Abstract: According to the present invention, disclosed is an electrical variable capacitor circuit and a semiconductor processing system comprising same.

Abstract: A semiconductor processing system includes: an RF power supply which generates and supplies RF power; a plasma chamber which receives the RF power from the RF power supply; and an impedance matching circuit which is arranged between the RF power supply and the plasma chamber and matches output impedance to the plasma chamber. The impedance matching circuit includes a plurality of electrical variable capacitor circuits. Each of the electrical variable capacitor circuits includes: a first node connected to one side of the RF power supply; a second node connected to the other side of the RF power supply; a variable capacitor connected to the first node; a PIN diode connected in parallel to the variable capacitor; a switch connected in series to the PIN diode; and an inductor connected in parallel to the variable capacitor and the switch.

Abstract: Provided is a driving system and method for a wound rotor synchronous generator. The driving system for a wound rotor synchronous generator according to the present invention includes: a converter controlling the wound rotor synchronous generator and receiving generated power; and a field winding power supply means supplying the power to a field winding of a rotor of the generator. The field winding power supply means is connected to the converter to receive the power from the converter and supply the power to the field winding, the power supplied to the field winding being electrically insulated from the power received from the converter.

Abstract: Provided is a driving system and method for a wound rotor synchronous generator. The driving system for a wound rotor synchronous generator according to the present invention includes: a converter controlling the wound rotor synchronous generator and receiving generated power; and a field winding power supply means supplying the power to a field winding of a rotor of the generator. The field winding power supply means is connected to the converter to receive the power from the converter and supply the power to the field winding, the power supplied to the field winding being electrically insulated from the power received from the converter.

Abstract: A converter circuit is specified in which, in order to avoid losses to the greatest possible extent, a first inductance is connected in series into the connection of a DC voltage source of the converter circuit to a first switch of the converter circuit, and in which, moreover, a second inductance is connected in series into the connection of a second switch of a switching group of the converter circuit to the junction point between a second capacitive energy store and a second unidirectional non-drivable power semiconductor switch of the switching group. Two further alternative converter circuits and also a method for operating the converter circuit are furthermore specified.

Abstract: An arc furnace power supply device with a rectifier is specified, which rectifier on its alternating voltage side can be connected with an electrical alternating voltage supply network and on its direct voltage side is connected with a direct voltage circuit. Moreover the arc furnace power supply device comprises an inverter, which inverter on its direct voltage side is connected with the direct voltage circuit and on its alternating voltage side with at least one arc electrode. For improvement of the stability and even burning of the arc the inverter is configured as an inverter that applies a rectangular alternating voltage to the arc electrode.