Abstract: According to the disclosure, a pump unit includes a vibration sensor or a noise sensor, and a controller may control a driving operation of a pump driving unit on the basis of vibration data or noise data. Furthermore, in case that pump driving units are provided, control is performed to adjust a fault threshold value in consideration of influence of vibration or noise therebetween, and thus the reliability of detection or diagnosis of a fault of a pump can be improved, and the safety of an operator can be promoted.

Abstract: According to the disclosure, a pump unit includes a vibration sensor or a noise sensor, and a controller may control a driving operation of a pump driving unit on the basis of vibration data or noise data. Furthermore, in case that pump driving units are provided, control is performed to adjust a fault threshold value in consideration of influence of vibration or noise therebetween, and thus the reliability of detection or diagnosis of a fault of a pump can be improved, and the safety of an operator can be promoted.

Abstract: Disclosed is a fault detection system for a vacuum pump. The fault detection system for a vacuum pump according to an embodiment of the disclosure includes an acoustic sensor configured to detect sounds, generate a sound pattern from the sounds, and collect the sound pattern and a processor configured to analyze the sound pattern and identify whether a vacuum pump is faulty.

Abstract: A method for controlling equipment in a semiconductor fabrication system including automatically receiving operational state data from equipment in a semiconductor fabrication system and determining whether the operational state data corresponding to any of the equipment is abnormal. If the operational state data is abnormal for certain equipment, it is determined whether the operational state data indicate all units of the certain equipment are in non-operational states. If all units of the certain equipment are in the non-operational states, all process condition data corresponding to the certain equipment is blocked off in the host computer, whereby the equipment is isolated from a fabrication processing flow. Otherwise, non-operational units of the certain equipment are identified, indicated by respective parameters of the operational state data having non-operational state values, and a subset of the process condition data corresponding to the non-operational units is blocked off in the host computer.

Abstract: A wafer cassette, a method for manufacturing the cassette, and equipment for semiconductor fabrication are provided. The cassette includes a container for containing wafers, a bar-code wing projecting outward from at least one of the front walls and sidewalls of the container, and a bar code formed on the surface of the bar-code wing. A bar code reader for identifying the bar codes of the cassette is provided below the upper plane of the loader/unloader portion of the equipment for semiconductor fabrication. Accordingly, an efficient loading/unloading operation of a cassette onto/from the loader/unloader portion of the equipment is enabled, wafer damage is reduced, and productivity of the manufactured semiconductor device is improved.