Patents by Inventor Yoon G. Kim

Yoon G. Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition of boron-containing films from decaborane
    Patent number: 4957773
    Abstract: Depopsition of a boron nitride film is carried out by introducing decaborane and dry nitrogen or ammonia into a plasma-assisted chemical vapor deposition chamber. The nitrogen or ammonia partial pressure should provide an excess over the decarborane pressures for example 200 milliTorr of N.sub.2 or NH.sub.3 and 50 MilliTorr of B.sub.10 H.sub.14. Other film layers can also be produced starting from decaborane.
    Type: Grant
    Filed: February 13, 1989
    Date of Patent: September 18, 1990
    Assignee: Syracuse University
    Inventors: James T. Spencer, Peter A. Dowben, Yoon G. Kim