Patents by Inventor Yong Baek JEON

Yong Baek JEON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer apparatus and control method thereof
    Patent number: 10811294
    Abstract: Provided are a substrate transfer apparatus and a control method thereof. The substrate transfer apparatus includes a body having a gate through which a substrate passes; a substrate transfer robot provided inside the body and including an end effector that includes a first seating portion and a second seating portion horizontally spaced apart from each other; a sensing portion including a light emitting portion and a light receiving portion spaced apart from each other in a diagonal direction with respect to a longitudinal direction of the first and second seating portions with reference to the end effector, and detecting the position of at least one of the first seating portion and the second seating portion when the end effector moves; and a control unit for determining whether the end effector is misaligned or sagged by using a measured value measured by the sensing portion and a predetermined reference value.
    Type: Grant
    Filed: September 20, 2017
    Date of Patent: October 20, 2020
    Assignee: WONIK IPS CO., LTD.
    Inventors: Hyun Soo Jung, Yong Baek Jeon
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20190035666
    Abstract: The present invention provides a substrate processing apparatus for controlling a plasma environment on a substrate.
    Type: Application
    Filed: July 25, 2018
    Publication date: January 31, 2019
    Inventors: Sung Soon LIM, Yong Baek JEON, Doo Ho YANG, Kyu Tae CHO, Jae Hoon CHO, Ji Su KIM
  • Substrate transfer apparatus and control method thereof
    Publication number: 20180082879
    Abstract: Provided are a substrate transfer apparatus and a control method thereof. The substrate transfer apparatus includes a body having a gate through which a substrate passes; a substrate transfer robot provided inside the body and including an end effector that includes a first seating portion and a second seating portion horizontally spaced apart from each other; a sensing portion including a light emitting portion and a light receiving portion spaced apart from each other in a diagonal direction with respect to a longitudinal direction of the first and second seating portions with reference to the end effector, and detecting the position of at least one of the first seating portion and the second seating portion when the end effector moves; and a control unit for determining whether the end effector is misaligned or sagged by using a measured value measured by the sensing portion and a predetermined reference value.
    Type: Application
    Filed: September 20, 2017
    Publication date: March 22, 2018
    Inventors: Hyun Soo JUNG, Yong Baek JEON