Abstract: The present invention relates to a substrate processing apparatus capable of shortening a process time, and the substrate processing apparatus according to the present invention comprises an index chamber having a transfer robot loading/unloading a substrate; a process chamber having a heating means heating the substrate and processing the substrate; a loadlock chamber disposed between the index chamber and the process chamber; and a conveying chamber having a conveying robot conveying the substrate between the process chamber and the loadlock chamber, wherein a pre-heating means is provided in the conveying robot to pre-heat the substrate in a state before processing.

Abstract: Disclosed are a system and a method of providing customized content by using a sound, the system including: multiple smart devices outputting content for each channel received from a content provider; multiple user terminals configured to: receive a user's voice for a preset text for voice recognition to register the user's voice as voice data for user identification, and receive waveform data of a sound output from the smart device and voice data of the user for transmission when a voice corresponding to the registered voice data for user identification is recognized while the smart device is in operation; and a recommendation server configured to: collect the waveform data for the content that is possibly output from the smart device, and analyze the voice data and the waveform data to generate interest information of the user when the waveform data and the voice data are transmitted from the user terminal.

Abstract: Disclosed are a system and a method of providing customized content by using a sound, the system including: multiple smart devices outputting content for each channel received from a content provider; multiple user terminals configured to: receive a user's voice for a preset text for voice recognition to register the user's voice as voice data for user identification, and receive waveform data of a sound output from the smart device and voice data of the user for transmission when a voice corresponding to the registered voice data for user identification is recognized while the smart device is in operation; and a recommendation server configured to: collect the waveform data for the content that is possibly output from the smart device, and analyze the voice data and the waveform data to generate interest information of the user when the waveform data and the voice data are transmitted from the user terminal.

Abstract: Provided is an electromagnetic chuck mounting structure capable of tightly and fixedly mounting an electromagnetic chuck on a table without fluctuation, having light weight, and making a low profile when an electromagnetic chuck is mounted on the table. The structure includes: a mounting groove recessed on an upper surface of the table and located inward of an edge of the table; a plurality of mounting holes formed at regular intervals on the mounting groove to fix the electromagnetic chucks to be mounted; and an adhesive filled and cured on the mounting groove and between the mounted electromagnetic chucks, wherein each of the electromagnetic chucks is fixedly fastened to each of the mounting holes by one fastening bolt, such that an upper surface of each electromagnetic chuck is aligned on a same plane with the upper surface of the table or protrudes from the upper surface of the table.

Abstract: Provided is an electromagnetic chuck mounting structure capable of tightly and fixedly mounting an electromagnetic chuck on a table without fluctuation, having light weight, and making a low profile when an electromagnetic chuck is mounted on the table. The structure includes: a mounting groove recessed on an upper surface of the table and located inward of an edge of the table; a plurality of mounting holes formed at regular intervals on the mounting groove to fix the electromagnetic chucks to be mounted; and an adhesive filled and cured on the mounting groove and between the mounted electromagnetic chucks, wherein each of the electromagnetic chucks is fixedly fastened to each of the mounting holes by one fastening bolt, such that an upper surface of each electromagnetic chuck is aligned on a same plane with the upper surface of the table or protrudes from the upper surface of the table.

Abstract: The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

Abstract: The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.