Abstract: The apparatus includes a support unit to support the substrate in a treatment space of a process chamber, a first fluid supply unit to supply a supercritical fluid having an organic solvent dissolved in the supercritical fluid, to the treatment space, a second fluid supply unit to supply the supercritical fluid having no organic solvent dissolved in the supercritical fluid, to the treatment space, an exhaust unit to exhaust the treatment space, a controller to control the first fluid supply unit, the second fluid supply unit, and the exhaust unit. The controller controls the first and second fluid supply units such that the supercritical fluid having no organic solvent dissolved in the supercritical fluid is supplied to the treatment space through the second fluid supply unit, after the supercritical fluid mixed with the organic solvent is supplied to the treatment space through the first fluid supply unit.

Abstract: The apparatus includes a support unit to support the substrate in a treatment space of a process chamber, a first fluid supply unit to supply a supercritical fluid having an organic solvent dissolved in the supercritical fluid, to the treatment space, a second fluid supply unit to supply the supercritical fluid having no organic solvent dissolved in the supercritical fluid, to the treatment space, an exhaust unit to exhaust the treatment space, a controller to control the first fluid supply unit, the second fluid supply unit, and the exhaust unit. The controller controls the first and second fluid supply units such that the supercritical fluid having no organic solvent dissolved in the supercritical fluid is supplied to the treatment space through the second fluid supply unit, after the supercritical fluid mixed with the organic solvent is supplied to the treatment space through the first fluid supply unit.

Abstract: Provided is a ceiling storage system capable of correcting a working position and constantly checking stability of a structure by detecting an amount of change in a facility. According to the ceiling storage system, a transport vehicle moves to an upper portion of a first storage area of a plurality of storage areas in a state of gripping an article, and the transport vehicle measures a first distance value between the transport vehicle and the first storage area using a distance sensor and measures a relative position value between the transport vehicle and the first storage area using a vision sensor, before unloading the article from the first storage area.

Abstract: The present invention relates to an apparatus for generating data quality information of electric power equipment, the apparatus including a data collector configured to collect a piece of measured data of electric power equipment, a storage configured to store a previous value and a set value for the piece of measured data, and a quality value generator configured to generate a quality value for the piece of measured data by applying the piece of measured data, the previous value, and the set value to a predetermined logic circuit.

Abstract: The present invention relates to an apparatus for generating data quality information of electric power equipment, the apparatus including a data collector configured to collect a piece of measured data of electric power equipment, a storage configured to store a previous value and a set value for the piece of measured data, and a quality value generator configured to generate a quality value for the piece of measured data by applying the piece of measured data, the previous value, and the set value to a predetermined logic circuit.

Abstract: The present invention relates to a device and a method for calculating stability and predicting an error of a power system network, the device comprising: a standard object information reception unit for receiving standard object information provided by a power system network; a connection state stability calculation unit for calculating connection state stability (Sstate) using the standard object information; a connection time stability calculation unit for calculating connection time stability (Stime) using the standard object information; a network connection stability calculation unit for calculating a final network connection stability using the network connection state stability (Sstate) and the connection time stability (Stime); and an error prediction information display unit for displaying error prediction information including at least one of network path information, a network state value, the final network connection stability, the connection state stability (Sstate), and the connection time stab

Abstract: Disclosed herein are an apparatus and method for detecting abnormal behavior in a main device and a terminal device, included in a control network, using a whitelist. The apparatus for detecting abnormal behavior includes an information collection unit for collecting system information about the main device and system information about the terminal device and a detection unit for detecting abnormal behavior in the main device and the terminal device by comparing a whitelist with system information that includes the system information about the main device and the system information about the terminal device, wherein the whitelist includes a process whitelist, a file whitelist, and a network whitelist.

Abstract: Disclosed herein are an apparatus and method for detecting abnormal behavior in a main device and a terminal device, included in a control network, using a whitelist. The apparatus for detecting abnormal behavior includes an information collection unit for collecting system information about the main device and system information about the terminal device and a detection unit for detecting abnormal behavior in the main device and the terminal device by comparing a whitelist with system information that includes the system information about the main device and the system information about the terminal device, wherein the whitelist includes a process whitelist, a file whitelist, and a network whitelist.

Abstract: The present invention relates to a device and a method for calculating stability and predicting an error of a power system network, the device comprising: a standard object information reception unit for receiving standard object information provided by a power system network; a connection state stability calculation unit for calculating connection state stability (Sstate) using the standard object information; a connection time stability calculation unit for calculating connection time stability (Stime) using the standard object information; a network connection stability calculation unit for calculating a final network connection stability using the network connection state stability (Sstate) and the connection time stability (Stime); and an error prediction information display unit for displaying error prediction information including at least one of network path information, a network state value, the final network connection stability, the connection state stability (Sstate), and the connection time stab

Abstract: An apparatus and method for generating build-block components, the apparatus including: a removal unit to remove one or more depending relationships between components; an implementation unit to generate one or more independent components from the components in which the one or more depending relationships have been dissolved; and a type definition unit to define a type indicating characteristics for each the one or more generated independent components.