Patents by Inventor Yoon Hyeong Lee

Yoon Hyeong Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MONITORING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
    Publication number: 20240184216
    Abstract: A monitoring unit for measuring, in real time, the power of an EUV beam transmitted to a substrate and a substrate treating apparatus including the monitoring unit. The substrate treating apparatus comprising a source which generates an EUV beam, a scanner which transfers a mask pattern to a substrate by using the EUV beam, and a monitoring unit which comprises a detector for detecting the EUV beam and monitoring the power of the EUV beam in real time, wherein the detector is disposed on a path along which the EUV beam passes through a first mirror assembly provided in the scanner and moves to a reticle on which the mask pattern is formed.
    Type: Application
    Filed: September 5, 2023
    Publication date: June 6, 2024
    Inventors: Yoon Sang LEE, Eun Hee JEANG, Dong Hyeong KIM, Teun BOEREN, Jeong-Gil KIM, Kyung Bin PARK, Hyuck SHIN
  • HISTORY MANAGEMENT PAD OF SEMICONDUCTOR TEST SOCKET, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR TEST DEVICE INCLUDING HISTORY MANAGEMENT PAD
    Publication number: 20200233029
    Abstract: The present invention relates to a history management pad of a semiconductor test socket, a manufacturing method thereof, and a semiconductor test device including the history management pad.
    Type: Application
    Filed: July 23, 2018
    Publication date: July 23, 2020
    Applicant: TSE CO.,LTD
    Inventors: Bo Hyun KIM, Yoon Hyeong LEE
  • History management pad of semiconductor test socket, manufacturing method thereof, and semiconductor test device including history management pad
    Patent number: 10718809
    Abstract: The present invention relates to a history management pad of a semiconductor test socket, a manufacturing method thereof, and a semiconductor test device including the history management pad.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: July 21, 2020
    Assignee: TSE CO., LTD
    Inventors: Bo Hyun Kim, Yoon Hyeong Lee