Abstract: Provided are a nozzle inspection method and a nozzle inspection apparatus capable of accurately detecting a defect in an inkjet head nozzle within a short time. The nozzle inspection method comprises discharging a plurality of droplets into a first region of interest of a substrate using a first nozzle to form an inspection pattern, and determining whether the first nozzle is defective based on the inspection pattern.

Abstract: The present disclosure relates to a substrate processing apparatus and a substrate processing method. The substrate processing apparatus according to the exemplary embodiment of the present disclosure may include: a processing liquid supply tube; a nozzle unit which is supplied with a processing liquid from the processing liquid supply tube and discharges the processing liquid to the substrate; and a light source unit which is provided to irradiate the processing liquid discharged from the nozzle unit with ultraviolet rays. According to the present disclosure, the processing liquid, which is electrified while passing the processing liquid supply tube, is irradiated with ultraviolet rays, such that electricity is eliminated from the electrified processing liquid, and as a result, it is possible to minimize a problem that the substrate is contaminated by peripheral particles or arcing occurs on the substrate.

Abstract: The present disclosure relates to a method, a device, and a system for controlling a hydraulic pump of a construction machine, the system comprising: an engine; an engine control unit configured to control the engine by using engine limit torque information and current engine torque information of the engine; a hydraulic pump operated by power supplied from the engine; at least one actuator driven by a hydraulic pressure discharged from the hydraulic pump; and a hydraulic pump control device configured to control a limited swash plate angle of the hydraulic pump by using a torque of the hydraulic pump and the engine limit torque information received from the engine control unit.

Abstract: The present disclosure relates to a substrate processing apparatus and a substrate processing method. The substrate processing apparatus according to the exemplary embodiment of the present disclosure may include: a processing liquid supply tube; a nozzle unit which is supplied with a processing liquid from the processing liquid supply tube and discharges the processing liquid to the substrate; and a light source unit which is provided to irradiate the processing liquid discharged from the nozzle unit with ultraviolet rays. According to the present disclosure, the processing liquid, which is electrified while passing the processing liquid supply tube, is irradiated with ultraviolet rays, such that electricity is eliminated from the electrified processing liquid, and as a result, it is possible to minimize a problem that the substrate is contaminated by peripheral particles or arcing occurs on the substrate.

Abstract: The present disclosure relates to a method, a device, and a system for controlling a hydraulic pump of a construction machine, the system comprising: an engine; an engine control unit configured to control the engine by using engine limit torque information and current engine torque information of the engine; a hydraulic pump operated by power supplied from the engine; at least one actuator driven by a hydraulic pressure discharged from the hydraulic pump; and a hydraulic pump control device configured to control a limited swash plate angle of the hydraulic pump by using a torque of the hydraulic pump and the engine limit torque information received from the engine control unit.

Abstract: The present invention provides a tool path forming method in a milling processing system, the method including: (A) a shape offset step; (B) a virtual wall forming step; (C) an interference region forming and shape revising step; (D) a closed shape forming step; (E) a cutting surface forming step; (F) tool path forming steps; (G) an unprocessed region detecting step; and (H) an uncut region tool path forming step.

Abstract: The present invention provides a tool path forming method in a milling processing system, the method including: (A) a shape offset step; (B) a virtual wall forming step; (C) an interference region forming and shape revising step; (D) a closed shape forming step; (E) a cutting surface forming step; (F) tool path forming steps; (G) an unprocessed region detecting step; and (H) an uncut region tool path forming step.