Patents by Inventor Yong Hyun HAM

Yong Hyun HAM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method of treating a substrate
    Patent number: 9978567
    Abstract: Provided are an apparatus and a method of treating a substrate using process gas. The apparatus may include a chamber configured to provide a treatment space, in which a process of treating a substrate is performed, a detection unit configured to detect an amount of reaction by-products attached on an inner surface of the chamber. The detection unit may include a window member provided on the inner surface of the chamber, and a light source member configured to emit and receive light through the window member.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: May 22, 2018
    Assignee: SEMES Co., Ltd.
    Inventors: Yong-Hyun Ham, Hyung Je Woo, Hyun Joong Kim, Wan-Jae Park, Kyu Young Han
  • APPARATUS AND METHOD OF TREATING A SUBSTRATE
    Publication number: 20150214016
    Abstract: Provided are an apparatus and a method of treating a substrate using process gas. The apparatus may include a chamber configured to provide a treatment space, in which a process of treating a substrate is performed, a detection unit configured to detect an amount of reaction by-products attached on an inner surface of the chamber. The detection unit may include a window member provided on the inner surface of the chamber, and a light source member configured to emit and receive light through the window member.
    Type: Application
    Filed: January 28, 2015
    Publication date: July 30, 2015
    Inventors: Yong-Hyun HAM, Hyung Je WOO, Hyun Joong KIM, Wan-Jae PARK, Kyu-Young HAN
  • RFID tag
    Patent number: 8981937
    Abstract: An RFID tag includes: an antenna receiving an RF signal from a reader; an AFE (analog front end) generating voltage using the RF signal; and one or more switches interposed between the antenna and the AFE and controlling the connection between the antenna and the AFE through the switch operation.
    Type: Grant
    Filed: November 11, 2011
    Date of Patent: March 17, 2015
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Ji Man Park, Lee Mi Do, Kyu Ha Baek, Kun Sik Park, Dong Pyo Kim, Jong Chang Woo, Zin Sig Kim, Joo Yeon Kim, Ye Sul Jeong, Yong Hyun Ham
  • RFID TAG
    Publication number: 20120161941
    Abstract: An RFID tag includes: an antenna receiving an RF signal from a reader; an AFE (analog front end) generating voltage using the RF signal; and one or more switches interposed between the antenna and the AFE and controlling the connection between the antenna and the AFE through the switch operation.
    Type: Application
    Filed: November 11, 2011
    Publication date: June 28, 2012
    Applicant: Electronics and Telecommunications Research Institute
    Inventors: Ji Man PARK, Lee Mi DO, Kyu Ha BAEK, Kun Sik PARK, Dong Pyo KIM, Jong Chang WOO, Zin Sig KIM, Joo Yeon KIM, Ye Sul JEONG, Yong Hyun HAM