Patents by Inventor Yong Jai Choi

Yong Jai Choi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single polarizer focused-beam ellipsometer
    Patent number: 8009292
    Abstract: The present invention relates to a single-polarizer focused-beam ellipsometer. An ellipsometer according to the present invention includes a light source (210); a beam splitting part (220) for splitting a light generated in the light source (210) into a polarized light; an objective lens (230) for concentrately irradiating some of light split by the beam splitting part (220) onto a specimen (240); a photodetector (250) for detecting the light passed through the objective lens 230 and the beam splitting part (220) after reflected from the specimen (240) with unit cells; and a central processing unit (260) for correcting the intensity of the light detected by the photodetector (250) into a value corresponding to the unit cell of the photodetector (250) along multiple incidence plane passage of 360° with respect to respective incidence angles and processing the corrected value.
    Type: Grant
    Filed: November 11, 2008
    Date of Patent: August 30, 2011
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Yong Jai Choi, Won Chegal, Hyun Mo Cho