Patents by Inventor Yong Mun CHANG

Yong Mun CHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing device
    Patent number: 10991555
    Abstract: A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.
    Type: Grant
    Filed: October 29, 2018
    Date of Patent: April 27, 2021
    Inventors: Soo Beom Jo, Hae Young Yoo, Ju Hee Lee, Yong Mun Chang, Myung Soo Huh
  • PLASMA PROCESSING DEVICE
    Publication number: 20190214233
    Abstract: A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.
    Type: Application
    Filed: October 29, 2018
    Publication date: July 11, 2019
    Inventors: Soo Beom JO, Hae Young YOO, Ju Hee LEE, Yong Mun CHANG, Myung Soo HUH