Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.

Abstract: A ceiling storage system includes a first support rail and a second support rail that extend in a first direction; a first driving rail that extends in the first direction and is parallel to the first support rail and the second support rail; a second driving rail movably coupled to the first support rail, the second support rail, and the first driving rail, where the second driving rail is configured to move along the first support rail, the second support rail, and the first driving rail; a transfer vehicle movably coupled to the second driving rail and configured to move along the second driving rail; and a connection device that connects the first driving rail and the second driving rail to each other, where the connection device and the second driving rail are rotatable around a first axis that is parallel to the first direction.

Abstract: An inter-floor transport system includes an aerial vehicle configured to move vertically and horizontally along a passage and a power assembly including a power supply adjacent to the passage and a guide cable extending along the passage and connected to the power supply, where the aerial vehicle is configured to receive power through the guide cable without contacting the guide cable.

Abstract: According to an embodiment, a cassette storage case includes a body defining an internal storage space for a cassette. The body includes a lower body part, and a shield body part extending upward from an upper surface outer region of the lower body part. The shield body part has an opening in an upper portion thereof. A load protruding portion extends outward from an outer bottom surface of the lower body part, and has a shape that corresponds to a shape of the opening.

Abstract: An embodiment of the present disclosure provides an overhead hoist transport system including: a driving rail configured to extend in a first direction; a support rail positioned parallel to the driving rail; and a crane movably connected to the driving rail and the support rail and configured to move along the driving rail and the support rail, wherein the crane includes: a base configured to extend in a second direction perpendicular to the first direction to cross the driving rail and the support rail; a driving wheel connected to the base and configured to move along the driving rail; and a guide wheel connected to the base and pressed toward a contact surface of the support rail to remain in contact with the support rail, the contact surface being a surface in contact with the guide wheel.

Abstract: An article transfer system includes a plurality of stage modules respectively provided at a plurality of layers, an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules, and a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules. The interlayer transfer apparatus includes a mast frame extending so as to intersect each stage module of the plurality of stage modules, and a plurality of carriage units configured to move along a length direction of the mast frame, transfer articles, and move in a parallel manner with each other.

Abstract: Provided is a ceiling storage system capable of correcting a working position and constantly checking stability of a structure by detecting an amount of change in a facility. According to the ceiling storage system, a transport vehicle moves to an upper portion of a first storage area of a plurality of storage areas in a state of gripping an article, and the transport vehicle measures a first distance value between the transport vehicle and the first storage area using a distance sensor and measures a relative position value between the transport vehicle and the first storage area using a vision sensor, before unloading the article from the first storage area.

Abstract: Provided is a ceiling storage system for increasing storage capacity by utilizing a ceiling space inside a fab. The ceiling storage system includes a first overhead rack including a plurality of storage positions for storing a plurality of articles; first and second support rails above the first overhead rack and extending in one direction; a first driving rail above the first overhead rack and in parallel with the first and second support rails; a second driving rail coupled to the first and second support rails and the first driving rail and moving along the first and second support rails and the first driving rail; and a first transport vehicle including a carriage coupled to the second driving rail and moving along the second driving rail, and a hoist and a hand unit installed on the carriage and for loading and unloading the articles to and from the first overhead rack.

Abstract: Disclosed are semiconductor carrier storage systems, semiconductor fabrication systems including the same, and/or semiconductor fabrication methods using the same. The semiconductor carrier storage system comprises storage ports each of which accommodates a semiconductor carrier, a shuttle rail that extends in a horizontal direction on a side of the storage ports, an internal carrier shuttle that moves along the shuttle rail and transfers a semiconductor carrier to each of the storage ports, and an upper transport that receives the semiconductor carrier from an overhead hoist transport (OHT). The internal carrier shuttle includes a shuttle body coupled to the shuttle rail, a transfer wheel that connects the shuttle body to the shuttle rail, a gripper that holds the semiconductor carrier, and a hoist that vertically extends between the shuttle body and the gripper and drives the gripper to vertically move.

Abstract: A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

Abstract: A loader device includes a frame, a first opening formed in a first side surface of the frame, a second opening formed on a second side surface of the frame, a cavity that connects the first opening and the second opening, a transport unit in the cavity, a first sensor that senses a presence or absence of a first substrate carrier, a second sensor that senses access of a person, and a controller that receives a first sensor signal from the first sensor and receives a second sensor signal from the second sensor. In response to the first sensor signal, the controller controls the transport unit to not transfer a second substrate carrier to the first opening, controls the transport unit to pick up the first substrate carrier from the first opening, and interrupts operation of the transport unit in response to the second sensor signal.

Abstract: An article transfer system includes a plurality of stage modules respectively provided at a plurality of layers, an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules, and a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules. The interlayer transfer apparatus includes a mast frame extending so as to intersect each stage module of the plurality of stage modules, and a plurality of carriage units configured to move along a length direction of the mast frame, transfer articles, and move in a parallel manner with each other.

Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.

Abstract: A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

Abstract: A substrate transfer device includes: a traveling unit including a traveling wheel that travels on a rail to transfer a substrate in a first direction; a rail unit including the rail and a rail protrusion protruding from the rail in a second direction different from the first direction; and a sensor unit including a first sensor and a second sensor, wherein the first sensor senses the traveling unit, and the second sensor senses the rail protrusion, wherein the first and second sensors are placed at the same position as each other along the rail on a basis of the first direction.

Abstract: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.

Abstract: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.

Abstract: A semiconductor wafer stocker apparatus includes a body frame, an inlet port to load a wafer shipping box into the body frame, an outlet port to unload the wafer shipping box from the body frame, an automated transfer robot operable to convey the wafer shipping box between the inlet port and the outlet port, and a shelf module within the body frame. The shelf module includes a shelf plate configured to support the wafer shipping box. The shelf plate includes first, second, and third protruding support pins arranged to align with respective grooves in an underside of the wafer shipping box and orient the wafer shipping box with a door thereof facing away from the body frame. The first and second support pins may be closer to the body frame than the third support pin. Related apparatus and methods of operation are also discussed.

Abstract: A semiconductor wafer stocker apparatus includes a body frame, an inlet port to load a wafer shipping box into the body frame, an outlet port to unload the wafer shipping box from the body frame, an automated transfer robot operable to convey the wafer shipping box between the inlet port and the outlet port, and a shelf module within the body frame. The shelf module includes a shelf plate configured to support the wafer shipping box. The shelf plate includes first, second, and third protruding support pins arranged to align with respective grooves in an underside of the wafer shipping box and orient the wafer shipping box with a door thereof facing away from the body frame. The first and second support pins may be closer to the body frame than the third support pin. Related apparatus and methods of operation are also discussed.