Abstract: Embodiments of the disclosure relate to methods for reducing or eliminating the first wafer effect after chamber cleans for plasma etch processes. In some embodiments, the wafer support is maintained at an elevated temperature relative to the etch process. In some embodiments, the etch process is a NF3+NH3 plasma etch to remove native oxides from a silicon substrate.

Abstract: Methods of preparing a porous robust support to host an ultra-thin enzyme-assisted membrane, and a new membrane system that can be used for gas filtration purposes to remove/separate carbon dioxide or other gases from a gas mixture such as those from power production or enhanced oil recovery or fuel production or air and recycle/collect/utilize carbon dioxide are disclosed herein. A method may include protecting the surface with a blocking material and polishing the protected surface, coating a thin layer of silica nanospheres onto the polished surface, coating a silica sol-gel and surfactant solution onto the nanospheres, and then removing the surfactant and blocking material to generate a well-defined porous structure with nanochannels.

Abstract: A method of forming a semiconductor device structure by utilizing a hydrogen plasma treatment to promote selective deposition is disclosed. In some embodiments, the method includes forming a metal layer within at least one feature on the semiconductor device structure. The method includes exposing the metal layer to a hydrogen plasma treatment. The hydrogen plasma treatment preferentially treats the top field and sidewalls while leaving the bottom surface substantially untreated to encourage bottom up metal film growth. In some embodiments, the hydrogen plasma treatment comprises substantially only hydrogen ions.

Abstract: Embodiments of the disclosure relate to methods for metal gapfill of a logic device with lower resistivity. Specific embodiments provide integrated separate tungsten PVD processes with plasma-etch to solve the overhang issue caused by tungsten PVD and the high resistivity caused by nucleation.

Abstract: Embodiments of the disclosure relate to methods for metal gapfill with lower resistivity. Specific embodiments provide methods of forming a tungsten gapfill without a high resistance nucleation layer. Some embodiments of the disclosure utilize a nucleation underlayer to promote growth of the metal gapfill.

Abstract: Disclosed are methods of preparing a porous ceramic support for an ultra-thin enzyme-assisted membrane, and a new membrane that can be used for gas filtration purposes to remove/separate carbon dioxide or other gases from a gas mixture such as those from power production or enhanced oil recovery or fuel production or air, and recycle/collect/utilize carbon dioxide. In some embodiments, a method may include blocking the pores of a porous substrate with a removable medium, and polishing the surface, coating a silica sol-gel solution onto the support, and removing the blocking medium and sol-gel surfactant to leave a well-confined porous structure.

Abstract: A method of forming a semiconductor device structure includes forming a nucleation layer within at least one feature. The method includes exposing the nucleation layer to a nitrogen plasma treatment. The nitrogen plasma treatment preferentially treats the top field and sidewalls while leaving the bottom surface substantially untreated to encourage bottom up metal growth.

Abstract: A method and apparatus for determining a state of a computing device are provided. At least one unique code associated with at least one file resident on the computing device is determined, the at least one unique code representative of a state of the at least one file. At least one unique reference code associated with at least one update file is determined, the at least one update file for updating the at least one file. The at least one unique reference code is representative of an expected state of the at least one file. The state of the computing device is determined to be in an expected state if the at least one unique code matches the at least one unique reference code, and in an unexpected state if the at least one unique code does not match the at least one unique reference code.

Abstract: According to embodiments described in the specification, a method and apparatus, for determining the state of a computing device is described, by first determining at least one unique code associated with at least one file resident on the computing device, the at least one unique code representative of a state of the at least one file. Then at least one unique reference code associated with at least one update file is determined, the at least one update file for updating said at least one file resident on the computing device, and the at least one unique reference code representative of an expected state of the at least one file resident on the computing device. Finally, the state of the computing device is determined to be in an expected state if the at least one unique code matches the at least one unique reference code, and in an unexpected state if the at least one unique code does not match the at least one unique reference code.

Abstract: According to embodiments described in the specification, a method, and apparatus for updating the state of a computing device by first receiving a message processable by the computing device, the message comprising data for instructing the computing device to request at least one update file from at least one remote computing entity, the at least one update file for updating a file resident on the computing device; and processing the message to effect updating of the computing device.

Abstract: According to embodiments described in the specification, a method and apparatus, for determining the state of a computing device is described, by first determining at least one unique code associated with at least one file resident on the computing device, the at least one unique code representative of a state of the at least one file. Then at least one unique reference code associated with at least one update file is determined, the at least one update file for updating said at least one file resident on the computing device, and the at least one unique reference code representative of an expected state of the at least one file resident on the computing device. Finally, the state of the computing device is determined to be in an expected state if the at least one unique code matches the at least one unique reference code, and in an unexpected state if the at least one unique code does not match the at least one unique reference code.