Abstract: The device for processing a substrate according to an embodiment of the present disclosure includes a chamber, a substrate supporting unit which is provided inside the chamber and supports a substrate provided inside the chamber, a gas distribution unit which is provided inside the chamber to face the substrate supporting unit and distributes a process gas toward the substrate supporting unit, a first temperature control unit which is installed in a central region of the gas distribution unit and increases a temperature of the central region, and a second temperature control unit which is installed in an edge region of the gas distribution unit and increases a temperature of the edge region more rapidly than the temperature of the central region.

Abstract: A method for diagnosing an abnormality of a vehicle cooling system using circulation of cooling water stored in a reservoir tank includes generating a diagnostic mode operation command based on state information of a vehicle including a disturbance factor, calculating an RPM of a water pump in response to the diagnostic mode operation command, and determining an abnormal state of the cooling system based on the RPM of the water pump being equal to or greater than a predetermined threshold.

Abstract: Disclosed herein are a method for generating a vehicle control signal based on magnetic paint lanes and an apparatus for the same. The method includes generating a magnetic sensing signal corresponding to an alternating magnetic pattern from magnetic paint lanes, performing noise filtering on the magnetic sensing signal so as to generate a magnetic sensing signal from which noise is removed, and controlling the operation of a vehicle based on the magnetic sensing signal from which noise is removed.

Abstract: A method of fabricating a semiconductor package includes disposing a preliminary semiconductor package on a stage, the preliminary semiconductor package including a substrate to which a pad part is attached, an interposer disposed on the substrate, and a semiconductor chip disposed between the substrate and the interposer. A bonding tool is disposed on the interposer. The bonding tool includes a first region and a second region outside of the first region. The second region of the bonding tool corresponds to the pad part. The interposer and the substrate are bonded to each other.

Abstract: A method of controlling charging of a battery may include making, by a controller, the battery that supplies power to a drive motor start to be charged with a boosted voltage higher than a voltage of a fast charger by controlling a switch connecting the drive motor and the fast charger of a vehicle and a switch of an inverter driving the drive motor, for fast charging of the battery; determining, by the controller, whether a motor position sensor has failure according to an output signal of the motor position sensor which detects a position of the drive motor; engaging, by the controller, an engine clutch that is configured to connect or disconnect the engine of the vehicle and the drive motor, when the controller determines that the motor position sensor has the failure; and maintaining, by the controller, the fast charging for the battery when a rotation of the drive motor stops after the engine clutch is engaged.

Abstract: A medicinal liquid supply control apparatus according to an embodiment of the present disclosure includes a reservoir located on a second channel to define an internal space that stores a medicinal liquid, an inlet hole and an outlet hole being formed in one portion of an outer surface of the reservoir and connected to the internal space, and a reservoir support part on which the one portion of the reservoir is fixed, an inlet connection hole connected to the inlet hole and an outlet connection hole connected to the outlet hole being formed at the reservoir support part.

Abstract: A chamber cleaning method in accordance with an exemplary embodiment includes a chamber stabilizing process for transporting a substrate, on which a thin film deposition process has been completed, out of a chamber and processing an inside of the chamber, wherein the chamber stabilizing process includes: a cleaning process for injecting a cleaning gas into the chamber and etching and cleaning byproducts generated by the thin film deposition; and a coating process for injecting a gas including at least one among aluminum (Al), zirconium (Zr) or hafnium (Hf) into the chamber, and generating a protective film on an inner wall of the chamber and at least one surface of components installed inside the chamber.

Abstract: Disclosed is a motor system control apparatus for vehicles including a communication unit communicatively connected to a plurality of motor systems and a controller configured to, upon recognizing that one of the motor systems is broken, control the motor system such that a battery is charged using counter-electromotive force of a motor, wherein the controller confirms whether, upon recognizing breakdown of the motor system, the broken motor system is capable of generating counter-electromotive force, decides whether to generate the counter-electromotive force based on a state of charge (SOC) and a traveling state of a vehicle upon confirming that the broken motor system is capable of generating the counter-electromotive force, controls the broken motor system such that the counter-electromotive force is generated upon deciding to generate the counter-electromotive force, and charges the battery with electrical energy generated by the counter-electromotive force.

Abstract: A medicinal liquid flow control apparatus includes a medicinal liquid flow path that guides a flow of a medicinal liquid. The medicinal liquid flow path includes an inlet flow path through which the medicinal liquid is introduced, a plurality of branch flow paths branching from the inlet flow path, and an outlet flow path to which the plurality of branch flow paths join and through which the medicinal liquid flows out. The medicinal liquid flow control apparatus includes a plurality of transfer tubes configured to correspond to the plurality of branch flow paths, respectively, each of the transfer tubes forming a capillary flow path constituting at least a portion of a corresponding one of the plurality of branch flow paths, and a valve configured to control a flow rate of the medicinal liquid flowing out through the outlet flow path by selectively opening and closing the plurality of branch flow paths.

Abstract: The cover for a drug delivery tube device according to a disclosed embodiment is configured to define an insertion space having an opening formed on a lower side thereof so that the drug delivery tube device having a capillary flow path configured to allow a drug solution to flow therethrough is capable of being inserted into the opening. The cover includes a cover body extending along a circumference of the insertion space around a center axis perpendicular to an upper-lower direction.

Abstract: A flushing apparatus according to embodiments of the present disclosure includes: a main body configured to connect a connection pipe for guiding a hazardous medicinal liquid harmful to a human body when exposed to an ambient air and a patient connection module for injecting the hazardous medicinal liquid into a patient, the main body configured to form a first flow path for guiding the hazardous medicinal liquid from the connection pipe to the patient connection module, the main body including a flushing portion forming a second flow path connected to a predetermined connection point located between both ends of the first flow path; and a flow rate reduction part disposed at upstream side of the connection point in the first flow path and configured to reduce a flow rate of the hazardous medicinal liquid flowing through the first flow path. The present disclosure shows various embodiments of the flushing apparatus.

Abstract: A drug mixing device is configured to mix a first content in a liquid form in a first container and a second content in a liquid or powder form in a second container. According to an embodiment of the present disclosure, a first flow path extending from one end configured to allow a liquid inside the first container to flow into the first flow path through the one end to the other end configured to allow a liquid inside the second container to flow into the first flow path through the other end, a second flow path branching from a first branch point located on the first flow path and extending to an outlet port, and a third flow path extending to connect a second branch point located on the second flow path and a third branch point located on the first flow path are formed in the drug mixing device.

Abstract: An eco-friendly vehicle and a transmission hydraulic pressure control method for the same are provided. The vehicle includes an oil pump that estimates an inner temperature without using a temperature sensor. The method includes determining a driver request output and determining a required hydraulic pressure corresponding to the request output. A temperature of an oil pump unit is estimated to operate an electric oil pump to supply a hydraulic pressure to a transmission, based on the required hydraulic pressure and driving status information. An output torque is then adjusted based on the estimated temperature.

Abstract: Provided is a substrate processing apparatus. The positions of a first electrode and a second electrode are adjusted in advance in consideration of differences in coefficients of thermal expansion so that a short circuit created by contact between the first electrode and the second electrode is prevented even in the case in which the first electrode and the second electrode are thermally expanded during processing. Even in the case in which the first electrode and the second electrode are thermally expanded due to an increase in temperature during processing, a short circuit between the first electrode and the second electrode can be prevented, and the uniformity of a thin film can be maintained in the substrate processing apparatus for processing a large substrate.

Abstract: The present disclosure relates to a thin film transistor, and more particularly, to a thin film transistor in which a metal oxide thin film is used as an active layer. A thin film transistor including a gate insulating film and an active layer formed between source and drain electrodes, wherein the active layer includes: a first metal oxide thin film; a second metal oxide thin film provided between the first metal oxide thin film and the gate insulating film and having lower electrical conductivity than the first metal oxide thin film; and a third metal oxide thin film provided between the first metal oxide thin film and the source and drain electrodes and having lower electrical conductivity than the first metal oxide thin film.

Abstract: An indicator-type door lock that may prevent the door lock device from being enlarged while user may intuitively identify the lock state of the door lock at the outside. An indicator-type door lock including: a handle shaft having a handle for unlocking and a push button for locking; a driving body mounted with the handle shaft; a door lock main body having a main body cover with at least one display portion displaying the locked state of the door lock to the outside, and installed in front of the driving body; an indicator member installed within the door lock main body to be pivoted to a certain radius, and being exposed through the display portion; and a turning drive member for pivoting the indicator member located within the handle shaft and rotated inside the handle shaft when the push button is pressed to pivot indicator member.

Abstract: A method of controlling charging of a battery may include making, by a controller, the battery that supplies power to a drive motor start to be charged with a boosted voltage higher than a voltage of a fast charger by controlling a switch connecting the drive motor and the fast charger of a vehicle and a switch of an inverter driving the drive motor, for fast charging of the battery; determining, by the controller, whether a motor position sensor has failure according to an output signal of the motor position sensor which detects a position of the drive motor; engaging, by the controller, an engine clutch that is configured to connect or disconnect the engine of the vehicle and the drive motor, when the controller determines that the motor position sensor has the failure; and maintaining, by the controller, the fast charging for the battery when a rotation of the drive motor stops after the engine clutch is engaged.

Abstract: In drug mixing devices of disclosed embodiments, a main flow path extending from one end configured to allow liquid inside the first container to enter the main flow path therethrough to another end configured to allow liquid inside the second container to enter the main flow path therethrough, and a branch flow path branching from the main flow path are formed. The drug mixing device includes a body including a first connection part configured to be coupled with the first container and a second connection part configured to be coupled with the second container, and a backflow prevention part disposed in a partial flow path of the main flow path extending to the one end with reference to the connection point of the main flow path and the branch flow path, the backflow prevention part being configured to prevent liquid from flowing from the connection point to the one end.

Abstract: Proposed is a system for closing a drum unit for storing radioactive waste, the system including: a supporting unit configured to be seated on the ground; a drum unit configured to be seated on a top part of the supporting unit and having a plurality of first fastening holes; a moving unit configured to move to a side of the drum unit; a cover unit provided at the inside of the moving unit or at one side of the drum unit and having a plurality of second fastening holes; tightening units configured to be inserted into the associated second fastening holes; a fastening unit configured to grip the cover unit through a gripping part to move the cover unit to the top part of the drum unit simultaneously, thereby closing a gap between the drum unit and the cover unit; and a controller configured to control the fastening unit.

Abstract: A drug mixing kit according to a disclosed embodiment for mixing a first content in a liquid form in a first container with a second content in a liquid or powder form in a second container includes: a syringe forming therein an accommodation space in which a liquid is accommodated; and a drug mixing device coupled with the syringe and forming therein a drug flow path extending from one end configured to allow the liquid in the accommodation space to flow into the drug flow path therethrough to other end configured to allow the liquid in the second container to flow into the drug flow path therethrough.