Abstract: A deposition source for a deposition device includes a crucible. A heater is disposed outside of the crucible and the heater has a plate shape. The deposition source includes a heater guide. The heater is disposed within the heater guide, and the heater guide supports the heater. An external supporter is connected to the heater guide.

Abstract: A deposition source assembly for depositing a deposition material on a substrate disposed in a chamber, the deposition source assembly including: a deposition source disposed in the chamber, the deposition source being configured to deposit the deposition material on the substrate; an electrode passing through at least one wall of the chamber, the electrode being configured to provide power to the deposition source; an insulator disposed between the electrode and the wall of the chamber; and an insulator cap disposed on the insulator to cover at least a portion of the insulator.