Abstract: An antireflective film is provided between a resist layer and a silicon oxide layer formed on a surface of a silicon substrate, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93 to 1.2. Assuming that the complex refractive indexes of upper and lower layers constituting the antireflective film are N1 (=n1?k1i) and N2 (=n2?k2i), respectively, and the thicknesses of both layers are d1 and d2, when a predetermined combination of values of [n10, k10, d10, n20, k20, d20] is selected, n1, k1, d1, n2, k2, and d2 satisfy the relational expression {(n1?n10)/(n1m?n10)}2+{(k1?k10)/(k1m?k10)}2+{(d1? d10)/(d1m?d10)}2+{(n2?n20)/(n2m?n20)}2+{(k2?k20)/(k2m? k20)}2+{(d2?d20)/(d2m?d20)}2?1.

Abstract: An antireflection film wherein, even where exposure light enters obliquely in a liquid immersion lithography technique, a sufficiently reduced reflectance can be achieved at the interface between a resist layer and a silicon substrate. A two-layer antireflection film is used in exposure by an exposure system having a wavelength of 190 to 195 nm and a numerical aperture of 1.0 or less and formed between the resist layer and the silicon substrate. Where complex refractive indices N1 and N2 and film thicknesses of upper and lower layers of the antireflection film are represented by n1-k1i, n2-k2i and d1, d2, respectively, and a predetermined combination of values of [n10, k10, d10, n20, k20, d20] is selected, n1, k1, d1, n2, k2 and d2 satisfy {(n1-n10)/(n1m-n10)}2+{(k1-k10)/(k1m-k10)}2+{(d1-d10)/(d1m-d10)}2+{(n2-n20)/(n2m-n20)}2+{(k2-k20)/(k2m-k20)}2+{(d2-d20)/(d2m-d20)}2?1.

Abstract: A packet transmission device improved in packet transmission efficiency. Each packet input processor generates a pointer and identifies a packet type with respect to a received packet, and generates identification data including the pointer and the packet type identification result. A memory access controller detects a header readout amount of the packet based on the packet type identification result, generates first readout data including the header readout amount and a readout pointer indicative of a storage location of the packet in a shared memory, and adaptively reads out header data of the packet from the shared memory in accordance with the first readout data. A protocol processor analyzes the destination of the read header data, and a packet updater updates the old destination address of the packet to a new one to generate a packet with the updated destination address, and outputs the generated packet.

Abstract: There is provided a method of producing hydrogen gas serving as fuel for a portable fuel cell, whereby hydrogen gas can be provided easily, safely, and at a low cost. To that end, the method of producing hydrogen gas comprises the steps of causing friction and mechanical fracture accompanying the friction to occur to a metallic material under water and increasing thereby chemical reactivity of atoms of the metallic material, in close proximity of the surface thereof; wherein water molecules are decomposed by accelerating corrosion reaction of water with the metallic material. Further, for the metallic material, an aluminum or aluminum alloy material is used as industrial waste including refuse and cutting chips (curls) of an industrial aluminum material. Meanwhile, pure water not substantially containing ionic impurities and organic molecules is used for the water.

Abstract: To provide a mask that it becomes possible to perform destructive inspection without a mask for inspection or to perform more accurately non-destructive inspection and a method of inspecting the same. A mask comprising a thin film for exposure that has a transmission portion and a non-transmission portion of a beam for exposure, a thick film portion that is formed around the thin film for exposure and that supports the thin film for exposure, and a thin film for inspection that has a transmission portion and a non-transmission portion of the beam for exposure, that is formed at a distance from a thin film for exposure and that has thickness and material equal to those of a thin film for exposure, and a method of inspection of a mask that inspection is performed by using a thin film for inspection, and a method of producing a semiconductor device that lithography is performed by using a thin film for exposure of the mask.

Abstract: A complementary division method able to suppress a pattern deformation by wet washing, having the steps of determining a definite division length able to suppress the pattern deformation when wet washing to a width and distance of a pattern that is assumed the pattern deformation over an elasticity limit is easiest given by wet washing in advance, dividing the entire line-and-space patterns at the determined division length in the longitudinal direction to divide suitably the line-and-space pattern by a simple algorithm, and further providing a method of producing a mask and program.

Abstract: There is provided a method of producing hydrogen gas serving as fuel for a portable fuel cell, whereby hydrogen gas can be provided easily, safely, and at a low cost. To that end, the method of producing hydrogen gas comprises the steps of causing friction and mechanical fracture accompanying the friction to occur to a metallic material under water and increasing thereby chemical reactivity of atoms of the metallic material, in close proximity of the surface thereof; wherein water molecules are decomposed by accelerating corrosion reaction of water with the metallic material. Further, for the metallic material, an aluminum or aluminum alloy material is used as industrial waste including refuse and cutting chips (curls) of an industrial aluminum material. Meanwhile, pure water not substantially containing ionic impurities and organic molecules is used for the water.

Abstract: A main portion 10 of an optical module 1 includes a thermoelectric cooler 21, and a chip carrier 22b placed on the cooler 21. A semiconductor light-emitting device 31, a lens 32, photodetectors 33a, 33b, and an etalon 34 are directly or indirectly mounted on the chip carrier 22b. Supporting members 36a and 36b are also fixed on the chip carrier 22b. A roof 35 is supported by the supporting members 36a, 36b and positioned above the etalon 34. The roof 35, supporting members 36a, 36b and chip carrier 22b are maintained at substantially equal temperatures by the cooler 21. As a result, the temperature of the etalon 34 is stabilized, and therefore the variation in the lock wavelength is suppressed.

Abstract: An outputting apparatus such as a laser beam printer comprises a memory to store designation information to designate a selection-impossible font from a plurality of fonts and a selector to select a font which is most adaptive from the fonts other than the selection instructed font in accordance with an input of selection instruction information to instruct so as to select the selection-impossible font that is designated by the designation information stored in the memory. The plurality of fonts include internal fonts provided in the apparatus and fonts which are supplied from the outside.

Abstract: A main portion 10 of an optical module 1 includes a thermoelectric cooler 21, and a chip carrier 22b placed on the cooler 21. A semiconductor light-emitting device 31, a lens 32, photodetectors 33a, 33b, and an etalon 34 are directly or indirectly mounted on the chip carrier 22b. Supporting members 36a and 36b are also fixed on the chip carrier 22b. A roof 35 is supported by the supporting members 36a, 36b and positioned above the etalon 34. The roof 35, supporting members 36a, 36b and chip carrier 22b are maintained at substantially equal temperatures by the cooler 21. As a result, the temperature of the etalon 34 is stabilized, and therefore the variation in the lock wavelength is suppressed.

Abstract: An output method and apparatus of a printer are provided. A rule which dominates a describing language of reception data is judged and stored. The reception data is processed in accordance with the rule determined. The data which is received before the elapse of a predetermined time after the reception data was processed is processed in accordance with the rule decided. With respect to the data which is received after the elapse of the predetermined time, a rule which dominates such data is newly discriminated. The content of the description of the reception data is discriminated and the resolution of the printer is changed in accordance with the resolution of the image data indicated by the reception data.

Abstract: An outputting apparatus such as a laser beam printer comprises a memory to store designation information to designate a selection-impossible font from a plurality of fonts and a selector to select a font which is most adaptive from the fonts other than the selection instructed font in accordance with an input of selection instruction information to instruct so as to select the selection-impossible font that is designated by the designation information stored in the memory. The plurality of fonts include internal fonts provided in the apparatus and fonts which are supplied from the outside.

Abstract: Purine or triazolopurine compounds are disclosed represented by formula (I) or (II): ##STR1## wherein R.sup.1 and R.sup.4 represent each hydrogen, halogeno, hydroxy, mercapto, or amino; R.sup.2 represents alkyl or aryl; and R.sup.3 and R.sup.5 represent each hydrogen, alkyl, or aryl; and pharmaceutical compositions comprising these compounds as xanthine oxidase inhibitors, remedies for hyperuricemia, or remedies or preventive agents for gout.

Abstract: An output method and apparatus are provided for judging whether received data includes image data, a mixture of image data and text data, or text data alone. The output apparatus is controlled to output data in a resolution of the image data if the received data is judged to include image data or a mixture of image and text data. Also disclosed is setting a resolution of the output apparatus to a high value if the received data is judged to include text data. A storage medium for storing a program for performing these operations is also described.

Abstract: A granular composition consisting essentially of a granular carrier having a fused or slurried mixture comprising a pesticidally active ingredient, an antioxidant and/or an epoxy compound, and wax, coated thereon.

Abstract: The present invention relates to a novel enzyme called alkaline proteinase K-16 that is characterized as having an optimum pH in an alkaline range, and stability in the presence of various surface active agents, such as sodium linear alkylbenzene sulfonate, sodium polyoxyethylene alkyl sulfate, sodium dodecyl sulfate, sodium .alpha.-olefin sulfonate, sodium alkyl sulfonate, and .alpha.-sulfo-fatty acid ester. The present invention further provides for the microorganism Bacillus sp. Ferm BP-3376, which is capable of producing the novel alkaline proteinase, and a process for producing the novel alkaline proteinase. Alkaline-proteinase K-16 of the present invention exhibits an excellent action against insoluble proteins and maintains sufficient activity over a wide temperature range and in the presence of surface active agents thus providing a use as an enzyme for detergents.

Abstract: There is disclosed an organic electroluminescent device, comprising a multilayered structure of an organic film for electron injection, and an organic film for hole injection, at least one of which consists of a plurality of layers, and an organic film serving as a light-emitting layer interposed therebetween, a first electrode for electron injection formed on the side of the organic film for electron injection of the multilayered structure, and a second electrode for hole injection formed on the side of the organic film for hole injection of the multilayered structure, wherein a barrier height against electron injection at each interface between layers present from the first electrode to the organic film serving as the light-emitting layer is not more than 0.6 eV, and a barrier height against hole injection at each interface between layers present from the second electrode to the organic film serving as the light-emitting layer is not more than 0.6 eV.

Abstract: The present invention relates to a novel enzyme called alkaline proteinase K-16 that is characterized as having an optimum pH in an alkaline range, and stability in the presence of various surface active agents, such as sodium linear alkylbenzene sulfonate, sodium polyoxyethylene alkyl sulfate, sodium dodecyl sulfate, sodium .alpha.-olefin sulfonate, sodium alkyl sulfonate, and .alpha.-sulfo-fatty acid ester. The present invention further provides for a microorganism producing the novel alkaline proteinase, and a process for producing the novel alkaline proteinase. Alkaline proteinase K-16 of the present invention exhibits an excellent action against insoluble proteins and maintains sufficient activity over a wide temperature range and in the presence of surface active agents thus providing a use as an enzyme for detergents.