Abstract: A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.

Abstract: A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.

Abstract: A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.

Abstract: A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.

Abstract: A device comprising a conductor and an emitter electrode for emitting electrons formed on the conductor, the emitter electrode including a mass of a plurality of columnar crystals each containing .beta.-tungsten and having a sharpened tip end portion for emitting electrons, the plurality of columnar crystals being put in contact with one another.

Abstract: A device for emitting electrons, comprising a substrate, an insulating film formed on a surface of the substrate and having a recess, an emitter electrode formed on the insulating film and having an edge portion located at the recess, the edge portion of the emitter electrode being formed in the form of an arch within a plane perpendicular to the surface of the substrate so as to be sharpened toward a distal end of the emitter electrode, the edge portion of the emitter electrode being sharpened also in a planar direction parallel to the surface of the substrate toward the distal end of the emitter electrode so as to have a linear portion at the distal end, and the edge portion of the emitter electrode being adapted to emit electrons from the linear portion when an electric field is applied to the edge portion of the emitter electrode, and a gate electrode formed on the insulating structure and having an edge portion located at the recess and opposing the edge portion of the emitter electrode via a gap, the ed

Abstract: A method and apparatus exists for manufacturing needle-shaped materials for use as microemitters, wherein a light beam output from a light source is split into a plurality of beams and the split light beams are focused by an optical system and directed into a chamber having a gas containing electroconductive molecules. The electroconductive molecules are degraded through excitation by the beams directed into the chamber to deposit needle-shaped materials on a substrate disposed in the chamber. By so doing, a plurality of needle-shaped materials are simultaneously produced on the substrate in accordance with a corresponding number of beams obtained through splitting.