Abstract: The present invention relates to a method for manufacturing an electrostatic chuck, and more specifically, to a method for manufacturing an electrostatic chuck with minimized temperature deviation. The method of the present invention includes: a step S10 of forming a metal layer by depositing metal on a lower portion of a base containing a ceramic material and provided with an ESC electrode at an upper portion thereof; and a step S20 of forming a heater electrode by forming a pattern on the metal layer using a photolithography process.

Abstract: A substrate processing apparatus is provided and includes: a support unit including a spin chuck and a centering jig that is on the spin chuck, the spin chuck configured to support and rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a swing arm including a correction unit that includes a sensor and an emitter, the swing arm configured to move such that the correction unit moves to a target point on the substrate, and the emitter configured to irradiate a beam towards the substrate; and a controller configured to: control the spin chuck and the swing arm; and determine whether a movement trajectory of the swing arm is aligned with a rotation center of the spin chuck based on information acquired by the sensor about the centering jig.

Abstract: A thermoplastic resin composition includes 100 parts by weight of a base resin including 3 to 22% by weight of an alkyl acrylate-aromatic vinyl compound-vinyl cyanide compound graft copolymer (A-1) containing alkyl acrylate rubber having an average particle diameter of 50 to 200 nm, 20 to 40% by weight of an alkyl acrylate-aromatic vinyl compound-vinyl cyanide compound graft copolymer (A-2) containing alkyl acrylate rubber having an average particle diameter of greater than 200 nm and 600 nm or less, and 50 to 72% by weight of an aromatic vinyl compound-vinyl cyanide compound copolymer (B); and 0.6 to 1.9 parts by weight of a lubricant (C), wherein, based on 100% by weight in total of the thermoplastic resin composition, a total content of rubber as measured by FT-IR is 15 to 21% by weight.

Abstract: A digitizer includes a first sensing coil disposed in an active region, a first dummy line disposed in the same layer as the first sensing coil, a second sensing coil disposed below the first sensing coil in the active region, a second dummy line disposed in the same layer as the second sensing coil, a bridge line disposed below the second sensing coil, and a third dummy line disposed in the same layer as the bridge line. At least two dummy lines among the first, second, and third dummy lines extend in the same direction.

Abstract: A patch based depth mapping method and apparatus for high-efficiency encoding/decoding of a plenoptic video is proposed. The method may be performed in an electronic apparatus to classify a reference image and an additional image from a plenoptic video during encoding the plenoptic video and then generate an atlas including a patch using the additional image. The method may include mapping a depth value by applying minimum-maximum linear scaling in units of an input viewpoint image. The method may also include finding a minimum value and a maximum value of the depth value per the patch and remapping the depth value through minimum-maximum linear scaling.

Abstract: According to an embodiment, an aerosol generating device includes a display including a display panel and a touch panel configured to receive a touch input, a battery, and a processor electrically connected to the display and the battery, wherein the processor is configured to detect that a power state of the aerosol generating device is changed to a first state and change the power state of the aerosol generating device to a second state, based on whether a touch input through the touch panel of the display is received within a threshold time after the power state is changed to the first state, the second state being distinguished from the first state. Various embodiments may be made.

Abstract: Disclosed are a three-dimensional (3D) simulation method and a 3D simulation apparatus. The 3D simulation method disclosed herein includes a step (S20) of separating point cloud data including a road, an obstacle, and a cargo transportation route into road data and obstacle data, a step (S40) of converting the road data into road mesh data, and converting the obstacle data into obstacle mesh data, a step (S60) of constructing a virtual environment by merging the road mesh data with the obstacle mesh data, a step (S80) of loading a specific cargo transportation route to the virtual environment, a step (S100) of loading a 3D transport truck and a 3D cargo to a predetermined point of the cargo transportation route, and a step (S120) of performing a route survey simulation while virtually driving the 3D transport truck and the 3D cargo along the cargo transportation route.

Abstract: A dual-helmet magnetoencephalography measuring apparatus according to an example embodiment includes: an internal container storing a liquid refrigerant; an external container disposed to surround the internal container and including a first external helmet and a second external helmet disposed to be spaced apart from each other; a first sensor-mounted helmet disposed between the external container and the internal container to surround the first external helmet; a second sensor-mounted helmet disposed between the external container and the internal container to surround the second external helmet; a plurality of first SQUID sensor modules disposed on the first sensor-mounted helmet; and a plurality of second SQUID sensor modules disposed on the second sensor-mounted helmet. The internal container and the external container are tilted in a vertical direction.

Abstract: A dual-helmet magnetoencephalography measuring apparatus includes: an internal container storing a liquid refrigerant; an external container disposed to surround the internal container and including a first external helmet and a second external helmet disposed to be spaced apart from each other; a first sensor-mounted helmet disposed to surround the first external helmet between the external container and the internal container; a second sensor-mounted helmet disposed to surround the second external helmet between the externa container and the internal container; a plurality of first SQUID sensor module disposed on the first sensor-mounted helmet; and a plurality of second SQUID sensor module disposed on the second sensor-mounted helmet.

Abstract: Provided are a pixel circuit and a display device having the pixel circuit. The pixel circuit includes an organic light emitting diode, a switching transistor, a storage capacitor, and a driving transistor. The switching transistor is turned off when a scan signal has a first voltage and turned on when the scan signal has a second voltage. The storage capacitor stores a data voltage when the switching transistor is turned on in response to the scan signal. The driving transistor is electrically connected with the organic light emitting diode between a high power supply voltage and a low power supply voltage to provide a driving current to the organic light emitting diode, and includes a first bottom gate electrode that is provided with the first voltage. The driving current corresponds to the data voltage stored in the storage capacitor.

Abstract: Provided is a control device and a substrate processing apparatus including the same. The substrate processing apparatus includes a support unit configured to support and rotate a first substrate, the support unit including a spin chuck, a spray unit configured to spray a processing fluid on the first substrate, a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate, and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.

Abstract: The present disclosure relates to a stator core applied to an electric motor, and more particularly, to a stator core design having improved cooling performance. In the segmented stator core of the present disclosure, since the coil inside the slot having a temperature higher than that of the end coil is cooled, the risk of damaging the insulating portion may be reduced, and since both the end coil and the coil inside the slot may be cooled, a load is small even if a high current is applied, and thus, the power may be increased in the same motor size or the motor size based on the same power may be reduced.

Abstract: A cathode active material for a lithium secondary battery includes a lithium-transition metal oxide including nickel (Ni), cobalt (Co), manganese (Mn), strontium (Sr) and sulfur (S). A mole fraction of nickel based on the total number of moles of nickel, cobalt and manganese in the lithium-transition metal oxide is 0.9 or more. A molar ratio of cobalt relative to manganese in the lithium-transition metal oxide is in a range from 0.9 to 1.5. A molar ratio of strontium (Sr) relative to sulfur (S) in the lithium-transition metal oxide is greater than 0, and 4 or less.

Abstract: A display device that includes a substrate; a circuit layer; and an element layer. The substrate may include a display area in which emission areas may be arranged, and a non-display area. In order to deliver data signals to data lines at side edges of the display area, bypass auxiliary lines are used that pass through central portions of the display area to allow for a reduced width of the sub area. A horizontal portion of these bypass auxiliary lines may pass over or under other data lines to reach the edge portion of the display. Therefore, a shielding auxiliary electrode may be disposed between the passed over data lines and the horizontal bypass auxiliary lines at locations where these other data lines overlap in a plan view the horizontal bypass auxiliary lines to reduce crosstalk between the horizontal bypass auxiliary lines and the data lines.

Abstract: An instant rice container separation apparatus and an instant rice manufacturing system comprising same are disclosed. The instant rice container separation apparatus according to one embodiment of the present invention comprises: a container-supplying master which is provided at one side of an apparatus body and which allows a plurality of instant rice containers to be stacked in the height direction while overlapping and to be arranged in the lateral direction; an integrated container separation plate which is disposed in a region below the container-supplying master, and which separates the lowermost containers, arranged in the lateral direction, all at once from the containers stacked thereon; and a separation plate forward-backward driving part which is connected to the integrated container separation plate and which drives the integrated container separation plate forward and backward.

Abstract: The embodiments relate to a heat-shrinkable film and a process for preparing the same. The heat-shrinkable film comprises a mixed resin, wherein the mixed resin comprises a copolymerized polyester-based resin in which a diol and a dicarboxylic acid are copolymerized; and a polybutylene terephthalate-based resin, and, when a specimen of the heat-shrinkable film having a width of 15 mm, a length of 110 mm, and a thickness of 45 ?m is immersed in hot water at 70° C. for 60 seconds to measure shrinkage stress, the development time of the initial shrinkage stress is 20 seconds or shorter. The heat-shrinkable film according to the embodiment comprises a mixed resin having a specific composition, wherein the development time of the initial shrinkage stress is controlled.

Abstract: A semiconductor includes an active pattern with a lower pattern and sheet patterns spaced apart from the lower pattern in a first direction, a source/drain pattern on the lower pattern, the source/drain pattern being in contact with the sheet patterns, and gate structures on opposite sides of the source/drain pattern, the gate structures being spaced apart from each other along a second direction and including gate electrodes that surround the sheet patterns, wherein the source/drain pattern includes a first epitaxial region having at least one of antimony and bismuth, the first epitaxial region having a bottom part in contact with the lower pattern, but not with the sheet patterns, and a thickness of the bottom part increasing and decreasing away from the gate structures in the second direction, and a second epitaxial region on the first epitaxial region, the second epitaxial region including phosphorus.

Abstract: An article storage device includes a load port configured to load and unload a plurality of articles, a plurality of shelves configured to load the articles, a transportation robot configured to transport the articles between the load port and the shelves or between the shelves, a receiving part configured to receive operation commands of the transportation robot from an upper system, a calculating part configured to calculate a setting value of an order of priority with respect to the operation commands, and a control part configured to control the transportation robot to perform an operation command having a high setting value of an order of priority among the operation commands.

Abstract: An automatically operatable electric wing-out headrest includes a motor having a lead screw configured to adjust forward-and-rearward rotation of wing-out pads respectively mounted on the opposite sides of a headrest body, a first slider coupled to the lead screw so as to be movable upwards and downwards, a second slider configured to contact the first slider so as to be movable forwards and rearwards, and a wing-out link connected to the second slider to rotate a wing-out frame.

Abstract: A control device and a substrate processing apparatus including the same are provided. The substrate processing apparatus includes: a support unit including a spin head and configured to support and to rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a correction unit in a swing arm, the correction unit configured to move to a target point on the substrate and to irradiate a beam when the processing liquid is sprayed onto the substrate; and a control unit configured to calculate the target point, wherein the control unit is configured to convert image coordinates associated with a first coordinate system and then to calculate the target point by converting the image coordinates associated with the first coordinate system into image coordinates associated with a second coordinate system, and the second coordinate system is based on rotation angles of the spin head and the swing arm.