Patents by Inventor Yongfeng Ni
Yongfeng Ni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250110381Abstract: A supercontinuum radiation source including a pump laser arrangement for generating pump radiation and including a plurality of pump laser heads; a radiation combiner for combining the respective pump radiation from each pump laser head, and a non-linear fiber for receiving the pump radiation so as to excite a working medium within the non-linear fiber to generate supercontinuum radiation. Each pump laser head has dimensions no greater than 5 cm in any direction. Alternatively, or in addition the supercontinuum radiation source further includes a control arrangement for controlling the pump laser arrangement, the control arrangement configured for non-simultaneous emission of pulses from each pump laser head.Type: ApplicationFiled: January 23, 2023Publication date: April 3, 2025Applicant: ASML NETHERLANDS B.V.Inventor: Yongfeng NI
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Patent number: 12130538Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.Type: GrantFiled: January 14, 2022Date of Patent: October 29, 2024Assignee: ASML NETHERLANDS B.V.Inventor: Yongfeng Ni
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Patent number: 12050409Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: GrantFiled: March 1, 2023Date of Patent: July 30, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Yongfeng Ni, Ronald Franciscus Herman Hugers, Andreas Johannes Antonius Brouns
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Publication number: 20240142853Abstract: A multiple wavelength light source device and associated method for generating output radiation that has a plurality of discrete output wavelength bands. The multiple wavelength light source device includes a pump radiation source arrangement configured to generate input radiation including at least a first frequency component and a second frequency component; and a hollow-core photonic crystal fiber configured to confine a working medium. The hollow-core photonic crystal fiber is configured to receive the input radiation and to generate the plurality of discrete output wavelength bands distributed over a wavelength range of interest via a seed-assisted cascaded four wave mixing (FWM) process in the working medium.Type: ApplicationFiled: February 9, 2022Publication date: May 2, 2024Inventors: Yongfeng NI, Willem Richard PONGERS
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Patent number: 11886096Abstract: An assembly including a non-linear element configured for generating broadband radiation from input radiation coupled into the non-linear element. The assembly further includes an optical element positioned downstream of the non-linear element configured to reflect a fraction of the broadband radiation back into the non-linear element. The non-linear element can be a nonlinear fiber, such as a hollow-core photonic crystal fiber (HC-PCF).Type: GrantFiled: February 24, 2021Date of Patent: January 30, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Vitaliy Prosyentsov, Yongfeng Ni
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Publication number: 20230273502Abstract: A method of generating broadband output radiation and associated broadband radiation source. The method includes generating pulses of input radiation having a duration between 50fs and 400fs and having a rise time of less than 60fs; and exciting a working medium within a hollow core fiber with the pulses of input radiation.Type: ApplicationFiled: July 6, 2021Publication date: August 31, 2023Applicant: ASML NETHERLANDS B.V.Inventor: Yongfeng NI
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Publication number: 20230221659Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: ApplicationFiled: March 1, 2023Publication date: July 13, 2023Applicant: ASML NETHERLANDS B. V.Inventors: Yongfeng NI, Ronald Franciscus Herman HUGERS, Andreas Johannes Antonius BROUNS
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Patent number: 11619887Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: GrantFiled: August 18, 2020Date of Patent: April 4, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Yongfeng Ni, Ronald Franciscus Herman Hugers, Andreas Johannes Antonius Brouns
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Publication number: 20230091241Abstract: An assembly including a non-linear element configured for generating broadband radiation from input radiation coupled into the non-linear element. The assembly further includes an optical element positioned downstream of the non-linear element configured to reflect a fraction of the broadband radiation back into the non-linear element. The non-linear element can be a nonlinear fiber, such as a hollow-core photonic crystal fiber (HC-PCF).Type: ApplicationFiled: February 24, 2021Publication date: March 23, 2023Applicant: ASML NETHERLANDS B.V.Inventors: Vitaliy PROSYENTSOV, Yongfeng NI
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Publication number: 20220137482Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.Type: ApplicationFiled: January 14, 2022Publication date: May 5, 2022Applicant: ASML NETHERLANDS B.V.Inventor: Yongfeng Ni
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Publication number: 20220128910Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.Type: ApplicationFiled: January 6, 2022Publication date: April 28, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Yongfeng NI
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Patent number: 11237486Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.Type: GrantFiled: July 17, 2020Date of Patent: February 1, 2022Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Yongfeng Ni
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Patent number: 11226535Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.Type: GrantFiled: September 14, 2020Date of Patent: January 18, 2022Assignee: ASML Netherlands B.V.Inventor: Yongfeng Ni
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Publication number: 20210080803Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.Type: ApplicationFiled: September 14, 2020Publication date: March 18, 2021Applicant: ASML NETHERLANDS B.V.Inventor: Yongfeng NI
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Publication number: 20210063900Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: ApplicationFiled: August 18, 2020Publication date: March 4, 2021Applicant: ASML NETHERLANDS B.V.Inventors: Yongfeng NI, Ronald Franciscus Herman HUGERS, Andreas Johannes Antonius BROUNS
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Publication number: 20210026255Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.Type: ApplicationFiled: July 17, 2020Publication date: January 28, 2021Applicant: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas Bauerschmidt, Yongfeng Ni
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Patent number: 10811836Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.Type: GrantFiled: June 14, 2019Date of Patent: October 20, 2020Assignee: ASML Netherlands B.V.Inventor: Yongfeng Ni
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Patent number: 10461490Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.Type: GrantFiled: September 26, 2018Date of Patent: October 29, 2019Assignee: ASML Netherlands B.V.Inventor: Yongfeng Ni
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Publication number: 20190296514Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.Type: ApplicationFiled: June 14, 2019Publication date: September 26, 2019Applicant: ASML Netherlands B.V.Inventor: Yongfeng NI
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Publication number: 20190103721Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.Type: ApplicationFiled: September 26, 2018Publication date: April 4, 2019Applicant: ASML Netherlands B.V.Inventor: Yongfeng Ni