Patents by Inventor Yonatah Lehman

Yonatah Lehman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Raster frame beam system for electron beam lithography
    Patent number: 7098468
    Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
    Type: Grant
    Filed: September 11, 2003
    Date of Patent: August 29, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatah Lehman, Doron Meshulach, Ehud Tirosh
  • Raster frame beam system for electron beam lithography
    Publication number: 20050274911
    Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
    Type: Application
    Filed: September 11, 2003
    Publication date: December 15, 2005
    Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatah Lehman, Doron Meshulach, Ehud Tirosh