Patents by Inventor Yong Mo Yang

Yong Mo Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12199094
    Abstract: Fin field effect transistors (FinFETs) having various different thicknesses of gate oxides and related apparatuses, methods, and computing systems are disclosed. An apparatus includes first FinFETs, second FinFETs, and third FinFETs. The first FinFETs include a first gate oxide material, a second gate oxide material, and a third gate oxide material. The second FinFETs include the second gate oxide material and the third gate oxide material. The third FinFETs include the third gate oxide material. A method includes forming the first gate oxide material on first fins, second fins, and third fins; removing the first gate oxide material from the second fins and the third fins; forming a second gate oxide material over the first fins, the second fins, and the third fins; and removing the second gate oxide material from the third fins.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: January 14, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Hyuck Soo Yang, Byung Yoon Kim, Yong Mo Yang, Shivani Srivastava
  • Publication number: 20230141716
    Abstract: Fin field effect transistors (FinFETs) having various different thicknesses of gate oxides and related apparatuses, methods, and computing systems are disclosed. An apparatus includes first FinFETs, second FinFETs, and third FinFETs. The first FinFETs include a first gate oxide material, a second gate oxide material, and a third gate oxide material. The second FinFETs include the second gate oxide material and the third gate oxide material. The third FinFETs include the third gate oxide material. A method includes forming the first gate oxide material on first fins, second fins, and third fins; removing the first gate oxide material from the second fins and the third fins; forming a second gate oxide material over the first fins, the second fins, and the third fins; and removing the second gate oxide material from the third fins.
    Type: Application
    Filed: November 5, 2021
    Publication date: May 11, 2023
    Inventors: Hyuck Soo Yang, Byung Yoon Kim, Yong Mo Yang, Shivani Srivastava
  • Patent number: 11594536
    Abstract: Some embodiments include an integrated assembly having a CMOS region with fins extending along a first direction, and with gating structures extending across the fins. A circuit arrangement is associated with the CMOS region and includes a pair of the gating structures spaced by an intervening region having a missing gating structure. The circuit arrangement has a first dimension along the first direction. A second region is proximate to the CMOS region. Conductive structures are associated with the second region. Some of the conductive structures are electrically coupled with the circuit arrangement. A second dimension is a distance across said some of the conductive structures along the first direction. The conductive structures and the circuit arrangement are aligned such that the second dimension is substantially the same as the first dimension. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: February 28, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Yong Mo Yang, Mohd Kamran Akhtar, Huyong Lee, Sangmin Hwang, Song Guo
  • Patent number: 11522068
    Abstract: One illustrative IC product disclosed herein includes first and second final gate structures and an insulating gate separation structure positioned between the first and second final gate structures. In one embodiment, the insulating gate separation structure has a stepped bottom surface with a substantially horizontally oriented bottom central surface that is surrounded by a substantially horizontally oriented recessed surface, wherein the substantially horizontally oriented bottom central surface is positioned a first level above the substrate and the substantially horizontally oriented recessed surface is positioned at a second level above the substrate, wherein the second level is greater than the first level.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: December 6, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Jiehui Shu, Chang Seo Park, Shimpei Yamaguchi, Tao Han, Yong Mo Yang, Jinping Liu, Hyuck Soo Yang
  • Publication number: 20220293598
    Abstract: Some embodiments include an integrated assembly having a CMOS region with fins extending along a first direction, and with gating structures extending across the fins. A circuit arrangement is associated with the CMOS region and includes a pair of the gating structures spaced by an intervening region having a missing gating structure. The circuit arrangement has a first dimension along the first direction. A second region is proximate to the CMOS region. Conductive structures are associated with the second region. Some of the conductive structures are electrically coupled with the circuit arrangement. A second dimension is a distance across said some of the conductive structures along the first direction. The conductive structures and the circuit arrangement are aligned such that the second dimension is substantially the same as the first dimension. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: March 10, 2021
    Publication date: September 15, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Yong Mo Yang, Mohd Kamran Akhtar, Huyong Lee, Sangmin Hwang, Song Guo
  • Publication number: 20210327881
    Abstract: Some embodiments include an integrated assembly having capacitor-contact-regions. Metal-containing interconnects are coupled with the capacitor-contact-regions. A first insulative material is between the metal-containing interconnects. A second insulative material is over the first insulative material. A third insulative material is over the second insulative material. First capacitor electrodes extend through the second and third insulative materials and are coupled with the metal-containing interconnects. Fourth insulative material is adjacent the first capacitor electrodes. Capacitor plate electrodes are adjacent the fourth insulative material and are spaced from the first capacitor electrodes by the fourth insulative material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: April 17, 2020
    Publication date: October 21, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Ke-Hung Chen, Christopher W. Petz, Pankaj Sharma, Yong Mo Yang
  • Patent number: 10832966
    Abstract: Structures and fabrication methods for a field-effect transistor. First and second spacers are formed adjacent to opposite sidewalls of a gate structure. A section of the gate structure is partially removed with a first etching process to form a cut that extends partially through the gate structure. After partially removing the section of the gate structure with the first etching process, upper sections of the first and second sidewall spacers arranged above the gate structure inside the cut are at least partially removed. After at least partially removing the upper sections of the first and second sidewall spacers, the section of the gate structure is completely removed from the cut with a second etching process. A dielectric material is deposited inside the cut to form a dielectric pillar.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chang Seo Park, Haiting Wang, Shimpei Yamaguchi, Junsic Hong, Yong Mo Yang, Scott Beasor
  • Publication number: 20190355832
    Abstract: One illustrative IC product disclosed herein includes first and second final gate structures and an insulating gate separation structure positioned between the first and second final gate structures. In one embodiment, the insulating gate separation structure has a stepped bottom surface with a substantially horizontally oriented bottom central surface that is surrounded by a substantially horizontally oriented recessed surface, wherein the substantially horizontally oriented bottom central surface is positioned a first level above the substrate and the substantially horizontally oriented recessed surface is positioned at a second level above the substrate, wherein the second level is greater than the first level.
    Type: Application
    Filed: July 26, 2019
    Publication date: November 21, 2019
    Inventors: Jiehui Shu, Chang Seo Park, Shimpei Yamaguchi, Tao Han, Yong Mo Yang, Jinping Liu, Hyuck Soo Yang
  • Patent number: 10453936
    Abstract: One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, the sacrificial gate structure comprising a sacrificial gate insulation layer and a sacrificial gate electrode material, performing a first gate-cut etching process to thereby form an opening in the sacrificial gate electrode material and forming an internal sidewall spacer in the opening. In this example, the method also includes, after forming the internal sidewall spacer, performing a second gate-cut etching process through the opening, the second gate-cut etching process being adapted to remove the sacrificial gate electrode material, performing an oxidizing anneal process and forming an insulating material in at least the opening.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: October 22, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Jiehui Shu, Chang Seo Park, Shimpei Yamaguchi, Tao Han, Yong Mo Yang, Jinping Liu, Hyuck Soo Yang
  • Publication number: 20190259668
    Abstract: Structures and fabrication methods for a field-effect transistor. First and second spacers are formed adjacent to opposite sidewalls of a gate structure. A section of the gate structure is partially removed with a first etching process to form a cut that extends partially through the gate structure. After partially removing the section of the gate structure with the first etching process, upper sections of the first and second sidewall spacers arranged above the gate structure inside the cut are at least partially removed. After at least partially removing the upper sections of the first and second sidewall spacers, the section of the gate structure is completely removed from the cut with a second etching process. A dielectric material is deposited inside the cut to form a dielectric pillar.
    Type: Application
    Filed: February 20, 2018
    Publication date: August 22, 2019
    Inventors: Chang Seo Park, Haiting Wang, Shimpei Yamaguchi, Junsic Hong, Yong Mo Yang, Scott Beasor
  • Publication number: 20190131429
    Abstract: One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, the sacrificial gate structure comprising a sacrificial gate insulation layer and a sacrificial gate electrode material, performing a first gate-cut etching process to thereby form an opening in the sacrificial gate electrode material and forming an internal sidewall spacer in the opening. In this example, the method also includes, after forming the internal sidewall spacer, performing a second gate-cut etching process through the opening, the second gate-cut etching process being adapted to remove the sacrificial gate electrode material, performing an oxidizing anneal process and forming an insulating material in at least the opening.
    Type: Application
    Filed: October 30, 2017
    Publication date: May 2, 2019
    Inventors: Jiehui Shu, Chang Seo Park, Shimpei Yamaguchi, Tao Han, Yong Mo Yang, Jinping Liu, Hyuck Soo Yang