Abstract: A method of controlling a low-power operation of a wireless sensor device includes performing a sensor-active step where the wireless sensor device is active during the time taken for a working mode in which the wireless sensor device performs multiple tasks, and performing a sensor-inactive step where a mode of the wireless sensor device is switched to a sleep mode after the working mode is ended. The performing of the sensor-active step includes receiving, after transmitting sensing data of a sensing target to a host device that monitors and controls the wireless sensor device, operation control information stored in the host device from the host device.

Abstract: Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.

Abstract: According to an exemplary embodiment of the present invention, a substrate treatment apparatus includes a chamber member including a treatment space in which a substrate is to be treated, a substrate support unit installed in the treatment space and supporting a substrate, a chemical ejection unit connected to the chamber member and ejecting a chemical fluid to the substrate support unit, and a steam supply unit connected to the chamber member and supplying steam to the chamber member.

Abstract: Disclosed is an apparatus for precisely monitoring warpage deformation of a substrate. The apparatus includes a sensing unit and a processor. The sensing unit is removably mounted on the substrate and detects information on the warpage deformation of the substrate during a treatment process performed on the substrate. The processor generates warpage state information on the basis of the warpage information detected by the sensing unit.

Abstract: Disclosed is a wafer-type sensor unit. The wafer-type sensor unit according to an embodiment of the inventive concept may include a circuit board and an electronic element including a sensor installed on the circuit board. The electronic element may be disposed on the circuit board such that a center of gravity of the wafer-type sensor unit is provided to a center part of the sensor unit. The electronic element may further include a power supply unit and a signal processing unit processing a signal on the circuit board. The wafer-type sensor unit may further include one or more dummy elements installed on the circuit board.

Abstract: The inventive concept provides a method for treating a substrate. In an embodiment, the substrate treating method includes a treatment step of treating a residue on the substrate with a first fluid in a supercritical state and a second fluid in a supercritical state in a process space of a chamber, and the first fluid in the supercritical state and the second fluid in the supercritical state have different densities.

Abstract: A system for displaying vehicle driving information may include: first and second image acquisition devices configured to capture an image of a first side on which a driver seat is located and an image of a second side which is the opposite side of the first side, respectively; first and second display devices configured to display the captured images of the first and second image acquisition devices, respectively; first and second BSD devices and configured to sense side-rear vehicle information; and a control device configured to recognize the location and vehicle distance of the side-rear vehicle by analyzing the side-rear vehicle information detected by the first and second BSD devices, determine whether to issue a BSD warning, and control BSD warning icons of the ego vehicle and the side-rear vehicle to be displayed as an OSD of the images displayed on the first and second display devices.

Abstract: The inventive concept relates to an apparatus for treating a substrate. In an embodiment, the apparatus includes a process chamber having a process space in which the substrate is treated with a fluid in a supercritical state, a support unit that supports the substrate in the process space, a fluid supply unit that supplies the fluid into the process space, a filler member disposed to face the substrate placed on the support unit in the process space, and a measurement unit that measures a state in the process space, the measurement unit being provided in the filler member.

Abstract: Disclosed is a boarding bridge having a transparent display. The boarding bridge includes a first tunnel connected to a terminal gate, a second tunnel connected to be capable of overlapping with the first tunnel, and a control unit. The first tunnel and the second tunnel each have a plurality of transparent displays, and include at least one overlap detecting sensor unit. Through the overlap detecting sensor unit which detects whether a transparent display of the first tunnel and a transparent display of the second tunnel overlap, the controller can selectively control the playback of images on the transparent displays of the first and second tunnels.

Abstract: According to one example embodiment, trust evaluation system may include a collection unit collecting internal data and external data; a calculation unit calculating reputation and interactional reciprocity of entity using the internal data or external data and calculating trust of the entity based on the calculated reputation and interactional reciprocity; a process unit determining whether the entity is trustable and access to the entity is permitted by comparing the calculated trust of the entity with a threshold value and reporting to an owner of IoT system a determination result; and an update unit updating the threshold value for the entity based on the determination result.