle and a surface stabilizer formed at a surface of the metal fine particle and decomposed by oxygen; forming a protective film protecting the first surface while the protective film generates a gas containing hydrogen; releasing, from one of the protective film and the substrate, the gas occluded by the one of the protective film and the substrate in the forming of the protective film; and bonding the substrate and the wavelength conversion layer via the bonding material by metal sintering.

Abstract: A pressure sensor includes a package having a cavity, a pressure sensor device arranged in the cavity, and a filler that covers the pressure sensor device. The pressure sensor device has a diaphragm having a pressure receiving surface and a hollow section, and in the direction of a normal to the pressure receiving surface, between a first imaginary plane containing the lower surface of the pressure sensor device and a second imaginary plane containing the upper surface of the pressure sensor device is located a middle point of the filler in the normal direction.

Abstract: A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.

Abstract: An electronic device includes: a vibrator disposed within a cavity on a substrate and electrically driven; an enclosure wall which has electric conductivity and sections the cavity from an insulation layer surrounding the circumference of the cavity; a first wiring and a second wiring which connect with the vibrator and penetrate the enclosure wall; and a liquid flow preventing portion disposed at the position where the first wiring and the second wiring penetrate the enclosure wall to prevent flow of etchant dissolving the insulation layer from the cavity toward the insulation layer and insulate the first wiring and the second wiring from the enclosure wall.

Abstract: An electronic device according to the invention includes: a substrate; an MEMS structure formed above the substrate; and a covering structure defining a cavity in which the MEMS structure is arranged, wherein the covering structure has a first covering layer covering from above the cavity and having a through-hole in communication with the cavity and a second covering layer formed above the first covering layer and closing the through-hole, the first covering layer has a first region located above at least the MEMS structure and a second region located around the first region, the first covering layer is thinner in the first region than in the second region, and a distance between the substrate and the first covering layer in the first region is longer than a distance between the substrate and the first covering layer in the second region.

Abstract: An electronic device includes: a vibrator disposed within a cavity on a substrate and electrically driven; an enclosure wall which has electric conductivity and sections the cavity from an insulation layer surrounding the circumference of the cavity; a first wiring and a second wiring which connect with the vibrator and penetrate the enclosure wall; and a liquid flow preventing portion disposed at the position where the first wiring and the second wiring penetrate the enclosure wall to prevent flow of etchant dissolving the insulation layer from the cavity toward the insulation layer and insulate the first wiring and the second wiring from the enclosure wall.

Abstract: A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.

Abstract: An electronic device according to the invention includes: a substrate; an MEMS structure formed above the substrate; and a covering structure defining a cavity in which the MEMS structure is arranged, wherein the covering structure has a first covering layer covering from above the cavity and having a through-hole in communication with the cavity and a second covering layer formed above the first covering layer and closing the through-hole, the first covering layer has a first region located above at least the MEMS structure and a second region located around the first region, the first covering layer is thinner in the first region than in the second region, and a distance between the substrate and the first covering layer in the first region is longer than a distance between the substrate and the first covering layer in the second region.