Patents by Inventor Yong-Bum JUNG

Yong-Bum JUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
    Publication number: 20170178945
    Abstract: A substrate processing system includes an index module including wafer carriers. First and second heat processing units are disposed adjacent to the index module. Each of the first and second heat processing units includes a plurality of first heat processing plates sequentially stacked. First and second transfer robots are disposed adjacent to the first and second heat processing units, respectively. Each of the first and second transfer robots is movable along a vertical transfer path and to rotate. First and second coating units are disposed adjacent to first sides of the first and second transfer robots, respectively. Each of the first and second coating units includes a plurality of coating devices sequentially stacked. First and second bake units are disposed adjacent to second sides of the first and second transfer robots, respectively. Each of the first and second bake units includes a plurality of second heat processing plates sequentially stacked.
    Type: Application
    Filed: November 10, 2016
    Publication date: June 22, 2017
    Applicant: SEMES CO. LTD.
    Inventors: Won-Guk SEO, Yong-Won CHOI, Sang-Jin LEE, Yong-Bum JUNG, Seok HEO