Patents by Inventor Yong Tak JIN

Yong Tak JIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME
    Publication number: 20230082802
    Abstract: An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.
    Type: Application
    Filed: November 18, 2022
    Publication date: March 16, 2023
    Applicants: SK hynix Inc., EUGENE TECHNOLOGY CO., LTD.
    Inventors: Min Jin JUNG, Tae Hwan KIM, Min Woong KANG, Hyun Jun YOO, Sung Ho KANG, Song Hwan PARK, Bo Sun KIM, Hong Won LEE, Joo Hyun CHO, Yong Tak JIN
  • APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
    Publication number: 20200392619
    Abstract: An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.
    Type: Application
    Filed: December 2, 2019
    Publication date: December 17, 2020
    Applicants: SK hynix Inc., EUGENE TECHNOLOGY CO., LTD.
    Inventors: Min Jin JUNG, Tae Hwan KIM, Min Woong KANG, Hyun Jun YOO, Sung Ho KANG, Song Hwan PARK, Bo Sun KIM, Hong Won LEE, Joo Hyun CHO, Yong Tak JIN