Abstract: A superjunction semiconductor device having a reduced source area and a method of manufacturing the same and, more particularly, to a semiconductor device and a method of manufacturing the same, in which the semiconductor device realizes a reduction in the area of a source in a body region to reduce the current during a short circuit fault, thus delaying a temperature increase and increasing the time before temperature-related device destruction.

Abstract: Disclosed are a superjunction semiconductor device and a method of manufacturing the same. More particularly, the present disclosure relates to a superjunction semiconductor device and a method of manufacturing the same, in which the device includes a field oxide layer having an uppermost end or surface that is higher than that of a gate oxide layer, between a gate electrode and a second pillar region in a cell region. This enables a reduction in gate-drain parasitic capacitance, thereby increasing switching speed and reducing switching loss.

Abstract: A pillar structure includes an epitaxial layer of a first conductivity type including an active region and a peripheral region surrounding the active region and a plurality of pillars of a second conductivity type, the pillars extending in a vertical direction within the epitaxial layer, being spaced apart from each other in a horizontal direction, respectively, and including active pillars provided in the active region and peripheral pillars provided in the peripheral region, wherein the active pillars are spaced apart from another adjacent each other at a first pitch, and a pair of the peripheral pillars are branched from one of the active pillars and are spaced apart from each other at a second pitch smaller than the first pitch.

Abstract: The present disclosure relates to a superjunction semiconductor device having a reduced source area and a method of manufacturing the same and, more particularly, to a semiconductor device and a method of manufacturing the same, in which the semiconductor device realizes a reduction in the area of a source in a body region to reduce the current during a short circuit fault, thus delaying a temperature increase and increasing the time before temperature-related device destruction.

Abstract: Disclosed are a superjunction semiconductor device and a method of manufacturing the same. More particularly, the present disclosure relates to a superjunction semiconductor device and a method of manufacturing the same, in which the device includes a field oxide layer having an uppermost end or surface that is higher than that of a gate oxide layer, between a gate electrode and a second pillar region in a cell region. This enables a reduction in gate-drain parasitic capacitance, thereby increasing switching speed and reducing switching loss.