Abstract: Disclosed is a blankmask for EUV lithography, including a reflective film, a capping film, an etch stop film, a phase shift film, and a hard mask film which are sequentially formed on a substrate. The phase shift film contains ruthenium (Ru), and the etch stop film contains chrome (Cr) and niobium (Nb). In the etch stop film, the content of niobium (Nb) ranges from 20 to 50 at %, and the content of chrome (Cr) ranges from 10 to 40 at %. The hard mask film contains tantalum (Ta) and oxygen (O). The content of tantalum (Ta) in the hard mask film is higher than or equal to 50 at %. With the blankmask, it is possible to implement a high resolution and NILS during wafer printing, and implement DtC.

Abstract: Disclosed is a blankmask for EUV lithography, including a reflective film, a capping film and a phase shift film which are sequentially formed on a substrate. The phase shift film includes a first layer containing niobium (Nb) and chrome (Cr), and a second layer containing tantalum (Ta) and silicon (Si). In the first layer, the content of niobium (Nb) ranges from 20 to 50 at %, and the content of chrome (Cr) content ranges from 10 to 40 at %. The blankmask can implement an excellent resolution and NILS, and implement a low DtC.

Abstract: A blankmask for EUV lithography includes a substrate, a reflective layer, a capping layer, and a phase shift layer. The phase shift layer is made of a material containing ruthenium (Ru) and chromium (Cr), and a total content of ruthenium (Ru) and chromium (Cr) is 50 to 100 at %. The phase shift layer may further contain boron (B) or nitrogen (N). The phase shift layer of the present invention has a high relative reflectance (relative reflectance with respect to a reflectance of the reflective layer under the phase shift layer) with respect to a tantalum (Ta)-based phase shift layer and has a phase shift amount of 170 to 230°. It is possible to obtain excellent resolution when finally manufacturing a pattern of 7 nm or less by using a photomask manufactured using such a blankmask.

Abstract: A computing method for privacy-preserving data analysis is provided, in which the computing method is performed by at least one processor and includes receiving a data analysis request including data-to-be-analyzed from a client, homomorphically encrypting the data-to-be-analyzed using an encryption engine, and uploading the homomorphically encrypted data-to-be-analyzed to a target path of a blockchain, and then, the method includes, based on the request to check analysis result, decrypting an analysis result of the homomorphically encrypted data stored in a designated path of the blockchain by using the encryption engine, and providing the decrypted analysis result to the client, in which the analysis result of the homomorphically encrypted data is data analyzed by a worker linked to the blockchain, and stored in a designated path in association with the target path of the blockchain.

Abstract: A blankmask for extreme ultraviolet lithography includes a substrate, a reflective layer formed on the substrate, and a phase shift layer formed on the reflective layer. The phase shift layer contains niobium (Nb), and is made of a material containing one of tantalum (Ta), chromium (Cr), and ruthenium (Ru). A phase shift layer containing Nb and Ta has a relative reflectance of 5 to 20%, a phase shift layer containing Nb and Cr has a relative reflectance of 9 to 15%, and a phase shift layer containing Nb and Ru has a relative reflectance of 20% or more. The phase shift layer has a phase shift amount of 170 to 230°, and has a surface roughness of 0.5 nmRMS or less. It is possible to obtain excellent resolution when finally manufacturing a pattern of 7 nm or less by using a photomask manufactured using such a blankmask.

Abstract: The technology of this application relates to a partial power converter that is configured to be connected to at least one photovoltaic panel as inputs and a direct current output bus, the at least one photovoltaic panel generating a direct current. The partial power converter includes a photovoltaic-side converter comprising at least two switching cells, a bus-side converter comprising at least two switching cells, the bus-side converter being configured to switch a total current of the photovoltaic-side converter, an energy storage element connected between the photovoltaic-side converter and the bus-side converter, and an indirect voltage source configured to regulate the energy storage element. The photovoltaic-side converter, the bus-side converter and the energy storage element are connected in parallel between the first node and the second node of the partial power converter.

Abstract: A cosmetic container assembly capable of simultaneously discharging multiple kinds of contents through a single pumping action is disclosed. The cosmetic container assembly includes a plurality of cosmetic containers, each of which includes a container and a pump dispenser, a press plate, which includes connection ports connected to hollow piston rods, a discharge port, a discharge channel connecting the connection ports with the discharge port, and a support shaft, a container housing including a base, a housing cap including a shaft hole and a button-supporting shaft, and a lever push button, which is coupled to the button-supporting shaft and includes a press portion configured so as to press the support shaft to move the press plate downwards to thus simultaneously press the pump dispensers when the lever push button is pressed.

Abstract: A microspeaker in which a diaphragm and a voice coil are replaced with a flexible printed circuit board (FPCB) is provided. The microspeaker includes: a magnetic circuit having a yoke and a magnet; and an FPCB diaphragm installed on the magnetic circuit and having a conductive coil pattern formed on a non-conductive film. When an electric signal is applied to the conductive coil pattern of the FPCB diaphragm, the FPCB diaphragm vibrates by mutual electromagnetic force with the magnetic circuit to generate sound.

Abstract: A computing method for privacy-preserving data analysis is provided, in which the computing method is performed by at least one processor and includes receiving a data analysis request including data-to-be-analyzed from a client, homomorphically encrypting the data-to-be-analyzed using an encryption engine, and uploading the homomorphically encrypted data-to-be-analyzed to a target path of a blockchain, and then, the method includes, based on the request to check analysis result, decrypting an analysis result of the homomorphically encrypted data stored in a designated path of the blockchain by using the encryption engine, and providing the decrypted analysis result to the client, in which the analysis result of the homomorphically encrypted data is data analyzed by a worker linked to the blockchain, and stored in a designated path in association with the target path of the blockchain.

Abstract: A display device according to some embodiments includes: a substrate; a plurality of common voltage lines positioned on the substrate; a plurality of connection electrodes positioned on a plurality of common voltage lines; an emission layer positioned on the connection electrode; and a common electrode positioned on the emission layer, wherein the emission layer has a plurality of first openings positioned on at least a portion of a plurality of connection electrodes, the common electrode is electrically connected to the connection electrode through a plurality of first openings, and a pitch of a first direction of a plurality of first openings has a range of about 0.1 mm to about 2.5 mm.

Abstract: The present disclosure provides a hand grippable inside handle. Some forms of the present disclosure may include an upper grip handle and a lower grip handle which are coupled to an inner side of a door of a vehicle, a grip type inside handle having an upper portion engaged with the upper grip handle and a lower portion engaged with the lower grip handle, and an inside handle rod installed inside the grip type inside handle and configured to pivot with the grip type inside handle about an axis in a length direction when the grip type inside handle is pivoted, thereby operating a latch device of the door.

Abstract: Embodiments in accordance with the present inventive concept disclose a chip bonding apparatus that includes a stage configured to support a substrate and a heater that is disposed above the stage. The heater includes a heat generating portion and a body portion. The chip bonding apparatus further includes a bonding tool assembly fixing unit having a first portion connected to the body portion of the heater, and a second portion configured to receive the heat generating portion. The chip bonding apparatus further includes a first bonding tool connected to the heat generating portion; and a first bonding tool fixing unit having a third portion that is connected to the first portion, and a fourth portion configured to receive the first bonding tool. The bonding tool fixing unit may be attached by an electrostatic force or by coupling between a notch gripper and a corresponding notch.

Abstract: A blankmask for extreme ultraviolet lithography includes a substrate, a reflective layer formed on the substrate, and a phase shift layer formed on the reflective layer. The phase shift layer contains niobium (Nb), and is made of a material containing one of tantalum (Ta), chromium (Cr), and ruthenium (Ru). A phase shift layer containing Nb and Ta has a relative reflectance of 5 to 20%, a phase shift layer containing Nb and Cr has a relative reflectance of 9 to 15%, and a phase shift layer containing Nb and Ru has a relative reflectance of 20% or more. The phase shift layer has a phase shift amount of 170 to 230°, and has a surface roughness of 0.5 nmRMS or less. It is possible to obtain excellent resolution when finally manufacturing a pattern of 7 nm or less by using a photomask manufactured using such a blankmask.

Abstract: A blankmask for EUV lithography includes a substrate, a reflective layer, a capping layer, and a phase shift layer. The phase shift layer is made of a material containing ruthenium (Ru) and chromium (Cr), and a total content of ruthenium (Ru) and chromium (Cr) is 50 to 100 at %. The phase shift layer may further contain boron (B) or nitrogen (N). The phase shift layer of the present invention has a high relative reflectance (relative reflectance with respect to a reflectance of the reflective layer under the phase shift layer) with respect to a tantalum (Ta)-based phase shift layer and has a phase shift amount of 170 to 230°. It is possible to obtain excellent resolution when finally manufacturing a pattern of 7 nm or less by using a photomask manufactured using such a blankmask.

Abstract: The present disclosure relates to a console tray for a vehicle capable of increasing a capacity of the tray itself by reducing a rotation radius of a cover of the console tray.

Abstract: A power child lock system for a vehicle includes a power actuator, a wheel gear which is rotated by the power actuator, a child lock link which is moved by the wheel gear, a child lock lever which is moved by the child lock link, an inside lever which is connected to an inside handle assembly through a cable, a release lever which is mechanically connected to a door latch mechanism, and an indicator lever which is rotatable by the movement of the child lock link. The indicator lever is mounted to close a mounting hole of an inner panel.

Abstract: The present invention relates to a water-soluble compound for the detection of beta-amyloid, and a production method thereof. The compound according to the present invention has excellent water-soluble properties, and thus can provide a water-soluble formulation for the detection of beta-amyloid. Accordingly, there is an effect that the compound can be useful as a composition for the detection of beta-amyloid through retinal imaging.

Abstract: A cosmetic container assembly capable of simultaneously discharging multiple kinds of contents through a single pumping action is disclosed. The cosmetic container assembly includes a plurality of cosmetic containers, each of which includes a container and a pump dispenser, a press plate, which includes connection ports connected to hollow piston rods, a discharge port, a discharge channel connecting the connection ports with the discharge port, and a support shaft, a container housing including a base, a housing cap including a shaft hole and a button-supporting shaft, and a lever push button, which is coupled to the button-supporting shaft and includes a press portion configured so as to press the support shaft to move the press plate downwards to thus simultaneously press the pump dispensers when the lever push button is pressed.

Abstract: A cosmetic container assembly capable of simultaneously discharging multiple kinds of contents through a single pumping action is disclosed. The cosmetic container assembly includes a plurality of cosmetic containers, each of which includes a container and a pump dispenser capable of pumping and extruding the contents in the container through a piston rods, a base including a button-supporting shaft, a press plate, through which the button-supporting shaft extends, the press plate including connection ports fitted over the piston rods, a discharge port, discharge channels connecting the connection ports with the discharge port, and a support shaft, and a lever push button, which presses the support shaft and the press plate and thus simultaneously presses the pump dispensers to perform a pumping action when the lever push button is pressed.

Abstract: A leaf spring assembly for an automobile storage compartment has a hook, a leaf spring, and a spring guide. The hook is coupled to an operating plate. One end portion of the leaf spring is fixedly coupled to the hook. The spring guide is fixedly coupled to a non-operating housing in the state where the other side portion of the leaf spring is coupled to the spring guide so as to elastically deform while being drawn in and out.