Patents by Inventor Yong-En Syu

Yong-En Syu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11158534
    Abstract: The present disclosure, in some embodiments, relates to a silicon on insulator (SOI) substrate. The SOI substrate includes a dielectric layer disposed over a first substrate. The dielectric layer has an outside edge aligned with an outside edge of the first substrate. An active layer covers a first annular portion of an upper surface of the dielectric layer. The upper surface of the dielectric layer has a second annular portion that surrounds the first annular portion and extends to the outside edge of the dielectric layer. The second annular portion is uncovered by the active layer.
    Type: Grant
    Filed: May 7, 2019
    Date of Patent: October 26, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Ming-Che Yang, Wei-Kung Tsai, Yong-En Syu, Yeur-Luen Tu, Chris Chen
  • Patent number: 11063117
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a supporting substrate. The semiconductor device structure also includes a first carrier-trapping layer covering the supporting substrate. The first carrier-trapping layer is doped with a group-IV dopant. The semiconductor device structure further includes an insulating layer covering the first carrier-trapping layer. In addition, the semiconductor device structure includes a semiconductor substrate over the insulating layer. The semiconductor device structure also includes a transistor. The transistor includes a gate stack over the semiconductor substrate and source and drain structures in the semiconductor substrate.
    Type: Grant
    Filed: April 20, 2017
    Date of Patent: July 13, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Hung Cheng, Yong-En Syu, Kuo-Hwa Tzeng, Ke-Dian Wu, Cheng-Ta Wu, Yeur-Luen Tu, Ming-Che Yang, Wei-Kung Tsai
  • Publication number: 20190259655
    Abstract: The present disclosure, in some embodiments, relates to a silicon on insulator (SOI) substrate. The SOI substrate includes a dielectric layer disposed over a first substrate. The dielectric layer has an outside edge aligned with an outside edge of the first substrate. An active layer covers a first annular portion of an upper surface of the dielectric layer. The upper surface of the dielectric layer has a second annular portion that surrounds the first annular portion and extends to the outside edge of the dielectric layer. The second annular portion is uncovered by the active layer.
    Type: Application
    Filed: May 7, 2019
    Publication date: August 22, 2019
    Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Ming-Che Yang, Wei-Kung Tsai, Yong-En Syu, Yeur-Luen Tu, Chris Chen
  • Patent number: 10304723
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an SOI substrate. The method may be performed by epitaxially forming a silicon-germanium (SiGe) layer over a sacrificial substrate and epitaxially forming a first active layer on the SiGe layer. The first active layer has a composition different than the SiGe layer. The sacrificial substrate and is flipped and the first active layer is bonded to an upper surface of a dielectric layer formed over a first substrate. The sacrificial substrate and the SiGe layer are removed and the first active layer is etched to define outermost sidewalls and to expose an outside edge of an upper surface of the dielectric layer. A contiguous active layer is formed by epitaxially forming a second active layer on the first active layer. The first active layer and the second active layer have a substantially same composition.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: May 28, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Ming-Che Yang, Wei-Kung Tsai, Yong-En Syu, Yeur-Luen Tu, Chris Chen
  • Publication number: 20190157138
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an SOI substrate. The method may be performed by epitaxially forming a silicon-germanium (SiGe) layer over a sacrificial substrate and epitaxially forming a first active layer on the SiGe layer. The first active layer has a composition different than the SiGe layer. The sacrificial substrate and is flipped and the first active layer is bonded to an upper surface of a dielectric layer formed over a first substrate. The sacrificial substrate and the SiGe layer are removed and the first active layer is etched to define outermost sidewalls and to expose an outside edge of an upper surface of the dielectric layer. A contiguous active layer is formed by epitaxially forming a second active layer on the first active layer. The first active layer and the second active layer have a substantially same composition.
    Type: Application
    Filed: February 26, 2018
    Publication date: May 23, 2019
    Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Ming-Che Yang, Wei-Kung Tsai, Yong-En Syu, Yeur-Luen Tu, Chris Chen
  • Patent number: 10283702
    Abstract: Methods for a resistive random access memory (RRAM) device are disclosed. A bottom electrode is formed over a substrate. A top electrode is formed over the bottom electrode. A resistive switching layer is formed interposed between the top electrode and the bottom electrode. The resistive switching is made of a composite of a metal, Si, and O, formed by oxidation of a metal silicide of a metal, co-deposition of the metal and silicon in oxygen ambiance, co-deposition of a metal oxide of the metal and silicon, or co-deposition of a metal oxide of the metal and silicon oxide. There may be an additional tunnel barrier layer between the top electrode and the bottom electrode. The top electrode and the bottom electrode may comprise multiple sub-layers.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: May 7, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ting-Chang Chang, Yong-En Syu, Fu-Yen Jian, Shih-Chieh Chang, Ying-Lang Wang
  • Publication number: 20180308928
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a supporting substrate. The semiconductor device structure also includes a first carrier-trapping layer covering the supporting substrate. The first carrier-trapping layer is doped with a group-IV dopant. The semiconductor device structure further includes an insulating layer covering the first carrier-trapping layer. In addition, the semiconductor device structure includes a semiconductor substrate over the insulating layer. The semiconductor device structure also includes a transistor. The transistor includes a gate stack over the semiconductor substrate and source and drain structures in the semiconductor substrate.
    Type: Application
    Filed: April 20, 2017
    Publication date: October 25, 2018
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Hung CHENG, Yong-En SYU, Kuo-Hwa TZENG, Ke-Dian WU, Cheng-Ta WU, Yeur-Luen TU, Ming-Che YANG, Wei-Kung TSAI
  • Publication number: 20180108836
    Abstract: Methods for a resistive random access memory (RRAM) device are disclosed. A bottom electrode is formed over a substrate. A top electrode is formed over the bottom electrode. A resistive switching layer is formed interposed between the top electrode and the bottom electrode. The resistive switching is made of a composite of a metal, Si, and O, formed by oxidation of a metal silicide of a metal, co-deposition of the metal and silicon in oxygen ambiance, co-deposition of a metal oxide of the metal and silicon, or co-deposition of a metal oxide of the metal and silicon oxide. There may be an additional tunnel barrier layer between the top electrode and the bottom electrode. The top electrode and the bottom electrode may comprise multiple sub-layers.
    Type: Application
    Filed: December 18, 2017
    Publication date: April 19, 2018
    Inventors: Ting-Chang Chang, Yong-En Syu, Fu-Yen Jian, Shih-Chieh Chang, Ying-Lang Wang
  • Patent number: 9847478
    Abstract: Methods and apparatuses for a resistive random access memory (RRAM) device are disclosed. The RRAM device comprises a bottom electrode, a resistive switching layer disposed on the bottom electrode, and a top electrode disposed on the resistive switching layer. The resistive switching layer is made of a composite of a metal, Si, and O. There may be an additional tunnel barrier layer between the top electrode and the bottom electrode. The top electrode and the bottom electrode may comprise multiple sub-layers.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: December 19, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ting-Chang Chang, Yong-En Syu, Fu-Yen Jian, Shih-Chieh Chang, Ying-Lang Wang
  • Patent number: 9711521
    Abstract: The present disclosure relates to a semiconductor substrate including, a first silicon layer comprising an upper surface with protrusions extending vertically with respect to the upper surface. An isolation layer is arranged over the upper surface meeting the first silicon layer at an interface, and a second silicon layer is arranged over the isolation layer. A method of manufacturing the semiconductor substrate is also provided.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: July 18, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yong-En Syu, Kuan-Chi Tsai, Kuo-Yu Cheng, Keng-Yu Chen, Shih-Shiung Chen, Shao-Yu Chen, Wei-Kung Tsai, Yu-Lung Yeh
  • Publication number: 20170062452
    Abstract: The present disclosure relates to a semiconductor substrate including, a first silicon layer comprising an upper surface with protrusions extending vertically with respect to the upper surface. An isolation layer is arranged over the upper surface meeting the first silicon layer at an interface, and a second silicon layer is arranged over the isolation layer. A method of manufacturing the semiconductor substrate is also provided.
    Type: Application
    Filed: August 31, 2015
    Publication date: March 2, 2017
    Inventors: Yong-En Syu, Kuan-Chi Tsai, Kuo-Yu Cheng, Keng-Yu Chen, Shih-Shiung Chen, Shao-Yu Chen, Wei-Kung Tsai, Yu-Lung Yeh
  • Patent number: 9269591
    Abstract: The present disclosure relates to a silicon-on-insulator (SOI) substrate having a trap-rich layer, with crystal defects, which is disposed within a handle wafer, and an associated method of formation. In some embodiments, the SOI substrate has a handle wafer. A trap-rich layer, having a plurality of crystal defects that act to trap carriers, is disposed within the handle wafer at a position abutting a top surface of the handle wafer. An insulating layer is disposed onto the handle wafer. The insulating layer has a first side abutting the top surface of the handle wafer and an opposing second side abutting a thin layer of active silicon. By forming the trap-rich layer within the handle wafer, fabrication costs associated with depositing a trap-rich material (e.g., polysilicon) onto a handle wafer are reduced and thermal instability issues are prevented.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: February 23, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Alex Kalnitsky, Chung-Long Chang, Yung-Chih Tsai, Tsung-Yu Yang, Keng-Yu Chen, Yong-En Syu
  • Patent number: 9159916
    Abstract: A resistive random access memory (RRAM), a controlling method for the RRAM, and a manufacturing method therefor are provided. The RRAM includes a first electrode layer; a resistance switching layer disposed on the first electrode layer; a diffusion metal layer disposed on the resistance switching layer; and a second electrode layer disposed on the diffusion metal layer, wherein at least one extension electrode is disposed in the resistance switching layer.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: October 13, 2015
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Ting-Chang Chang, Min-Chen Chen, Yong-En Syu, Kuan-Chang Chang, Fu-Yen Jian
  • Publication number: 20150270143
    Abstract: The present disclosure relates to a silicon-on-insulator (SOI) substrate having a trap-rich layer, with crystal defects, which is disposed within a handle wafer, and an associated method of formation. In some embodiments, the SOI substrate has a handle wafer. A trap-rich layer, having a plurality of crystal defects that act to trap carriers, is disposed within the handle wafer at a position abutting a top surface of the handle wafer. An insulating layer is disposed onto the handle wafer. The insulating layer has a first side abutting the top surface of the handle wafer and an opposing second side abutting a thin layer of active silicon. By forming the trap-rich layer within the handle wafer, fabrication costs associated with depositing a trap-rich material (e.g., polysilicon) onto a handle wafer are reduced and thermal instability issues are prevented.
    Type: Application
    Filed: March 24, 2014
    Publication date: September 24, 2015
    Inventors: Alex Kalnitsky, Chung-Long Chang, Yung-Chih Tsai, Tsung-Yu Yang, Keng-Yu Chen, Yong-En Syu
  • Publication number: 20140063903
    Abstract: A resistive random access memory (RRAM), a controlling method for the RRAM, and a manufacturing method therefor are provided. The RRAM includes a first electrode layer; a resistance switching layer disposed on the first electrode layer; a diffusion metal layer disposed on the resistance switching layer; and a second electrode layer disposed on the diffusion metal layer, wherein at least one extension electrode is disposed in the resistance switching layer.
    Type: Application
    Filed: November 30, 2012
    Publication date: March 6, 2014
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Ting-Chang CHANG, Min-Chen CHEN, Yong-En SYU, Kuan-Chang CHANG, Fu-Yen JIAN
  • Publication number: 20130234094
    Abstract: Methods and apparatuses for a resistive random access memory (RRAM) device are disclosed. The RRAM device comprises a bottom electrode, a resistive switching layer disposed on the bottom electrode, and a top electrode disposed on the resistive switching layer. The resistive switching layer is made of a composite of a metal, Si, and O. There may be an additional tunnel barrier layer between the top electrode and the bottom electrode. The top electrode and the bottom electrode may comprise multiple sub-layers.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 12, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ting-Chang Chang, Yong-En Syu, Fu-Yen Jian, Shih-Chieh Chang, Ying-Lang Wang
  • Patent number: 8427879
    Abstract: There is a method for enabling a SONOS transistor to be used as both a switch and a memory. FN tunneling is carried out through the source or drain of the transistor, so as to further change the state of electrons stored in an upper charge storage layer adjacent to the drain or source, and the variation in gate-induced drain leakage is used to recognize the memory state of the drain and source. A stable threshold voltage of the transistor is always maintained during this operation. The present invention enables one single transistor having dual features of switch and memory, while being provided with a two-bit memory effect, thus providing a higher memory density in comparison with a general transistor.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: April 23, 2013
    Assignee: Acer Incorporated
    Inventors: Ting-Chang Chang, Shih-Ching Chen, Te-Chih Chen, Fu-Yen Jian, Yong-En Syu
  • Publication number: 20130009124
    Abstract: A type of resistance random access memory structure having the function of diode rectification includes a first electrode, a second electrode and a resistance conversion layer. The resistance conversion layer is disposed between the first electrode and the second electrode; and it includes a first oxidized insulating layer which is adjacently connected to the first electrode; a second oxidized insulating layer which is adjacently connected to the second electrode; as well as an energy barrier turning layer disposing between the first oxidized insulating layer and the second oxidized insulating layer. An energy barrier high can be adjusted and controlled to change the resistance by voltage between the energy barrier turning layer and the first oxidized insulating layer. A fixed energy barrier is formed between the second oxidized insulating layer and the energy barrier turning layer, so that the resistance random access memory element features the function of diode rectification.
    Type: Application
    Filed: September 20, 2011
    Publication date: January 10, 2013
    Inventors: Ting-Chang CHANG, Yong-En SYU, Fu-Yen JIAN, Ming-Jinn TSAI
  • Publication number: 20110096610
    Abstract: There is a method for enabling a SONOS transistor to be used as both a switch and a memory. FN tunneling is carried out through the source or drain of the transistor, so as to further change the state of electrons stored in an upper charge storage layer adjacent to the drain or source, and the variation in gate-induced drain leakage is used to recognize the memory state of the drain and source. A stable threshold voltage of the transistor is always maintained during this operation. The present invention enables one single transistor having dual features of switch and memory, while being provided with a two-bit memory effect, thus providing a higher memory density in comparison with a general transistor.
    Type: Application
    Filed: December 22, 2009
    Publication date: April 28, 2011
    Applicant: ACER INCORPORATED
    Inventors: Ting-Chang Chang, Shih-Ching Chen, Te-Chih Chen, Fu-Yen Jian, Yong-En Syu