Patents by Inventor Yoshiaki Banba

Yoshiaki Banba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5264189
    Abstract: An apparatus for growing silicon single-crystals comprising a crucible containing a silicon melt, a furnace for housing the crucible and having an opening located above the crucible, a pulling mechanism for pulling a seed crystal from the melt to grow a silicon single-crystal, a cooling shell having a lower end spaced apart and located above the melt and disposed around said silicon single-crystal for cooling the silicon single crystal from a temperature of 1,050.degree. to 850.degree. C. in no more than 140 minutes as it is being pulled, and, a secondary heater for heating the silicon single crystal as it is being pulled, such that the dwelling time of the single crystal in a temperature zone of 800.degree. C. to 600.degree. C. is at least two hours. The secondary heater is disposed above the cooling shell and coaxial therewith and is arranged so as to define a space between the secondary heater and the cooling shell.
    Type: Grant
    Filed: August 21, 1992
    Date of Patent: November 23, 1993
    Assignee: Mitsubishi Materials Corporation
    Inventors: Ichiro Yamashita, Koutaro Shimizu, Yoshiaki Banba
  • Patent number: 4981549
    Abstract: A silicon single-crystal growing method is disclosed which immerses a seed crystal in a silicon melt and pulls the seed crystal from the melt to thereby grow a silicon single-crystal, and in which the dwelling time of the silicon single-crystal, which is being pulled in a temperature range of between 1,050.degree. to 850.degree. C., is set to be no longer than 140 min. The apparatus suitable for practicing the above method has a crucible, a pulling mechanism, and a temperature control shell. The temperature control shell is located above the crucible for cooling said silicon single-crystal at a cooling rate such that the dwelling time of said silicon single-crystal, which is being pulled in a temperature range of between 1,050.degree. to 850.degree. C., is not longer than 140 min.
    Type: Grant
    Filed: February 22, 1989
    Date of Patent: January 1, 1991
    Assignees: Mitsubishi Kinzoku Kabushiki Kaisha, Japan Silicon Co., Ltd.
    Inventors: Ichiro Yamashita, Koutaro Shimizu, Yoshiaki Banba, Yasushi Shimanuki, Akira Higuchi, Hisashi Furuya