Abstract: A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.

Abstract: A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.

Abstract: A wafer clamping apparatus, including a plurality of support pins under a wafer, the plurality of pins to support the wafer; and a side clamp at a lateral side of the wafer, the side clamp to directly contact a lateral side of the wafer to press the wafer, the side clamp to press the wafer in a first direction or a second direction, the first direction and the second direction being different directions.

Abstract: A wafer clamping apparatus, including a plurality of support pins under a wafer, the plurality of pins to support the wafer; and a side clamp at a lateral side of the wafer, the side clamp to directly contact a lateral side of the wafer to press the wafer, the side clamp to press the wafer in a first direction or a second direction, the first direction and the second direction being different directions.

Abstract: An IBS (Intelligent Battery Sensor) apparatus having a clamp and cable connection part integrated therein may include: a clamp member comprising a clamp body to which a terminal of a battery is inserted; a coupling member to which a cable is coupled; a connection member having both ends to which the clamp member and the coupling member are coupled; and a sensor member coupled to the connection member and measuring a voltage value applied to the connection member. The clamp body, the coupling member, and the connection member may be integrated.

Abstract: A secondary cell module using direct hydrocooling may include: a secondary cell; and a housing containing the secondary cell and filled with a refrigerant. The secondary cell may be directly contacted with the refrigerant.

Abstract: There is provided a slide hinge device for guiding a slide of a slide part on a main part. The slide hinge device includes: a slide hinge unit installed in the rear of the slide part, for guiding a slide of the slide part; a fixed hinge unit installed in the front of the main part; and a lift hinge unit rotatably installed to the fixed hinge unit and engaged with the slide hinge unit to guide a slide of the slide hinge unit. In the case the slide part is opened, the lift hinge unit rotates to the fixed hinge unit and raises the slide part to be slanted towards the main part, thereby enabling a microphone and a receiver of a personal portable device to be close to the mouth and an ear of a user, respectively.

Abstract: The present invention provides a slide type mobile communication terminal, which has a main body and a cover assembled with an upper surface of the main body, so that the cover longitudinally slides on the main body. The terminal applies an opening force to the cover when the cover slides on the main body to at least a predetermined opened position, thus completely opening the cover and applies a closing force to the cover when the cover slides on the main body to at least a predetermined closed position, thus completely closing the cover. Therefore, the terminal prevents an incorrect operation from being caused by an undesired movement of the cover during the cover opening or closing process. Furthermore, even when the cover is not opened or closed by a user to a completely opened or closed position, the cover is automatically opened or closed to the desired position.