Patents by Inventor Yong-Quan Chen

Yong-Quan Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR CLEANING A WAFER STAGE
    Publication number: 20110114125
    Abstract: A method for cleaning a wafer stage is provided. First, a wafer stage with a wafer thereon is provided. Second, a leveling scanning step is carried out to examine the evenness of the wafer. The wafer is removed from the wafer stage once an abnormal evenness is detected. Afterwards, a vacuum cleaner device is used to in-situ clean the surface of the wafer stage after the wafer is removed.
    Type: Application
    Filed: April 22, 2010
    Publication date: May 19, 2011
    Inventors: Yong-Quan Chen, Shu-Kuo Chiu