Patents by Inventor Yoon-Hae Kim

Yoon-Hae Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10410871
    Abstract: A semiconductor device includes a gate structure extending in a second direction on a substrate, a source/drain layer disposed on a portion of the substrate adjacent the gate structure in a first direction crossing the second direction, a first conductive contact plug on the gate structure, and a second contact plug structure disposed on the source/drain layer. The second contact plug structure includes a second conductive contact plug and an insulation pattern, and the second conductive contact plug and the insulation pattern are disposed in the second direction and contact each other. The first conductive contact plug and the insulation pattern are adjacent to each other in the first direction. The first and second conductive contact plugs are spaced apart from each other.
    Type: Grant
    Filed: May 2, 2018
    Date of Patent: September 10, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoon-Hae Kim, Hwa-Sung Rhee, Keun-Hwi Cho
  • Publication number: 20180254188
    Abstract: A semiconductor device includes a gate structure extending in a second direction on a substrate, a source/drain layer disposed on a portion of the substrate adjacent the gate structure in a first direction crossing the second direction, a first conductive contact plug on the gate structure, and a second contact plug structure disposed on the source/drain layer. The second contact plug structure includes a second conductive contact plug and an insulation pattern, and the second conductive contact plug and the insulation pattern are disposed in the second direction and contact each other. The first conductive contact plug and the insulation pattern are adjacent to each other in the first direction. The first and second conductive contact plugs are spaced apart from each other.
    Type: Application
    Filed: May 2, 2018
    Publication date: September 6, 2018
    Inventors: Yoon-Hae KIM, Hwa-sung RHEE, Keun-hwi CHO
  • Patent number: 9984886
    Abstract: A semiconductor device includes a gate structure extending in a second direction on a substrate, a source/drain layer disposed on a portion of the substrate adjacent the gate structure in a first direction crossing the second direction, a first conductive contact plug on the gate structure, and a second contact plug structure disposed on the source/drain layer. The second contact plug structure includes a second conductive contact plug and an insulation pattern, and the second conductive contact plug and the insulation pattern are disposed in the second direction and contact each other. The first conductive contact plug and the insulation pattern are adjacent to each other in the first direction. The first and second conductive contact plugs are spaced apart from each other.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: May 29, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoon-Hae Kim, Hwa-Sung Rhee, Keun-Hwi Cho
  • Patent number: 9881838
    Abstract: A semiconductor device includes a substrate having a first region and a second region, a plurality of first gate structures in the first region, the first gate structures being spaced apart from each other by a first distance, a plurality of second gate structures in the second region, the second gate structures being spaced apart from each other by a second distance, a first spacer on sidewalls of the first gate structures, a dielectric layer on the first spacer, a second spacer on sidewalls of the second gate structures, and a third spacer on the second spacer.
    Type: Grant
    Filed: January 24, 2017
    Date of Patent: January 30, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon Hae Kim, Jin Wook Lee, Jong Ki Jung, Myung Il Kang, Kwang Yong Yang, Kwan Heum Lee, Byeong Chan Lee
  • Patent number: 9754789
    Abstract: Provided are method of fabricating semiconductor device and computing system for implementing the method. The method of fabricating a semiconductor device includes forming a target layer, forming a first mask on the target layer to expose a first region, subsequently forming a second mask on the target layer to expose a second region separated from the first region in a first direction, subsequently forming a third mask in the exposed first region to divide the first region into a first sub region and a second sub region separated from each other in a second direction intersecting the first direction, and etching the target layer using the first through third masks such that the first and second sub regions and the second region are defined in the target layer.
    Type: Grant
    Filed: October 8, 2014
    Date of Patent: September 5, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon-Hae Kim, Jong-Shik Yoon, Hwa-Sung Rhee, Byung-Sung Kim
  • Publication number: 20170133275
    Abstract: A semiconductor device includes a substrate having a first region and a second region, a plurality of first gate structures in the first region, the first gate structures being spaced apart from each other by a first distance, a plurality of second gate structures in the second region, the second gate structures being spaced apart from each other by a second distance, a first spacer on sidewalls of the first gate structures, a dielectric layer on the first spacer, a second spacer on sidewalls of the second gate structures, and a third spacer on the second spacer.
    Type: Application
    Filed: January 24, 2017
    Publication date: May 11, 2017
    Inventors: Yoon Hae KIM, Jin Wook LEE, Jong Ki JUNG, Myung II KANG, Kwang Yong YANG, Kwan Heum LEE, Byeong Chan LEE
  • Patent number: 9590103
    Abstract: A semiconductor device includes a substrate having a first region and a second region, a plurality of first gate structures in the first region, the first gate structures being spaced apart from each other by a first distance, a plurality of second gate structures in the second region, the second gate structures being spaced apart from each other by a second distance, a first spacer on sidewalls of the first gate structures, a dielectric layer on the first spacer, a second spacer on sidewalls of the second gate structures, and a third spacer on the second spacer.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: March 7, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon Hae Kim, Jin Wook Lee, Jong Ki Jung, Myung II Kang, Kwang Yong Yang, Kwan Heum Lee, Byeong Chan Lee
  • Publication number: 20160343858
    Abstract: A semiconductor device includes a substrate having a first region and a second region, a plurality of first gate structures in the first region, the first gate structures being spaced apart from each other by a first distance, a plurality of second gate structures in the second region, the second gate structures being spaced apart from each other by a second distance, a first spacer on sidewalls of the first gate structures, a dielectric layer on the first spacer, a second spacer on sidewalls of the second gate structures, and a third spacer on the second spacer.
    Type: Application
    Filed: January 8, 2016
    Publication date: November 24, 2016
    Inventors: Yoon Hae KIM, Jin Wook LEE, Jong Ki JUNG, Myung II KANG, Kwang Yong YANG, Kwan Heum LEE, Byeong Chan LEE
  • Publication number: 20160322304
    Abstract: A semiconductor device includes a gate structure extending in a second direction on a substrate, a source/drain layer disposed on a portion of the substrate adjacent the gate structure in a first direction crossing the second direction, a first conductive contact plug on the gate structure, and a second contact plug structure disposed on the source/drain layer. The second contact plug structure includes a second conductive contact plug and an insulation pattern, and the second conductive contact plug and the insulation pattern are disposed in the second direction and contact each other. The first conductive contact plug and the insulation pattern are adjacent to each other in the first direction. The first and second conductive contact plugs are spaced apart from each other.
    Type: Application
    Filed: January 20, 2016
    Publication date: November 3, 2016
    Inventors: Yoon-Hae Kim, Hwa-Sung Rhee, Keun-Hwi Cho
  • Patent number: 9412693
    Abstract: A semiconductor device includes a substrate having a transistor area, a gate structure disposed on the transistor area of the substrate, a first interlayer insulating layer covering the gate structure, a blocking pattern disposed on the first interlayer insulating layer, and a jumper pattern disposed on the blocking pattern. The jumper pattern includes jumper contact plugs vertically penetrating the first interlayer insulating layer to be in contact with the substrate exposed at both sides of the gate structure, and a jumper section configured to electrically connect the jumper contact plugs.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: August 9, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoon-Hae Kim, Jong-Shik Yoon, Hwa-Sung Rhee
  • Patent number: 9209177
    Abstract: Semiconductor devices are provided. The semiconductor devices may include an active pattern and a insulation layer. The semiconductor devices may include a gate that is on the active pattern and that includes a first material, and a dummy gate that is on the insulation layer and that includes a second material different from the first material.
    Type: Grant
    Filed: March 4, 2013
    Date of Patent: December 8, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon-Hae Kim, Jong-Shik Yoon, Young-Gun Ko
  • Patent number: 9190402
    Abstract: A semiconductor device includes an interlayer dielectric layer on a substrate, the interlayer dielectric layer having an upper surface, a lower plug extending down into the interlayer dielectric layer from the upper surface of the interlayer dielectric layer, the lower plug having an upper surface, a first dielectric layer pattern on the upper surface of the lower plug, at least a portion of the first dielectric layer pattern being directly connected to the upper surface of the lower plug, a first metal electrode pattern on the first dielectric layer pattern, a first upper plug electrically connected to the first metal electrode pattern, and a second upper plug on the lower plug, the second upper plug being spaced apart from the first upper plug.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: November 17, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon-Hae Kim, Hwa-Sung Rhee
  • Publication number: 20150111381
    Abstract: Provided are method of fabricating semiconductor device and computing system for implementing the method. The method of fabricating a semiconductor device includes forming a target layer, forming a first mask on the target layer to expose a first region, subsequently forming a second mask on the target layer to expose a second region separated from the first region in a first direction, subsequently forming a third mask in the exposed first region to divide the first region into a first sub region and a second sub region separated from each other in a second direction intersecting the first direction, and etching the target layer using the first through third masks such that the first and second sub regions and the second region are defined in the target layer.
    Type: Application
    Filed: October 8, 2014
    Publication date: April 23, 2015
    Inventors: Yoon-Hae KIM, Jong-Shik YOON, Hwa-Sung RHEE, Byung-Sung KIM
  • Patent number: 8981489
    Abstract: Semiconductor devices including a resistor structure is provided. The semiconductor device may include a gate structure on an active region, a resistor structure on a field region and a first interlayer insulating layer on the gate structure and the resistor structure. The semiconductor devices may also include a resistor trench plug vertically penetrating through the first interlayer insulating layer and contacting the resistor structure and a second interlayer insulating layer on the first interlayer insulating layer and the resistor trench plug. Further, the semiconductor devices may include a resistor contact plug vertically penetrating through the first and second interlayer insulating layers and contacting the resistor structure.
    Type: Grant
    Filed: December 11, 2013
    Date of Patent: March 17, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Junjie Xiong, Yoon-Hae Kim, Hong-Seong Kang, Yoon-Seok Lee, You-Shin Choi
  • Publication number: 20150061073
    Abstract: A semiconductor device includes an interlayer dielectric layer on a substrate, the interlayer dielectric layer having an upper surface, a lower plug extending down into the interlayer dielectric layer from the upper surface of the interlayer dielectric layer, the lower plug having an upper surface, a first dielectric layer pattern on the upper surface of the lower plug, at least a portion of the first dielectric layer pattern being directly connected to the upper surface of the lower plug, a first metal electrode pattern on the first dielectric layer pattern, a first upper plug electrically connected to the first metal electrode pattern, and a second upper plug on the lower plug, the second upper plug being spaced apart from the first upper plug.
    Type: Application
    Filed: April 4, 2014
    Publication date: March 5, 2015
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yoon-Hae KIM, Hwa-Sung RHEE
  • Patent number: 8969971
    Abstract: Semiconductor devices are provided. A semiconductor device may include a transistor area and a resistor area. The transistor area may include a gate structure. The resistor area may include an insulating layer and a resistor structure on the insulating layer. A top surface of the gate structure and a top surface of the resistor structure may be substantially coplanar.
    Type: Grant
    Filed: October 3, 2013
    Date of Patent: March 3, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Junjie Xiong, Yoon-Hae Kim, Hong-Seong Kang, Yoon-Seok Lee, You-Shin Choi
  • Patent number: 8952452
    Abstract: Semiconductor devices, and a method of manufacturing the same, include a gate insulating film pattern over a semiconductor substrate. A gate electrode is formed over the gate insulating film pattern. A spacer structure is formed on at least one side of the gate electrode and the gate insulating film pattern. The spacer structure includes a first insulating film spacer contacting the gate insulating film pattern, and a second insulating film spacer on an outer side of the first insulating film spacer. The semiconductor device has an air gap between the first insulating film spacer and the second insulating film spacer.
    Type: Grant
    Filed: December 3, 2012
    Date of Patent: February 10, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hong-Seong Kang, Yoon-Hae Kim, Jong-Shik Yoon
  • Publication number: 20140332871
    Abstract: A semiconductor device includes a substrate having a transistor area, a gate structure disposed on the transistor area of the substrate, a first interlayer insulating layer covering the gate structure, a blocking pattern disposed on the first interlayer insulating layer, and a jumper pattern disposed on the blocking pattern. The jumper pattern includes jumper contact plugs vertically penetrating the first interlayer insulating layer to be in contact with the substrate exposed at both sides of the gate structure, and a jumper section configured to electrically connect the jumper contact plugs.
    Type: Application
    Filed: February 6, 2014
    Publication date: November 13, 2014
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Yoon-Hae Kim, Jong-Shik Yoon, Hwa-Sung Rhee
  • Patent number: 8817451
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a capacitor plate includes a first propeller-shaped portion and a second propeller-shaped portion. A via portion is disposed between the first propeller-shaped portion and the second propeller-shaped portion.
    Type: Grant
    Filed: July 12, 2013
    Date of Patent: August 26, 2014
    Assignees: Samsung Electronics Co., Ltd., Infineon Technologies AG
    Inventors: Sun-Oo Kim, Yoon-Hae Kim
  • Publication number: 20140203362
    Abstract: Semiconductor devices are provided. The semiconductor devices may include an active pattern and a insulation layer. The semiconductor devices may include a gate that is on the active pattern and that includes a first material, and a dummy gate that is on the insulation layer and that includes a second material different from the first material.
    Type: Application
    Filed: March 4, 2013
    Publication date: July 24, 2014
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Yoon-Hae KIM, Jong-Shik YOON, Young-Gun KO