Abstract: An energy efficient membrane based desalination process, which utilizes an osmotically driven energy recovery sub-process. Energy recovery sub-process involves the extraction of water from low salinity first aqueous solution by using a high salinity content, pressurized second aqueous solution to draw the water from first aqueous solution across a semi-permeable membrane. High salinity content, pressurized second solution can be used to generate osmotic pressure on the low salinity content first solution to drive water from first solution to the second solution with respect to chemical potential differences. The process also harvests the Gibbs free energy of mixing in terms of pressure conservation in the second solution, while the volume of second solution is increasing by the drawn water from the first solution.

Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber in which a processing space is defined, a substrate support disposed in the chamber and supporting a substrate; and an upper electrode to which a radio frequency (RF) power is applied, the upper electrode facing the substrate support. The substrate support includes a plurality of ground electrodes spaced apart from each other and independently controlled so that plasma is uniformly generated to an edge area of the substrate support between the upper electrode and the substrate support. The substrate processing apparatus may uniformly control plasma distribution or density on a substrate and a periphery of the substrate and may uniformly control plasma distribution or density in the central area of the substrate and the edge area of the substrate.

Abstract: An energy efficient membrane based desalination process, which utilizes an osmotically driven energy recovery sub-process. Energy recovery sub-process involves the extraction of water from low salinity first aqueous solution by using a high salinity content, pressurized second aqueous solution to draw the water from first aqueous solution across a semi-permeable membrane. High salinity content, pressurized second solution can be used to generate osmotic pressure on the low salinity content first solution to drive water from first solution to the second solution with respect to chemical potential differences. The process also harvests the Gibbs free energy of mixing in terms of pressure conservation in the second solution, while the volume of second solution is increasing by the drawn water from the first solution.