Abstract: A method of fabricating a semiconductor device is provided. The method includes: loading a substrate into a substrate processing apparatus; and processing the substrate, using the substrate processing apparatus. The processing the substrate includes: providing a process gas; generating a process etchant from the process gas, using plasma ignition, the process etchant including a first etchant and a second etchant; processing the substrate, using the process etchant; identifying a composition rate of the process etchant; and controlling the processing of the substrate based on a process result according to the composition rate of the process etchant.

Abstract: The present disclosure relates to an organic electroluminescent device. The organic electroluminescent device according to the present disclosure includes a deuterated organic electroluminescent material, so it can exhibit a low driving voltage and high luminous efficiency.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefore. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: A system to and method of monitoring a condition of a process tool. The system monitors a condition of a process tool to correctly detect a faulty operation or malfunction of the process tool. The system to monitor the condition of the process tool includes a first model storage unit to store one or more good models generated by data associated with the process tool, a second model storage unit to store one or more faulty models generated by the data associated with the process tool, a model selector to receive tool data from the process tool, and to select one of the good models and one of the faulty models in association with the received tool data, and an error detector to receive process data from the process tool, to compare the received process data with the good and faulty models selected by the model selector, and to estimate a condition of the process tool.

Abstract: A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An error signal detection method includes detecting light incident through an objective lens after having been reflected and diffracted from a recording medium, as eight light portions in a matrix including four inner light portions and four outer light portions, wherein the rows and columns of the matrix are parallel to the tangential and radial direction of the recording medium, respectively; calculating a first sum signal by summing a detection signal from at least one outer light portion located in a first diagonal direction, and a detection signal from an inner light portion located in a second diagonal direction; calculating second sum signal by summing a detection signal from an inner light portion located in the first diagonal direction, and a detection signal from an outer light portion located in the second diagonal direction; and comparing phases of the first and second sum signals to detect a tilt error signal.

Abstract: An optical recording medium having a read-only storage area and a writable storage area and a recording/reproducing apparatus and method therefor. The optical recording medium is a hybrid disc having both the read-only storage area, which is suitable for mass production of information having the same contents, and the writable storage area on which data can be recorded, updated or added at a user's option.

Abstract: An apparatus to generate a seek direction detecting signal for an optical pickup to determine a position of a center of an optical spot focused on an optical disk relative to a center of a track, which focuses a main beam on a first optical detector and a sub-beam having a predetermined aberration in a radial direction on a second optical detector using a light dividing unit. The second optical detector has an inner and an outer pair of light receiving portions arranged along the radial direction, the inner pair being between the outer pair. A signal processing portion includes a first signal processing portion to detect a track error signal from signals output from the first optical detector, and a second signal processing portion to generate the seek direction detecting signal from signals detected by the second optical detector and the track error signal.

Abstract: An error signal detection apparatus for an optical recording/reproducing system including a light source emitting a light beam and an objective lens focusing the light beam to form a light spot on a recording medium, the apparatus including: a photodetecting unit dividing at least a part of the light beam passed through the objective lens after being reflected/diffracted from an information stream of the recording medium into light beam portions, and detecting the light beam portions; and a signal processor detecting phase differences between detection signals from the light beam portions to detect a tangential error signal, a defocus error signal, and/or a radial tilt error signal.

Abstract: A method of compensating sensor data used in an interlock system comprises setting a predetermined drift upper limit and a predetermined drift lower limit, creating a reference pattern information about a reference model, creating a sensor pattern information about the sensor data, determining whether the sensor pattern information satisfies the drift upper limit and the drift lower limit, calculating a drift offset according to the reference pattern information and the sensor pattern information when the sensor pattern information satisfies the drift upper limit and the drift lower limit, and compensating the sensor data according to the calculated drift offset.

Abstract: An apparatus for and a method of detecting a defocus error signal. First, second and third light receiving regions of a photodetector are arranged in a radial direction of a recording medium to independently perform photoelectric conversion with respect to incident light which is reflected/diffracted by the recording medium. A subtractor subtracts a sum signal of detection signals from the first and third light receiving regions and a detection signal of the second light receiving region to output a defocus error signal, to detect defocus and/or a change in thickness of the recording medium. The defocus error signal and a push-pull tracking error signal are compared in a state in which a predetermined amount of defocus is applied to a light spot to detect a seek direction of the recording medium having a land/groove structure.

Abstract: An apparatus generating a seek direction detecting signal includes a light dividing unit dividing an incident light beam into at least two beams having a main beam and a sub-beam so that at least two beam spots including a main beam spot and at least one sub-beam spot having an optical aberration, can be focused in the track direction of an optical disk, the light dividing unit providing that the direction of the optical aberration of the sub-beam spot can be the tangential direction of the optical disk, an optical detector unit, a first signal processing portion processing a track error signal from signals output from the optical detector, a second signal processing portion processing a track cross signal from the signals output from the optical detector, and a generator generating the seek direction detecting signal from the phase difference between the track cross signal and the track error signal.