Abstract: A device transfer apparatus is provided. The device transfer apparatus includes a container of a polygonal shape which contains a substrate including device holes, vibration sources which generates vibration and transfers the vibration to a fluid in the container, and a processor which controls outputs of the vibration sources. The vibration sources include first group vibration sources arranged on a circumference of a first circle having a radius of a first distance from a central point, and second group vibration sources arranged on a circumference of a second circle which is concentric with the first circle and has a radius of a second distance that is longer than the first distance. The container is arranged on the central point and contains a fluid and micro devices distributed in the fluid. The processor controls the first group vibration sources and the second group vibration sources to output vibration.

Abstract: An element transfer device is provided. The element transfer device includes a cartridge including a plurality of element recesses each having a shape corresponding to a shape of a micro element, at least one wave energy generator configured to supply wave energy to the cartridge, a camera, and a processor. The processor is configured to primarily arrange a plurality of micro elements in the plurality of element recesses by supplying the wave energy to the cartridge accommodating the plurality of micro elements disposed in a fluid, obtain a first image by photographing the cartridge, and based on the first image, control a waveform and a frequency of the wave energy and control a secondary arrangement of disposing the micro elements in remaining element recesses in which the micro elements are not disposed.