Abstract: The present disclosure relates to an apparatus and a method for a thickness and a profile of a multilayer thin film using a vibration insensitive interference method are provided, which allow measuring the phase of a measurement object by acquiring a plurality of different phase-shifted interference signal images at a time through interference signals between a reference flat and the measurement object by a polarizing beam splitter, a quarter-wave plate, a shutter and a pixelated polarizing camera, and which also allow measuring reflectance of the measurement object by acquiring a plurality of reflected signal images obtained at a time through respective reflected lights for each of a reference surface and the measurement object by a plurality of different polarizers.