Patents by Inventor Yonk Uk Kwon

Yonk Uk Kwon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for compensating dynamic and thermal deformity errors of linear motion single-plane gantry stage in real time, stage apparatus, manufacturing thereof, and measuring and inspection equipment
    Patent number: 9417633
    Abstract: In a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring, and inspecting apparatuses using the system, the system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially movable gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially movable slider movable on the X-axially movable gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially movable gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: August 16, 2016
    Assignee: Soonhan Engineering Corp.
    Inventors: Byoung Gwan Ko, Banik Rahul, Jong Kyu Seo, Soo Keun Shin, Chul Jung, Yonk Uk Kwon
  • System for Compensating Dynamic and Thermal Deformity Errors of Linear Motion Single-Plane Gantry Stage in Real Time, Stage Apparatus, Manufacturing Thereof, and Measuring and Inspection Equipment
    Publication number: 20150153742
    Abstract: In a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring, and inspecting apparatuses using the system, the system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially movable gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially movable slider movable on the X-axially movable gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially movable gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and
    Type: Application
    Filed: December 2, 2014
    Publication date: June 4, 2015
    Inventors: Byoung Gwan Ko, Banik Rahul, Jong Kyu Seo, Soo Keun Shin, Chul Jung, Yonk Uk Kwon