Patents by Inventor Yong Ki HAN

Yong Ki HAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPENING AND SHUTTING DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
    Publication number: 20200243306
    Abstract: Disclosed are an opening and shutting device and a substrate processing apparatus including the same. A device for opening and closing an entrance through which a substrate is carried into and out of a processing chamber includes an opening and shutting part that is disposed between the entrance and the processing chamber and that opens and closes the entrance while rotating so as to be brought into close contact with the entrance.
    Type: Application
    Filed: January 23, 2020
    Publication date: July 30, 2020
    Applicant: KCTECH CO.,LTD.
    Inventor: Yong Ki HAN