Patents by Inventor Yong-Jie Ciou

Yong-Jie Ciou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, system and apparatus for uniformed surface measurement
    Patent number: 11359906
    Abstract: A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: June 14, 2022
    Assignee: TA LIANG TECHNOLOGY CO., LTD.
    Inventors: Chao-Chang Chen, Jen-Chieh Li, Yong-Jie Ciou, Hsien-Ming Lee, Jian-Shian Lin, Chun-Chen Chen, Ching-Tang Hsueh
  • METHOD, SYSTEM AND APPARATUS FOR UNIFORMED SURFACE MEASUREMENT
    Publication number: 20210372764
    Abstract: A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Chao-Chang Chen, Jen-Chieh Li, Yong-Jie Ciou, Hsien-Ming Lee, Jian-Shian Lin, Chun-Chen Chen, Ching-Tang Hsueh