Patents by Inventor Yong Wah Jacky Cheng

Yong Wah Jacky Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and methods for OPC model accuracy management and disposition
    Patent number: 9286435
    Abstract: System and methods for OPC model accuracy and disposition using quad matrix are presented. A method includes obtaining wafer data from a calibration test pattern. The method also classifies the wafer data into four quadrants of a quad matrix. The method further utilizes at least one of the four quadrants to quantify OPC model accuracy.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: March 15, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yong Wah Jacky Cheng, Andrew Ker Ching Khoh, Yee Mei Foong, Gek Soon Chua
  • SYSTEM AND METHODS FOR OPC MODEL ACCURACY MANAGEMENT AND DISPOSITION
    Publication number: 20150269306
    Abstract: System and methods for OPC model accuracy and disposition using quad matrix are presented. A method includes obtaining wafer data from a calibration test pattern. The method also classifies the wafer data into four quadrants of a quad matrix. The method further utilizes at least one of the four quadrants to quantify OPC model accuracy.
    Type: Application
    Filed: June 4, 2015
    Publication date: September 24, 2015
    Inventors: Yong Wah Jacky CHENG, Andrew Ker Ching KHOH, Yee Mei FOONG, Gek Soon CHUA
  • SYSTEM AND METHODS FOR OPC MODEL ACCURACY MANAGEMENT AND DISPOSITION
    Publication number: 20150186577
    Abstract: System and methods for OPC model accuracy and disposition using quad matrix are presented. A method includes obtaining wafer data from a calibration test pattern. The method also classifies the wafer data into four quadrants of a quad matrix. The method further utilizes at least one of the four quadrants to quantify OPC model accuracy.
    Type: Application
    Filed: December 30, 2013
    Publication date: July 2, 2015
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yong Wah Jacky CHENG, Andrew Ker Ching KHOH, Yee Mei FOONG, Gek Soon CHUA
  • System and methods for OPC model accuracy management and disposition
    Patent number: 9053269
    Abstract: System and methods for OPC model accuracy and disposition using quad matrix are presented. A method includes obtaining wafer data from a calibration test pattern. The method also classifies the wafer data into four quadrants of a quad matrix. The method further utilizes at least one of the four quadrants to quantify OPC model accuracy.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: June 9, 2015
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yong Wah Jacky Cheng, Andrew Ker Ching Khoh, Yee Mei Foong, Gek Soon Chua