Abstract: Disclosed are a semiconductor manufacturing facility and a teaching method of the semiconductor manufacturing facility, which prevent partial whitening of image information for obtaining a teaching reference point of a teaching target during a teaching operation of a transfer device that transfers a wafer or a mask, thereby improving readability. The semiconductor manufacturing facility includes: a teaching target in which a first teaching reference point and a second teaching reference point are formed; a transfer device on which the teaching target is mounted; and a teaching inspection unit for image-analyzing the first teaching reference point and the second teaching reference point of the teaching target, calculating center coordinates of each of the first teaching reference point and the second teaching reference point, and teaching the transfer device with an angle value of a line connecting the respective center coordinates.

Abstract: A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Abstract: A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Abstract: In a channel equalizer applicable to a digital television receiver, a forward filter and a backward filter perform filtering to an input signal and a predetermined signal. A Viterbi decoder corrects errors during a transmission procedure in a blind mode. A training symbol storing block stores training symbols. An output signal of the Viterbi decoder and symbols are provided to the backward filter in accordance with a blind mode or a training mode. A Kalman gain is calculated in a Kalman gain calculating block and an error signal is calculated by comparing an equalized signal, symbols, and the output signal of the Viterbi decoder with one another. A tap coefficient is updated by using the calculated error signal and the Kalman gain.

Abstract: In a channel equalizer applicable to a digital television receiver, a forward filter and a backward filter perform filtering to an input signal and a predetermined signal. A Viterbi decoder corrects errors during a transmission procedure in a blind mode. A training symbol storing block stores training symbols. An output signal of the Viterbi decoder and symbols are provided to the backward filter in accordance with a blind mode or a training mode. A Kalman gain is calculated in a Kalman gain calculating block and an error signal is calculated by comparing an equalized signal, symbols, and the output signal of the Viterbi decoder with one another. A tap coefficient is updated by using the calculated error signal and the Kalman gain.