Patents by Inventor Yongshan Tao

Yongshan Tao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for preparing a protective coating on a surface of key components and parts of IC devices based on plasma spraying technology and cold spraying technology
    Patent number: 11834748
    Abstract: Through the plasma spraying technology and the cold spraying high-speed deposition technology, an evenly distributed protective coating is formed on the surface of a plasma etching chamber. The protective coating, having a double-layer composite structure, includes a metal+Y2O3 coating as a metal+Y2O3 transition layer deposited by plasma spraying as a lower layer of the double-layer composite structure, and a high-purity Y2O3 ceramic coating coated on the metal+Y2O3 transition layer as an upper layer of the double-layer composite structure, the metal+Y2O3 transition layer is configured to reduce the difference in expansion coefficient between the Y2O3 ceramic coating and the metal substrate, and enhance the bonding force between the Y2O3 ceramic coating and the metal substrate; the high-purity Y2O3 ceramic coating is formed by depositing Y2O3 ceramic powders on the metal+Y2O3 transition layer at high speed through cold spraying high-speed deposition.
    Type: Grant
    Filed: January 13, 2020
    Date of Patent: December 5, 2023
    Assignee: SHENYANG FORTUNE PRECISION EQUIPMENT CO., LTD
    Inventors: Guangwen Zheng, Tianying Xiong, Yanfang Shen, Xinyu Cui, Jiqiang Wang, Junrong Tang, Ning Li, Jianzhong Qi, Yongshan Tao
  • Method for preparing a protective coating on a surface of key components and parts of IC devices based on plasma spraying technology and cold spraying technology
    Publication number: 20220275518
    Abstract: Through the plasma spraying technology and the cold spraying high-speed deposition technology, an evenly distributed protective coating is formed on the surface of a plasma etching chamber. The protective coating, having a double-layer composite structure, includes a metal+Y2O3 coating as a metal+Y2O3 transition layer deposited by plasma spraying as a lower layer of the double-layer composite structure, and a high-purity Y2O3 ceramic coating coated on the metal+Y2O3 transition layer as an upper layer of the double-layer composite structure, the metal+Y2O3 transition layer is configured to reduce the difference in expansion coefficient between the Y2O3 ceramic coating and the metal substrate, and enhance the bonding force between the Y2O3 ceramic coating and the metal substrate; the high-purity Y2O3 ceramic coating is formed by depositing Y2O3 ceramic powders on the metal+Y2O3 transition layer at high speed through cold spraying high-speed deposition.
    Type: Application
    Filed: January 13, 2020
    Publication date: September 1, 2022
    Inventors: Guangwen Zheng, Tianying Xiong, Yanfang Shen, Xinyu Cui, Jigiang Wang, Junrong Tang, Ning Li, Jianzhong Qi, Yongshan Tao